Supercritical carbon dioxide extraction to produce low-k plasma enhanced chemical vapor deposited dielectric films

2002 ◽  
Vol 81 (23) ◽  
pp. 4407-4409 ◽  
Author(s):  
J. A. Lubguban ◽  
J. Sun ◽  
T. Rajagopalan ◽  
B. Lahlouh ◽  
S. L. Simon ◽  
...  
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