TiB2as a Diffusion Barrier for Cu/ Metallization

1999 ◽  
Vol 563 ◽  
Author(s):  
J. L. Wang ◽  
J. S. Chen
Keyword(s):  
Sheet Resistance ◽  
Diffusion Barrier ◽  
Electrical Characterization ◽  
Sample Surface ◽  
Scanning Electron Micrographs ◽  
X Ray Diffraction ◽  
X Ray ◽  
Cu Metallization ◽  
Glancing Angle ◽  
Scanning Electron

AbstractTiB2, films deposited by co-sputtering from a boron and a TiB, target are evaluated as the diffusion barrier for Cu metallization. Material characteristics of the TiB, films and metallurgical interactions of the Cu/TiB2/<Si> system annealed at 400−700°C for 30 min, in a 80%Ar+20%H2 flow, were investigated by glancing angle X-ray diffraction, Auger electron spectroscopy (AES), and scanning electron microscopy (SEM). Sheet resistance was measured for electrical characterization.The composition and resistivity of the sputtered TiB1 films varied with the bias applied on the substrate. To obtain a low film resistivity, a negative bias of 200V was applied during sputtering. The resulting TiB2 film is nanocrystalline with a resistivity of 300 μΩcm. After copper deposition, the Cu/TiB2/<Si> samples have a constant sheet resistance after annealing up to 600°C for 30min. The overall sheet resistance of the sample increases by five orders of magnitude after annealing at 700°C, and scanning electron micrographs reveal that the sample surface is severely deteriorated after annealing at 700°C.

Effect of a Titanium Interlayer on the Performance of the Titanium Nitride Diffusion Barrier

1999 ◽  
Vol 563 ◽  
Author(s):  
K. Y Lu ◽  
J. S. Chen
Keyword(s):  
Sheet Resistance ◽  
Diffusion Barrier ◽  
Electrical Characterization ◽  
X Ray Diffraction ◽  
X Ray ◽  
Average Value ◽  
Cu Metallization ◽  
Glancing Angle ◽  
Tin Diffusion Barrier ◽  
Thermal Stability Of

AbstractWe have studied the effect of a Ti interlayer on the behavior of a TiN diffusion barrier for Al and Cu metallizations. Thermal stability of Al/Ti/TiN/<Si> and Al/TiN/<Si> samples annealed at 400–600°C for 30 min was investigated using Auger electron spectroscopy (AES), glancing angle X-ray diffraction and scanning electron microscopy (SEM). Sheet resistance was measured for electrical characterization.After annealing at 400°C and 500°C, the AI/TiN/<Si> samples exhibited the same sheet resistance as the as-deposited one, while the sheet resistances of the Al/Ti/TiN/<Si> samples increased upon annealing. After annealing at 600°C, pyramidal pits developed on the surface of the Al/TiN/<Si> sample, but not on the Al/Ti/TiN/<Si> sample. Sheet resistance measurements for the 600°C-annealed Al/TiN/<Si> sample resulted in a more scattered distribution and a higher average value than for the Al/Ti/TiN/<Si> sample. The results clearly indicate that the performance of the TiN barrier layer is significantly improved by including a thin Ti film between the TiN and the Al. The Ti interlayer also improves the TiN barrier performance for the Cu metallization system.

scholarly journals Photocatalytic Degradation of Nitro and Chlorophenols Using Doped and Undoped Titanium Dioxide Nanoparticles

2011 ◽  
Vol 2011 ◽  
pp. 1-8 ◽  
Author(s):  
Hassan Ilyas ◽  
Ishtiaq A. Qazi ◽  
Wasim Asgar ◽  
M. Ali Awan ◽  
Zahir-ud-din Khan
Keyword(s):  
Photocatalytic Degradation ◽  
Crystallite Size ◽  
Model Compound ◽  
Titanium Dioxide Nanoparticles ◽  
Xrd Analysis ◽  
Scanning Electron Micrographs ◽  
X Ray Diffraction ◽  
X Ray ◽  
Liquid Impregnation ◽  
Scanning Electron

Pure and Ag-TiO2nanoparticles were synthesized, with the metallic doping being done using the Liquid Impregnation (LI) method. The resulting nanoparticles were characterized by analytical methods such as scanning electron micrographs (SEMs), Energy Dispersive Spectroscopy (EDS), and X-ray diffraction (XRD). XRD analysis indicated that the crystallite size ofTiO2was 27 nm to 42 nm while the crystallite size of Ag-TiO2was 11.27 nm to 42.52 nm. The photocatalytic activity of pureTiO2and silver dopedTiO2was tested by photocatalytic degradation ofp-nitrophenol as a model compound. Ag-TiO2nanoparticles exhibited better results (98% degradation) as compared to pureTiO2nanoparticles (83% degradation) in 1 hour for the degradation ofp-nitrophenol. Ag-TiO2was further used for the photocatalytic degradation of 2,4-dichlorphenol (99% degradation), 2,5-dichlorophenol (98% degradation), and 2,4,6-trichlorophenol (96% degradation) in 1 hour. The degree of mineralization was tested by TOC experiment indicating that 2,4-DCP was completely mineralized, while 2,5-DCP was mineralized upto 95 percent and 2,4,6-TCP upto 86 percent within a period of 2 hours.

