Defect Structures Generated by Buried Amorphous Layer Regrowth in Arsenic Implanted Silicon

Plan-view and 90° cross-sectional TEM examination was used to investigate the correlation between the type of amorphous layer produced and the resulting defect structure observed upon annealing. Both <100> and <111> Si wafers were ion implanted with high energy (190 keV) arsenic over a range of doses(1 × 1015/cm2 to 5 × 1015/cm2). A Wayflow endstation was used allowing ion beam induced epitaxial crystallization (IBIEC)[8] or dynamic annealing of the sample to occur. Implanted <111> Si is shown to form a continuous amorphous layer up to the surface, while <100> implanted Si forms a buried amorphous layer. The regrowth of the buried x-layer by furnace annealing is shown to be responsible for the formation of shear type dislocation loops at the interface where the two x/c regrowth fronts meet (catagory IV defects).[7] However if the buried layer is regrown by dynamic annealing a different structure results.In addition to using <111> wafers, other parameter changes which resulted in the formation of surface amorphous layers included decreasing the implant energy from 190 keV to 100 keV, or implanting the wafer at 77K instead of using the Wayflow endstation. Regrowth of the surface amorphous layers produced by these changes did not result in the formation of shear type dislocation loops. Further annealing of the 100 keV Wayflow implant and the 190 keV 77K implant at 900°C for 30 minutes resulted in the formation of small prismatic extrinsic dislocation loops beneath the location of the original amorphous/crystalline interface (catagory II defects).[71]