Polymeric Strip Waveguides and their Connection to Very Thin Ultrafast Metal-Semiconductor-Metal Detectors

1999 ◽  
Vol 597 ◽  
Author(s):  
Ch. Buchal ◽  
A. Roelofs ◽  
M. Siegert ◽  
M. Löken
Keyword(s):  
Optical Fibers ◽  
Optical Waveguides ◽  
Ion Beam ◽  
Beam Propagation Method ◽  
Computer Code ◽  
Schottky Contacts ◽  
Ion Beam Etching ◽  
Metal Semiconductor Metal ◽  
Metal Detectors ◽  
Msm Photodetectors

AbstractWe present data on the fabrication process of optical waveguides from four different polymers, which have been patterned either by standard lithographical masking and reactive ion beam etching (RIE) or by direct lithographical exposure of photosensitive material. Three of the resists were directly photosensitive, they could be exposed and developed. Thereafter they can be cured and remain stable. Waveguide losses of 3.5 dB/cm had to be accepted for the photosensitive materials, while the non-sensitive polymers formed very good guides (0.8 dB/cm), but were more difficult to process. We demonstrate the coupling of the strip waveguides to optical fibers on one side and to very thin metal-semiconductor-metal (MSM) photodetectors at the other side. A beam propagation method computer code has been used to evaluate the best coupling efficiencies between the guides and the detectors, which are ultrafast (3.5 ps FWHM) due to their very thin silicon slab design (Si thickness 400 nm, sandwiched between two Schottky contacts).

Metal-Semiconductor-Metal (MSM) Photodetectors Based on Single-walled Carbon Nanotube Film-GaAs Schottky Contacts

2007 ◽  
Vol 1057 ◽  
Author(s):  
Jason L. Johnson ◽  
Ashkan Behnam ◽  
Yongho Choi ◽  
Leila Noriega ◽  
Gunhan Ertosun ◽  
...  
Keyword(s):  
Carbon Nanotube ◽  
Dark Current ◽  
Thermionic Emission ◽  
Schottky Contacts ◽  
Single Walled Carbon Nanotube ◽  
Single Walled Carbon ◽  
Carbon Nanotube Film ◽  
Metal Semiconductor Metal ◽  
Control Devices ◽  
Msm Photodetectors

ABSTRACTWe experimentally study the dark and photocurrent in metal-semiconductor-metal (MSM) photodetectors based on single-walled carbon nanotube film Schottky contacts on GaAs. We find that above ∼260°K, thermionic emission of electrons with a barrier height of ∼0.54 eV is the dominant dark current transport mechanism. Furthermore, MSM devices with CNT film electrodes exhibit a higher photocurrent-to-dark current ratio while maintaining a comparable responsivity relative to control devices. This work demonstrates that nanotube films can be integrated as Schottky electrodes in conventional semiconductor optoelectronic devices.

Ion beam etching of BaO glass and SiO_2 thin films and their application to optical waveguides

1984 ◽  
Vol 23 (6) ◽  
pp. 777 ◽  
Author(s):  
Bei Zhang ◽  
Jean-Marc Delavaux ◽  
William S. C. Chang
Keyword(s):  
Thin Films ◽  
Optical Waveguides ◽  
Ion Beam ◽  
Ion Beam Etching

Fabrication of Sol-Gel Derived Ferroelectric Plzt (9/65/35) Optical Waveguides

1991 ◽  
Vol 243 ◽  
Author(s):  
P.F. Baude ◽  
C. Ye ◽  
T. Tamagawa ◽  
D.L. Polla
Keyword(s):  
Thin Films ◽  
Optical Waveguides ◽  
Ion Beam ◽  
Sol Gel ◽  
Optical Quality ◽  
Silicon Substrates ◽  
Deposition Technique ◽  
Ion Beam Etching ◽  
Wet Chemical ◽  
Film Cracking

AbstractCrack free transparent ferroelectric PLZT (9/65/35) thin films were deposited on silicon substrates using the sol-gel deposition technique. An intermediate layer of PLT was used to improve the PLZT's optical quality and to reduce the amount of film cracking. Wet chemical, plasma and reactive ion etching are investigated as means of realizing the necessary waveguide structures. Waveguiding is observed in 2-4mm long PLZT (9/65/35) fabricated by reactive ion beam etching.

C2F6reactive ion-beam etching of LiNbO3and Nb2O5and their application to optical waveguides

1984 ◽  
Vol 2 (4) ◽  
pp. 528-530 ◽  
Author(s):  
Bei Zhang ◽  
S. Forouhar ◽  
S. Huang ◽  
W. Chang
Keyword(s):  
Optical Waveguides ◽  
Ion Beam ◽  
Ion Beam Etching

Monolithic integration of metal-semiconductor-metal (MSM) photodetectors and optical waveguides: The use of polyimide waveguides for optical signal distribution

1996 ◽  
Vol 74 (S1) ◽  
pp. 43-46
Author(s):  
Lucie Robitaille ◽  
Claire L. Callender ◽  
Julian P. Noad
Keyword(s):  
Optical Properties ◽  
Optical Waveguides ◽  
Optical Signal ◽  
Monolithic Integration ◽  
Signal Distribution ◽  
Metal Semiconductor Metal ◽  
On Chip ◽  
Msm Photodetectors

Straight and curved polyimide waveguides have been fabricated for on-chip optical signal distribution. The optical properties of the structures at 633 and 830 nm are presented. The potential of polyimide waveguides for monolithic integration with GaAs MSM photodetectors is discussed.