Preparation and Electrical Characterization of Poly(Aniline) NanoClay Composites

2015 ◽  
Vol 34 (4) ◽  
Author(s):  
Esma Ahlatcioǧlu ◽  
Bahire Filiz şenkal ◽  
Mustafa Okutan
Keyword(s):  
Electrical Characterization ◽  
Synthesis And Characterization ◽  
X Ray Diffraction ◽  
Inorganic Hybrid ◽  
X Ray ◽  
Ft Ir ◽  
Doped Polyaniline ◽  
Poly Aniline ◽  
Scanning Electron

AbstractIn this work, synthesis and characterization of composite materials based on NanoClay(NC) and boric acid doped PolyAniline (PANI) is studied. PANI was successfully incorporated into NC to form PANI-NC composites. The resulting organic-inorganic hybrid material, PANI-NC was characterized by various physicochemical techniques. Formation of PANI inside the clay tactoid has been confirmed by X-ray diffraction studies (XRD), scanning electron microscope (SEM) and FT-IR. Also, conductivity and physical properties of the PANI-NC composites were investigated.

Effect of Cu Content on the Tribological Performance of Cr-N Coatings at High Temperatures (840°C)

2009 ◽  
Author(s):  
Kyriaki Polychronopoulou ◽  
Claus Rebholz ◽  
Nicholaos G. Demas ◽  
Andreas A. Polycarpou ◽  
P. N. Gibson
Keyword(s):  
Vapor Deposition ◽  
Photoelectron Spectroscopy ◽  
Physical Vapor Deposition ◽  
Tribological Performance ◽  
X Ray Diffraction ◽  
X Ray ◽  
Cu Content ◽  
Glancing Angle ◽  
Scanning Electron ◽  
Ball On Disc

Cr-N and Cu-Cr-N coatings with Cu content between 3–65 at.%, Cu/Cr ratios in the 0.04–4.5 range and 21–27 at.% N, synthesized by twin e-beam Physical Vapor Deposition (EBPVD) at 450°C, were investigated. Using X-ray photoelectron spectroscopy (XPS), glancing angle X-ray diffraction (GAXRD) and scanning electron microscopy (SEM), in combination with nanoindentation mechanical property measurements and laboratory controlled ball-on-disc sliding experiments, it is shown that Cu-Cr-N coatings with low Cu content (3 at.%) possess sufficient wear resistance for high temperature demanding tribological applications.

Tin as a Diffusion Barrier Between CoSi2 or PtSi and Aluminum

1982 ◽  
Vol 18 ◽  
Author(s):  
R. J. Schutz
Keyword(s):  
Chemical Composition ◽  
Electrical Properties ◽  
Schottky Barrier ◽  
Diffusion Barrier ◽  
Schottky Barrier Height ◽  
X Ray Diffraction ◽  
X Ray ◽  
Effective Barrier ◽  
Glancing Angle ◽  
Typical Temperature

The effectiveness of a thin (360Å) layer of reactively sputtered TiN as a diffusion barrier between aluminum and two silicides (PtSi and CoSi2) was evaluated. The chemical composition, structural phases and electrical properties of silicide/Al and silicide/TiN/Al contacts to n-type silicon were studied by Rutherford backscattering spectroscopy, glancing angle X-ray diffraction and Schottky barrier height measurements respectively. The results show that TiN is an effective barrier in these two systems up to at least 450°C, the typical temperature at which aluminum contacts are sintered.

scholarly journals Bio-mediated synthesis of ZnO nanostructures from Thymus Schimperi leaves extract and its antibacterial and photocatalytic activities

2020 ◽  
Vol 9 (1) ◽  
pp. 808-813
Keyword(s):  
Zinc Oxide ◽  
Fourier Transform ◽  
Fourier Transform Infrared ◽  
Scanning Electron Micrographs ◽  
Zinc Oxide Nanostructures ◽  
X Ray Diffraction ◽  
X Ray ◽  
Oxide Nanostructures ◽  
Photocatalytic Activities ◽  
Scanning Electron

In this work, zinc oxide nanostructures were synthesized from thymus schimperi leaves extract and ZnSO4.7H2O precursor, and antibacterial and photocatalytic activities were studied. The as-synthesized nanostructures were characterized by UV-Vis spectrophotometer, powder X-ray diffraction, Fourier transform infrared spectrophotometer and scanning electron microscopy. Powder X-ray diffraction patterns revealed that the as-synthesized zinc oxide was hexagonal wurtzite structure with no peaks from other phases or impurity. The maximum UV-Vis spectrum peak at about 255 nm also supports the evidence for the formation of zinc oxide nanostructures. The presence of functional groups on the surface of the nanostructures from the Fourier transform infrared spectrum exhibited that the phytochemicals play a key role in the formation of the nanostructures. The appearance of peak at 595cm-1 in the spectrum further corroborates the presence of zinc oxide in the sample. Scanning electron micrographs depict that there was mesh like nanostructures on the surface, which are likely to be convenient for catalytic application. The synthesized nanostructures inhibited the growth of both gram-positive and gram-negative bacteria, showing its biocidal property. Moreover, Congo red, which is one of the carcinogenic textile dyes, has been photodegraded by 83.33% at a pH of 6.5 due to the as-synthesized zinc oxide nanostructures indicating its potential application for waste water treatment.

