Unstable Etching Of Si(110)with Potassium Hydroxide
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ABSTRACTWe present the experimental data for the morphological evolution of Si(110) etched with Potassium Hydroxide. The observed results are interpreted using a continuum equation. The results reveal the presence of unstable etching, which leads to the formation of a columnar structure on the surface. The early stage of the formation of this columnar structure can be explained by a linear theory. This instability is caused by anisotropic surface tension.
2018 ◽
Vol 84
(10)
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pp. 23-28
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1996 ◽
Vol 118
(2)
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pp. 201-209
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1995 ◽
Vol 09
(03n04)
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pp. 237-242
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