Energy Levels and Capture Cross-Sections of Thermal Donors in Silicon
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ABSTRACTThe electrical properties of thermal donors centers, generated after annealing CZ-silicon at 450° C are carefully evaluated. The energy levels are corrected for the Poole-Frenkel lowering are compared to the ionization energy of the dominant centers revealed by infrared absorption experiments. The capture cross sections are found to be ≈ 2 × 10-12 cm2 for TDI and ≈ 2 × 10-13 cm2 for TD2. Detailed examination of their temperature dependence reveals that they follow a common law σ α T-5.
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1984 ◽
Vol 123
(1)
◽
pp. 345-351
◽
2021 ◽
Vol 1818
(1)
◽
pp. 012110
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