Dopant Incorporation and Doping Efficiency in a-Si:H and a-Ge:H

1986 ◽  
Vol 70 ◽  
Author(s):  
Martin Stutzmann
Keyword(s):  
Gas Phase ◽  
Hydrogenated Amorphous Silicon ◽  
Square Root ◽  
Dangling Bond ◽  
Band Tail ◽  
Gas Concentration ◽  
Dopant Incorporation ◽  
Solid Film ◽  
Silicon And Germanium ◽  
Hydrogenated Amorphous

ABSTRACTDoping of hydrogenated amorphous silicon and germanium with boron, phosphorus, and arsenic is investigated. The incorporation of the dopants from the gas phase into the solid film is found to differ strongly for the various dopant-host systems. The doping efficiency is calculated from measurements of the density of dangling bond defects and of shallow band-tail states as a function of the doping level. A common square root dependence of the efficiency on dopant gas concentration is obtained.

Inadequacy of the Conventional View of Hydrogenated Amorphous Silicon

1986 ◽  
Vol 70 ◽  
Author(s):  
D. Adler ◽  
M. Silver ◽  
M. P. Shaw ◽  
V. Cannella
Keyword(s):  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Intrinsic Defect ◽  
Dangling Bond ◽  
Defect States ◽  
Band Tail ◽  
Conventional View ◽  
Substitutional Doping ◽  
Hydrogenated Amorphous ◽  
Basic Experimental Data

ABSTRACTThe conventional view of the electronic structure of hydrogenated amorphous silicon is: (1) the material is characterized by a mobility gap of about 1.8 eV, with exponential band tails due to disorder and deep defect states arising from silicon dangling bonds (T3 centers); (2) substitutional doping occurs because of the formation of chargedimpurity/dangling-bond pairs, e.g. P4+ – T3-, at the substrate temperature; (3) the effective correlation of the T3 center is about 0.4 eV; (4) T3o centers are the predominant recombination center; (5) the three intrinsic ESR signals are due to electrons on T3o centers, electrons in the conduction band tail, and holes in the valence band tail. It is the purpose of this paper to demonstrate that this model is in sharp disagreement with an array of basic experimental data, and much of the evidence presented in its favor is based on self-inconsistent logic. We conclude that it is very likely that large concentrations of charged intrinsic defect pairs are present in all hydrogenated amorphous silicon films.

Capacitance Studies of Light-Induced Effects in Undoped Hydrogenated Amorphous Silicon

1985 ◽  
Vol 49 ◽  
Author(s):  
K. Zellama ◽  
J.D. Cohen ◽  
J.P. Harbison
Keyword(s):  
Electrical Conductivity ◽  
Amorphous Silicon ◽  
Density Of States ◽  
Hydrogenated Amorphous Silicon ◽  
Dangling Bond ◽  
Light Saturation ◽  
Band Tail ◽  
Bond Density ◽  
Induced Changes ◽  
Hydrogenated Amorphous

AbstractThe effects of light saturation on the properties of undoped a-Si:H films were studied by a new capacitance profiling technique which can be used to directly determine changes in the dangling bond density of states near midgap. Coplanar conductivity and capacitance vs. temperature measurements save the changes in activation energies for electrical conductivity. These studies indicate that, while substantial increases in the dangling bond densities are observed for most samples, the detailed behavior of the light induced changes in these films are inconsistent with the creation of such defects by breaking weak valence band tail states.

Doping Mechanism in Tetrahedral Amorphous Carbon

1997 ◽  
Vol 498 ◽  
Author(s):  
C W Chen ◽  
J Robertson
Keyword(s):  
Amorphous Silicon ◽  
Amorphous Carbon ◽  
Hydrogenated Amorphous Silicon ◽  
Donor Atom ◽  
Dangling Bond ◽  
Coulombic Repulsion ◽  
Tetrahedral Amorphous Carbon ◽  
Total Energies ◽  
Doping Mechanism ◽  
Hydrogenated Amorphous

ABSTRACTDoping in hydrogenated amorphous silicon occurs by a process of an ionised donor atom partially compensated by a charged dangling bond. The total energies of various dopant and dopant/bonding combinations are calculated for tetrahedral amorphous carbon. It is found that charged dangling bonds are less favoured because of the stronger Coulombic repulsion in ta-C. Instead the dopants can be compensated by weak bond states in the lower gap associated with odd-membered π-rings or odd-numbered π-chains. The effect is that the doping efficiency is low but there are not charged midgap recombination centres, to reduce photoconductivity or photoluminescence with doping, as occurs in a-Si:H.

Observation of slow dangling-bond relaxation inp-type hydrogenated amorphous silicon

1995 ◽  
Vol 51 (4) ◽  
pp. 2173-2179 ◽  
Author(s):  
Martin W. Carlen ◽  
Yueqin Xu ◽  
Richard S. Crandall
Keyword(s):  
Amorphous Silicon ◽  
Hydrogenated Amorphous Silicon ◽  
Dangling Bond ◽  
Hydrogenated Amorphous

Configurational Relaxation of the D Defect in Hydrogenated Amorphous Silicon as a Function of Fermi Energy

1992 ◽  
Vol 258 ◽  
Author(s):  
Thomas M. Leen ◽  
Randall J. Rasmussen ◽  
J. David Cohen
Keyword(s):  
Amorphous Silicon ◽  
Fermi Energy ◽  
Thermal Emission ◽  
Scaling Law ◽  
Hydrogenated Amorphous Silicon ◽  
Dangling Bond ◽  
Universal Scaling ◽  
Depletion Width ◽  
Hydrogenated Amorphous ◽  
Optical Evidence

ABSTRACTBy using light soaking and partial dark annealing to vary the Fermi level in n-type a-Si:H, we have examined the thermal emission of electrons from the dangling bond (D) defect. We find optical evidence for a change in the configuration of the D defect when EF = Ec-0.55±0.08eV. We find that the relaxation rate increases with temperature and increases as EF is brought closer to Ec. Voltage-pulse photocapacitance and depletion-width-modulated ESR show emission is predominantly from D° defects for short emission times and short filling pulse widths. With longer emission times and longer filling pulse widths, emission from D-dominates. We also find that the charge emission transient fits a universal scaling law under a variety of pulsing conditions, temperatures, and anneal states.

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