Reactive Ion Etching of Molybdenum In CF4/O2 Plasma

1986 ◽  
Vol 68 ◽  
Author(s):  
Seong-Ju Park ◽  
C. P. Sun ◽  
J. T. Yeh ◽  
J. K. Cataldo ◽  
N. Metropoulos
Keyword(s):  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Carbon Layer ◽  
Mechanistic Study ◽  
X Ray ◽  
Wide Range ◽  
Concentration Changes ◽  
Molybdenum Hexafluoride ◽  
Etch Rates ◽  
Etched Surface

AbstractA mechanistic study of Mo etching in a CF4/O2 plasma has been performed using optical emission spectroscopy, mass spectrometry and x-ray photoelectron spectroscopy.Etching characteristics of Mo for a wide range of conditions relevant to plasma processing are also reported.Addition of small amount of O2 to the CF4 plasma dramatically increases the Mo etch rates, as well as concentrations of 0 and F in plasma.However, further addition of O2 above 50 % leads to decrease in etch rates.Two types of neutral molybdenum oxifluorides and a trace amount of molybdenum hexafluoride were observed in the effluent gas.Comparing the etch rates with the concentration changes of F and 0 with and without Mo present in plasma, it is suggested that Mo is chemically etched by F and 0.Atomic oxygen enhances the etch rate by increasing the F concentration in the plasma as well as by removing a carbon layer forming desorbed CO on the surface.XPS and AES analysis results for the etched surface inferred that chemisorbed fluorocarbon radicals dissociate into carbon and fluorine atoms, which in turn form a passivating graphite-like layer and a volatile molybdenum oxifluoride and molybdenum hexafluoride layer.

scholarly journals Using SEM-EDX and ICP-OES to Investigate the Elemental Composition of Green MacroalgaVaucheria sessilis

2014 ◽  
Vol 2014 ◽  
pp. 1-8 ◽  
Author(s):  
Izabela Michalak ◽  
Krzysztof Marycz ◽  
Katarzyna Basińska ◽  
Katarzyna Chojnacka
Keyword(s):  
Elemental Composition ◽  
Cross Section ◽  
Inductively Coupled Plasma ◽  
Algal Biomass ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Icp Oes ◽  
X Ray ◽  
Inductively Coupled ◽  
Analytical System

The biomass ofVaucheria sessilisforms algal mats in many freshwaters. There is a need to find the method of algal biomass utilization.Vaucheria sessilisis a rich source of micro- and macronutrients and can be used as a soil amendment. In the paper, the elemental composition of enriched, via bioaccumulation process, macroalga was investigated. For this purpose, two independent techniques were used: scanning electron microscopy with an energy dispersive X-ray analytical system (SEMEDX) and inductively coupled plasma optical emission spectroscopy (ICP-OES). The biomass was exposed to two microelemental solutions, with Cu(II) and Zn(II) ions. After two weeks of the experiment, macroalga accumulated 98.5 mg of Zn(II) ions in 1 g of dry biomass and 68.9 mg g−1of Cu(II) ions. Micrographs performed by SEM proved that bioaccumulation occurred. Metal ions were bound on the surface and in the interior of cells. Mappings of all cations showed that in the case of the surface of biomass (biosorption), the elements constituted aggregations and in the case of the cross section (bioaccumulation) they were evenly distributed. The algal biomass with permanently bound microelements can find an application in many branches of the industry (feed, natural fertilizers, etc.).

scholarly journals Application of laser induced breakdown spectroscopy (LIBS) for environmental, chemical, and biological sensing

2021 ◽  
Author(s):  
Holly VerMeulen ◽  
Jay Clausen ◽  
Ashley Mossell ◽  
Michael Morgan ◽  
Komi Messan ◽  
...  
Keyword(s):  
Optical Emission Spectroscopy ◽  
Military Training ◽  
Inductively Couple Plasma ◽  
Optical Emission ◽  
Laser Induced Breakdown Spectroscopy ◽  
Environmental Chemical ◽  
X Ray ◽  
Breakdown Spectroscopy ◽  
Laser Induced Breakdown

The Army is interested in sensors capable of characterizing/monitoring the environment (battlefield or military training ranges) at proximal distances. Recently, we evaluated laser induced breakdown spectroscopy (LIBS) systems (hand-held, proximal, and bench top) for the characterization of metals (antimony, copper, lead, tungsten, and zinc) in soils obtained from military training ranges. We then compared the results to findings obtained with standard field and laboratory instrumentation for metals analysis -X-ray Fluorescence (XRF) and Inductively Couple Plasma- Optical Emission Spectroscopy (ICP-OES).

scholarly journals Simultaneous Electrodeposition of Silver and Tungsten from [EMIm]Cl:AlCl3 Ionic Liquids outside the Glove Box

Coatings ◽  
2020 ◽  
Vol 10 (6) ◽  
pp. 553
Author(s):  
Dominik Höhlich ◽  
Thomas Mehner ◽  
Ingolf Scharf ◽  
Thomas Lampke
Keyword(s):  
Inductively Coupled Plasma ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Phase System ◽  
X Ray Diffraction ◽  
Two Phase ◽  
X Ray ◽  
Inductively Coupled ◽  
Simultaneous Electrodeposition ◽  
Electrodeposition Of Silver

Ag–W two-phase system was prepared by electrodeposition using anhydrous 1-ethyl-3-methylimidazolium chloride [EMIm]Cl ionic-liquid (IL) solution with AlCl3 in different ratios. The deposition took place outside the glove box with a continuous Ar stream over the electrolyte at 120 °C and a pulsed-like current regime. Resultant layers show areas of Ag and W with an overall W content with a mass fraction of w W   = 50% (mole fraction x W   = 36.9%). The phase composition of Ag–W layers was observed by X-ray diffraction, and the chemical composition was characterized by scanning electron microscopy and inductively coupled plasma optical emission spectroscopy.