Ultrastructural Features of Normal and Diseased Hair Revealed by Ion Beam Etching and Freeze Fracture

1975 ◽  
Vol 33 ◽  
pp. 358-359
Author(s):  
M. Spector ◽  
A. C. Brown
Keyword(s):  
Electron Microscopy ◽  
Scanning Electron Microscopy ◽  
Ectodermal Dysplasia ◽  
Ion Beam ◽  
Freeze Fracture ◽  
Ion Current ◽  
Ion Beam Etching ◽  
Pili Torti ◽  
Argon Ion ◽  
Scanning Electron

Ion beam etching and freeze fracture techniques were utilized in conjunction with scanning electron microscopy to study the ultrastructure of normal and diseased human hair. Topographical differences in the cuticular scale of normal and diseased hair were demonstrated in previous scanning electron microscope studies. In the present study, ion beam etching and freeze fracture techniques were utilized to reveal subsurface ultrastructural features of the cuticle and cortex.Samples of normal and diseased hair including monilethrix, pili torti, pili annulati, and hidrotic ectodermal dysplasia were cut from areas near the base of the hair. In preparation for ion beam etching, untreated hairs were mounted on conducting tape on a conducting silicon substrate. The hairs were ion beam etched by an 18 ky argon ion beam (5μA ion current) from an ETEC ion beam etching device. The ion beam was oriented perpendicular to the substrate. The specimen remained stationary in the beam for exposures of 6 to 8 minutes.

Chemical Precursors for GaAs Etching with low Energy ion Beams: Chlorine adsorption on GaAs(100)

1991 ◽  
Vol 223 ◽  
Author(s):  
Richard B. Jackman ◽  
Glenn C. Tyrrell ◽  
Duncan Marshall ◽  
Catherine L. French ◽  
John S. Foord
Keyword(s):  
Ion Beam ◽  
Ion Beams ◽  
Low Energy ◽  
Ion Beam Etching ◽  
Chlorine Adsorption

ABSTRACTThis paper addresses the issue of chlorine adsorption on GaAs(100) with respect to the mechanisms of thermal and ion-enhanced etching. The use of halogenated precursors eg. dichloroethane is also discussed in regard to chemically assisted ion beam etching (CAIBE).

TEM Sample Preparation by Single-Sided Low-Energy Ion Beam Etching

2011 ◽  
Author(s):  
Liew Kaeng Nan ◽  
Lee Meng Lung
Keyword(s):  
Sample Preparation ◽  
Semiconductor Device ◽  
Ion Beam ◽  
Critical Dimension ◽  
Low Energy ◽  
Ex Situ ◽  
Good Image Quality ◽  
Ion Beam Etching ◽  
Device Structures ◽  
Common Technique

Abstract Conventional FIB ex-situ lift-out is the most common technique for TEM sample preparation. However, the scaling of semiconductor device structures poses great challenge to the method since the critical dimension of device becomes smaller than normal TEM sample thickness. In this paper, a technique combining 30 keV FIB milling and 3 keV ion beam etching is introduced to prepare the TEM specimen. It can be used by existing FIBs that are not equipped with low-energy ion beam. By this method, the overlapping pattern can be eliminated while maintaining good image quality.

scholarly journals Challenges in the Fabrication of Biodegradable and Implantable Optical Fibers for Biomedical Applications

Materials ◽  
2021 ◽  
Vol 14 (8) ◽  
pp. 1972
Author(s):  
Agnieszka Gierej ◽  
Thomas Geernaert ◽  
Sandra Van Vlierberghe ◽  
Peter Dubruel ◽  
Hugo Thienpont ◽  
...  
Keyword(s):  
Systematic Review ◽  
Optical Fibers ◽  
Optical Waveguides ◽  
Biomedical Applications ◽  
State Of The Art ◽  
Chemical Properties ◽  
Biological Tissues ◽  
Biodegradable Materials ◽  
Essential Properties ◽  
Optically Transparent

The limited penetration depth of visible light in biological tissues has encouraged researchers to develop novel implantable light-guiding devices. Optical fibers and waveguides that are made from biocompatible and biodegradable materials offer a straightforward but effective approach to overcome this issue. In the last decade, various optically transparent biomaterials, as well as different fabrication techniques, have been investigated for this purpose, and in view of obtaining fully fledged optical fibers. This article reviews the state-of-the-art in the development of biocompatible and biodegradable optical fibers. Whilst several reviews that focus on the chemical properties of the biomaterials from which these optical waveguides can be made have been published, a systematic review about the actual optical fibers made from these materials and the different fabrication processes is not available yet. This prompted us to investigate the essential properties of these biomaterials, in view of fabricating optical fibers, and in particular to look into the issues related to fabrication techniques, and also to discuss the challenges in the use and operation of these optical fibers. We close our review with a summary and an outline of the applications that may benefit from these novel optical waveguides.

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