Supercritical Carbon Dioxide-based Fluids Used as a Recovery Tool for Low-k Materials

2003 ◽  
Vol 766 ◽  
Author(s):  
Rosa A. Orozco-Teran ◽  
Brian P. Gorman ◽  
Zhengping Zhang ◽  
Dennis W. Mueller ◽  
Richard F. Reidy
Keyword(s):  
Carbon Dioxide ◽  
Supercritical Carbon Dioxide ◽  
Structural Damage ◽  
Low Cost ◽  
Dielectric Constants ◽  
Angle Measurements ◽  
Contact Angle Measurements ◽  
Benign Nature ◽  
Low K ◽  
Supercritical Carbon

AbstractConventional ash strippers can easily damage most porous low-k materials, causing increased dielectric constants and decreased film thicknesses. This effect is more prominent in carbon containing porous low-k materials such as methylsilsesquioxane (MSQ). Ashed MSQ films exhibit increased water adsorption and dielectric constants due to the removal of methyl groups and structural damage caused by interaction with plasma species. Supercritical carbon dioxide (SC-CO2), has attracted considerable attention due its low cost, low critical point temperatures and pressures, and environmentally benign nature. This work describes the effects of SC-CO2 in combination with silylating agents on O2 ash-damaged MSQ films. FTIR, sessiledrop goniometric contact angle measurements, and SEM were used to monitor changes in the films' chemical bonding, composition, and microstructure.

Study of Low-k Film Functionalization and Pore Sealing Using Chlorosilanes Dissolved in Supercritical Carbon Dioxide

2015 ◽  
Vol 203 (7) ◽  
pp. 880-889 ◽  
Author(s):  
Eduardo Vyhmeister ◽  
Lorenzo Reyes-Bozo ◽  
Roman Rodríguez-Maecker ◽  
Anthony Muscat ◽  
David Suleiman ◽  
...  
Keyword(s):  
Carbon Dioxide ◽  
Supercritical Carbon Dioxide ◽  
Pore Sealing ◽  
Low K ◽  
Supercritical Carbon

In situ FTIR experimental results in the silylation of low-k films with hexamethyldisilazane dissolved in supercritical carbon dioxide

2014 ◽  
Vol 90 ◽  
pp. 134-143 ◽  
Author(s):  
Eduardo Vyhmeister ◽  
Lorenzo Reyes-Bozo ◽  
Héctor Valdés-González ◽  
José-Luis Salazar ◽  
Anthony Muscat ◽  
...  
Keyword(s):  
Carbon Dioxide ◽  
Supercritical Carbon Dioxide ◽  
Experimental Results ◽  
In Situ Ftir ◽  
Low K ◽  
Supercritical Carbon

Potential of Five-Leaved Chaste Tree (Vitex negundo L.) Leaves as Source of Natural Dye from Supercritical Carbon Dioxide (SC-CO2) Extraction

2013 ◽  
Vol 594-595 ◽  
pp. 207-213
Author(s):  
T.A.T. Mohd ◽  
Nur Hashimah Alias ◽  
Nurul Aimi Ghazali ◽  
A. Azizi ◽  
Idris S. Adeib ◽  
...  
Keyword(s):  
Carbon Dioxide ◽  
Supercritical Carbon Dioxide ◽  
Low Cost ◽  
Extraction Yield ◽  
Operating Conditions ◽  
Optimum Operating ◽  
Synthetic Dyes ◽  
Vitex Negundo ◽  
Optimum Operating Condition ◽  
Supercritical Carbon

Natural dyes represent a sustainable source of colorants, which are low cost and safer than synthetic dyes, concerning human health. The purpose of this study is to extract Vitex negundo L. leaves using supercritical carbon dioxide extraction and to identify the extracts potential as a dye. The extraction process has been conducted at different operating conditions by varying temperature from 40 to 65°C with an increment of 5°C at 20, 25, and 30 MPa within 60 minutes constant time. The extracts obtained at different conditions were analyzed using Gas Chromatography Mass Spectrometer (GC-MS) to determine the chemical compounds present. Increase of temperature increased the extraction yield, but further increasing the temperature above 50°C has reduced the yield. The effect of pressure gave two different patterns, in which the first one showed the yield kept increasing with pressure (20 to 30 MPa) at 40, 45, 50, and 55°C. The second pattern showed sudden reduction of yield above 25 MPa at another two higher temperatures. The highest extraction yield (13.94 mg/g) was obtained at 30 MPa and 50°C which considered as optimum operating condition. GC-MS analysis showed the presence of several phytochemicals including some flavonoid compounds, which are potential sources of dye.

