Morphological evolution of tilted grain-boundary thermal grooving by surface diffusion in bicrystal thin solid films having strong anisotropic surface Gibbs free energies

2008 ◽  
Vol 104 (1) ◽  
pp. 013518 ◽  
Author(s):  
Tarik Omer Ogurtani ◽  
Oncu Akyildiz ◽  
Ersin Emre Oren
Keyword(s):  
Grain Boundary ◽  
Surface Diffusion ◽  
Morphological Evolution ◽  
Free Energies ◽  
Thin Solid Films ◽  
Solid Films ◽  
Anisotropic Surface

Mechanism of hole inlet closure in shape transformation of hole arrays on Si(001) substrates by hydrogen annealing

2011 ◽  
Vol 1299 ◽  
Author(s):  
Reiko Hiruta ◽  
Hitoshi Kuribayashi ◽  
Koichi Sudoh ◽  
Ryosuke Shimizu
Keyword(s):  
Surface Diffusion ◽  
Mirror Symmetry ◽  
Morphological Evolution ◽  
Shape Transformation ◽  
Force Microscopy ◽  
Anisotropic Surface ◽  
Atomic Force ◽  
Hole Arrays ◽  
Top View ◽  
Anisotropic Surface Energy

ABSTRACTWe investigated the process of the hole inlet closure in surface-diffusion-driven transformation of arrays of high-aspect-ratio holes on Si(001) substrates. The inlet gradually shrinks while keeping the circular shape because of lateral bulging of the inlet surface. We observed complicated top view morphologies reflecting the four-fold symmetry of the Si(001) surface on the inlet surface. Large {111} and {113} facets are formed in the four equivalent azimuths of the [110], while corrugated patterns arise in the four equivalent azimuths of the [100]. Atomic force microscopy observations reveal that the corrugated pattern is composed of three types of small facets, namely, {110} and two {113} in relation of the mirror symmetry. The corrugated pattern formation is due to the geometrical restriction that there is no stable facet between (001) and (010) in the [010] azimuth. The observed morphological evolution is interpreted as surface-diffusion-driven transformation under constraint of the anisotropic surface energy of Si.

Erratum to “Self-shadowing and surface diffusion effects in obliquely deposited thin films” [Thin solid Films 339 (1999) 88–94]

1999 ◽  
Vol 349 (1-2) ◽  
pp. 303
Author(s):  
D. Vick ◽  
L.J. Freiedrich ◽  
S.K. Dew ◽  
M.J. Brett ◽  
K. Robbie ◽  
...  
Keyword(s):  
Thin Films ◽  
Surface Diffusion ◽  
Thin Solid Films ◽  
Solid Films ◽  
Diffusion Effects

Thermal grain boundary grooving with anisotropic surface free energies

2004 ◽  
Vol 52 (1) ◽  
pp. 107-116 ◽  
Author(s):  
W Zhang ◽  
P Sachenko ◽  
I Gladwell
Keyword(s):  
Grain Boundary ◽  
Free Energies ◽  
Anisotropic Surface

Surface diffusion dewetting of thin solid films: Numerical method and application toSi∕SiO2

2006 ◽  
Vol 73 (11) ◽  
Author(s):  
E. Dornel ◽  
J-C. Barbé ◽  
F. de Crécy ◽  
G. Lacolle ◽  
J. Eymery
Keyword(s):  
Numerical Method ◽  
Surface Diffusion ◽  
Thin Solid Films ◽  
Solid Films
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