LOW PRESSURE CH2Cl2 PLASMA DISCHARGE

2015 ◽  
Vol 8 (3) ◽  
pp. 2240-2248
Author(s):  
Osvaldo Flores
Keyword(s):  
Electron Microscopy ◽  
Scanning Electron Microscopy ◽  
Langmuir Probe ◽  
Emission Spectroscopy ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Plasma Discharge ◽  
X Ray ◽  
Scanning Electron

Glow discharge of dichloromethane (DCM) was investigated employing Optical Emission Spectroscopy (OES), while the electron temperature and electron density were measured using a double Langmuir probe. Deposits formed were characterized by Scanning Electron Microscopy (SEM), X-ray Photo Fluorescence Spectroscopy (XPS) and Fourier Transform Infrared Spectroscopy (FTIR). The species identified by OES were the molecular bands of C2, C3, CH, H2, CH+, HCl+, Cl and C+. The material deposited displays a growing behavior. SEM observation shows several features which correspond to coalesce and growth mechanism. The characterization of the material deposited can explain the different stages of deposits that are formed on the electrode surface. Several factors are concerned in the complexity of the process, regarding the interaction of species formed during the plasma discharge. Involving several bonds types such as: C=C, C=C-CH2-Cl, C-C and CH.

Modification of Hardness Properties Characterizing Carbon Steel American Society for Testing and Materials in Carbon Steel A36 Using Bagasse Ash from the Waste of Sugarcane Industries

2021 ◽  
Vol 13 (5) ◽  
pp. 781-786
Author(s):  
Nakarin Srisuwan ◽  
Phuri Kalnaowakul ◽  
Aphichart Rodchanarowan ◽  
Trinet Yingsamphancharoen
Keyword(s):  
Carbon Steel ◽  
Optical Emission Spectroscopy ◽  
Barium Carbonate ◽  
Optical Emission ◽  
Microstructural Investigation ◽  
X Ray ◽  
Hardness Tests ◽  
A36 Steel ◽  
Carbon Sheet ◽  
American Society

In this work, the effect of bagasse ash from waste sugarcane industries on American society for testing and materials in carbon steel A36 (ASTM A36) was investigated. The ash caused the formation on the surface of the samples’ carbon sheet, thereby improving the hardness of the materials’ property. The samples were polished and cleaned in preparation for hardness tests (Rockwell) and microstructural investigation. Furthermore, the bagasse was sintered in a furnace at 400 °C for 3 h to bagasse ash. Additionally, the ash was sifted to a sample size of 100 μm and mixed with 100:0, 90:10, and 80:20 ratios of barium carbonate (BaCO3). The samples were calcined in a pack carburizing box between bagasse ash and BaCO3 at 950 °C for 8 h. The carburized samples were used to classify by Thermogravimetric Analysis (TGA), Energy Dispersive X-ray Spectroscopy (EDS), Optical Emission Spectroscopy (OMS), and Optical Microscopy (OM), respectively. The results revealed that 88% of carbon by weight of bagasse ash contributes to significant improvement in the mechanical properties of the ASTM A36 steel.

Behavior of Hydrogen in Al, Mg and MgAl Plasma Saturated Films

2004 ◽  
Vol 97-98 ◽  
pp. 159-164
Author(s):  
Darius Milčius ◽  
L.L. Pranevičius ◽  
Jurgita Nomgaudytė ◽  
Irmantas Barnackas
Keyword(s):  
Optical Emission Spectroscopy ◽  
Stainless Steel Substrate ◽  
Ion Irradiation ◽  
Steel Substrate ◽  
Optical Emission ◽  
Film Material ◽  
Hydrogen Ions ◽  
X Ray Diffraction ◽  
X Ray ◽  
Irradiation Intensity

The behaviors of hydrogen in Al, Mg and MgAl thin films on stainless steel substrate were investigated in this work. The hydrogen ions extracted from plasma were used to load hydrogen into the film material. Glow discharge optical emission spectroscopy (GDOES) was applied to obtain the hydrogen depth profiles in Al films versus hydriding parameters. The MgH2, AlH3 and Mg(AlH4)2 hydrides were identified in plasma hydrided films using X-ray diffraction (XRD). It is shown that efficient supply transport of hydrogen from the surface into the bulk for Mg films takes place at temperature above 100 °C and ion irradiation intensity above 1 mAcm-2.

The Determination of All Detectable Elements in the Aquatic Plants of Linsley Pond and Cedar Lake (North Branford, Connecticut) by X-Ray Emission and Optical Emission Spectroscopy

1973 ◽  
Vol 27 (1) ◽  
pp. 5-9 ◽  
Author(s):  
Ursula M. Cowgill
Keyword(s):  
Chemical Composition ◽  
Aquatic Plants ◽  
Rare Earths ◽  
Emission Spectroscopy ◽  
Littoral Zone ◽  
Optical Emission Spectroscopy ◽  
Optical Emission ◽  
Water Lily ◽  
X Ray

A method, employing optical and x-ray emission, is described for the determination of all detectable elements in aquatic plants growing in the littoral zone of two lakes in Connecticut. The pondweed and the hornwort accumulate As. Comparative data are presented for the determination of this element by atomic absorption and x-ray emission. The chemical composition of some plants is shown as well as the distribution of the rare earths in various portions of the yellow water lily.

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