Computing Thin Film Mechanical Properties With the Oliver and Pharr Method
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ABSTRACTA commonly used technique to compute mechanical properties from indentation tests is the Oliver and Pharr method. Using dimensional analysis and finite element modeling, this paper investigates errors when the Oliver and Pharr method is used to compute thin film properties.
2018 ◽
Vol 750
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pp. 451-464
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2018 ◽
Vol 773
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pp. 3-9
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2011 ◽
Vol 46
(6)
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pp. 639-648
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2013 ◽
Vol 19
(5)
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pp. 1-8
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