Supercritical Carbon Dioxide Cleaning of Low-k Material

2003 ◽  
Vol 92 ◽  
pp. 297-300 ◽  
Author(s):  
Gary Asai ◽  
Y. Muraoka ◽  
K. Saito ◽  
I. Mizobata ◽  
T. Iwata ◽  
...  
Keyword(s):  
Carbon Dioxide ◽  
Supercritical Carbon Dioxide ◽  
Low K ◽  
Supercritical Carbon

Recent Progress of Supercritical Carbon Dioxide in Producing Natural Nanomaterials

2019 ◽  
Vol 19 (6) ◽  
pp. 465-476 ◽  
Author(s):  
Maobin Xie ◽  
Man Xu ◽  
Xiaoming Chen ◽  
Yi Li
Keyword(s):  
Carbon Dioxide ◽  
Supercritical Carbon Dioxide ◽  
Water Solubility ◽  
Positive Impact ◽  
Low Cost ◽  
Public Awareness ◽  
Hydrodynamic Cavitation ◽  
Beneficial Effects ◽  
Treatment And Prevention ◽  
Supercritical Carbon

Natural medicines are widely utilized in human healthcare. Their beneficial effects have been attributed to the existence of natural active ingredients (NAI) with a positive impact on disease treatment and prevention. Public awareness about the side effects of synthetic chemical compounds increased the need for NAI as well. Clinical applications of NAI are limited by their instability and poor water solubility, while micronization is a major strategy to overcome these drawbacks. Supercritical carbon dioxide (sc-CO2) based nano techniques have drawn great attention in nanomedicinal area for many years, due to their unique characters such as fast mass transfer, near zero surface tension, effective solvents elimination, non-toxic, non-flammable, low cost and environmentally benign. In terms of functions of sc-CO2, many modified sc-CO2 based techniques are developed to produce NAI nanoparticles with high solubility, biological availability and stability. 5 types of promising methods, including gas-assisted melting atomization, CO2-assisted nebulization with a bubble dryer, supercritical fluidassisted atomization with a hydrodynamic cavitation mixer, supercritical CO2-based coating method and solution-enhanced dispersion by sc-CO2 process, are summarized in this article followed by a highlight of their fundamental synthesis principles and important medicinal applications.

Research on a Transonic Supercritical Carbon Dioxide Centrifugal Turbine

2019 ◽  
Vol 5 (4) ◽  
Author(s):  
Zehai Yang ◽  
Dan Luo ◽  
Diangui Huang
Keyword(s):  
Carbon Dioxide ◽  
Numerical Simulation ◽  
Performance Analysis ◽  
Supercritical Carbon Dioxide ◽  
Energy Conversion ◽  
High Efficiency ◽  
Low Cost ◽  
Thermodynamic Cycle ◽  
Stable Operation ◽  
Supercritical Carbon

Recently, the supercritical carbon dioxide Brayton (SCO2) cycle gained a lot of attention for its application to next-generation nuclear reactors. Turbine is the key component of the energy conversion in the thermodynamic cycle. Transonic centrifugal turbine has advantages of compatibility of aerodynamic and geometric, low cost, high power density, and high efficiency; therefore, it has opportunity to become the main energy conversion equipment in the future. In this paper, a transonic nozzle and its corresponding rotor cascade of the single-stage centrifugal turbine were designed. In addition, the three-dimensional (3D) numerical simulation and performance analysis were conducted. The numerical simulation results show that the predicted flow field is as expected and the aerodynamic parameters are in good agreement with one-dimensional (1D) design. Meanwhile, the off-design performance analysis shows that the transonic centrifugal turbine stage has wide stable operation range and strong load adaptability. Therefore, it can be concluded that the proposed turbine blade has good performance characteristics.

Sign in / Sign up

Export Citation Format

Share Document