High throughput characterization of magnetic semiconductor thin films with a scanning SQUID microscope

Magnetic properties of Co-doped rutile (Ti1-xCoxO2) film in combinatorial composition-spread form have been surveyed by means of a Scanning Superconducting-quantum-interference-device Microscope (SSM). As a consequence, we found magnetic domains in the spatial regions with x>0.05 without external field, giving strong evidence for ferromagnetism with finite spontaneous magnetization. The magnetic moment was monotonously increased with increasing doping level x from 0.05 to ∼ 0.13. On the other hand, it was almost unchanged for x > ∼ 0.13, suggesting that Co does not dissolve into rutile film beyond x ∼ 0.13. The SSM results on the rutile Ti0.95Co0.05O2 thin films with different thickness showed that the magnetic moment is proportional to film thickness, leading to a conclusion that the presently observed ferromagnetism does not result from Co or Co-based oxide particles on the film surface.