Monolithic integration of metal-semiconductor-metal (MSM) photodetectors and optical waveguides: The use of polyimide waveguides for optical signal distribution
Keyword(s):
On Chip
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Straight and curved polyimide waveguides have been fabricated for on-chip optical signal distribution. The optical properties of the structures at 633 and 830 nm are presented. The potential of polyimide waveguides for monolithic integration with GaAs MSM photodetectors is discussed.
2005 ◽
2011 ◽
Vol 83
(11)
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pp. 2107-2113
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Keyword(s):
Keyword(s):
2008 ◽
Vol 134
(2)
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pp. 532-538
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THE STUDY OF Pd SCHOTTKY CONTACT ON POROUS GaN FOR UV METAL–SEMICONDUCTOR–METAL (MSM) PHOTODETECTORS
2007 ◽
Vol 16
(04)
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pp. 497-503
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