Development Trends in The Direction of Rapid Isothermal Processing (Rip) Dominated Silicon Integrated Circuit Fabrication

1986 ◽  
Vol 71 ◽  
Author(s):  
R. Singh ◽  
J. Nulman
Keyword(s):  
Integrated Circuit ◽  
Fabrication Technology ◽  
Development Trends ◽  
Integrated Circuit Fabrication ◽  
Circuit Fabrication ◽  
Rapid Isothermal Processing

AbstractThis paper summarizes the development in the direction of rapid isothermal processing (RIP) dominated silicon integrated circuit fabrication technology.

4719125 Cyclosilazane polymers as dielectric films in integrated circuit fabrication technology

1988 ◽  
Vol 28 (4) ◽  
pp. 667
Author(s):  
Louis Anello ◽  
Satish Gupta ◽  
StephenW Kirtley ◽  
GeorgeS Wooster ◽  
RalphL DePrenda
Keyword(s):  
Integrated Circuit ◽  
Dielectric Films ◽  
Fabrication Technology ◽  
Integrated Circuit Fabrication ◽  
Circuit Fabrication
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