Experimental investigation of the effect of high-pH solutions on the Opalinus Shale and the Hammerschmiede Smectite

Clay Minerals ◽  
2000 ◽  
Vol 35 (3) ◽  
pp. 515-524 ◽  
Author(s):  
H. Taubald ◽  
A. Bauer ◽  
T. Schäfer ◽  
H. Geckeis ◽  
M. Satir ◽  
...  
Keyword(s):  
Nuclear Waste ◽  
Scanning Electron Micrographs ◽  
Storage Site ◽  
X Ray Diffraction ◽  
Nuclear Waste Storage ◽  
X Ray ◽  
Waste Storage ◽  
Precipitation Zone ◽  
Diffraction Peaks ◽  
Scanning Electron

AbstractThe alteration and transformation behaviour of the Tertiary Hammerschmiede Smectite and the Jurassic Opalinus Shale in an alkaline solution was studied in column experiments. The Hammerschmiede Smectite is proposed as potential backfill material and the Opalinus Shale as host rock for the Swiss low-level nuclear waste storage site. Over a period of 18 months, the evolution of permeability, pH and solution concentrations were measured. After the experiment, the columns were cut into pieces to study the mineralogical and the chemical evolution of the clays. X-ray diffraction (XRD) revealed no significant appearance or disappearance of diffraction peaks at the end of the experiments. The scanning electron micrographs of the clays revealed that both clays exhibited a precipitation zone, which extends from 0 to 2 cm below the infiltration surface. Both clays showed significant differences in the evolution of pH and hydraulic conductivity. The solution front crossed the Opalinus Shale column entirely after only 11 weeks and the initial values for K+ and Na+ were conserved in the solution. For both clays, the salt concentrations in the percolating fluids mirror the evolution of pH.

Study of Microstructure in 0.9PMNTa-0.1PT Ceramics

2000 ◽  
Author(s):  
Jin T. Wang ◽  
Feng Tang
Keyword(s):  
Grain Size ◽  
Lead Titanate ◽  
Lead Magnesium Niobate ◽  
Scanning Electron Micrographs ◽  
X Ray Diffraction ◽  
X Ray ◽  
Chemical Content ◽  
Lead Magnesium ◽  
Ta Doping ◽  
Scanning Electron

Abstract Ta-Doping effect on the microstructure of lead magnesium niobate-lead titanate crystalline solutions 0.9PbMg1/3(Nb(1−x)Tax)2/3O3-0.1PbTiO3(PMN-PT) have been firstly investigated in this paper. Scanning Electron Micrographs (SEM) were taken from fractured surfaces of the samples with different additives of x = 0.0, 0.1, 0.2, 0.3 and 1.0 by Hitachi F-2460N microscope operating at an accelerating voltage of 25kV. The chemical content analysis for the synthesized samples performed on JEOL Super Prob733 Energy Perspective Spectrum. The x-ray diffraction was carried out with a Siemens D5000 Dual Diffraction Meter. It is clearly evident that doping Ta in PMNTa-PT can affect the grain size and density of the compounds. Smaller grain size (3.1μm) is formed in the specimens with the additives of x = 0.1, 0.2 and 0.3 in comparison with those of the specimens without doping (6.6μm) or over doping (6.4μm). The porosity at grain intersections increase with increasing of additive tantalum for niobium site in 0.9PMNTa-0.1PT. Larger grain size (6.4μm), greater non-uniformity and more inter-granular voids are found in the compound, if tantalum completely substitutes niobium (x = 1). No non-reacted starting regents were observed in any of the compositions mentioned above.

Structural and Electrical Characterization of TiB2/TiSi2 Bilayer Barrier Structure

1996 ◽  
Vol 441 ◽  
Author(s):  
G. Sade ◽  
J. Pelleg ◽  
A. Grisaru
Keyword(s):  
Diffusion Barrier ◽  
Vacuum Annealing ◽  
Schottky Diodes ◽  
Electrical Characterization ◽  
X Ray Diffraction ◽  
Cross Sectional ◽  
X Ray ◽  
Current Voltage ◽  
Thermal Stability Of

AbstractThe TiB2/TiSi2 bilayer is considered as a diffusion barrier in metallization system with Cu. The TiSi2 sublayer serves as a contact and also as an additional diffusion barrier against boron, which outdiffuses from TiB2 at high temperature annealing. The attempts to form TiSi2 by vacuum annealing of TiB2/Ti film, which was obtained by co-sputtering from elemental targets are described. The composition and the structure of the films were analyzed by Auger electron spectroscopy (AES), X-ray diffraction (XRD) and high-resolution cross-sectional TEM (HRXTEM). The Cu/TiB2/(Ti-Si)/n-Si contacts were investigated using current-voltage (I–V) on Schottky diode structures, which were prepared on n-type Si (100). The thermal stability of the TiB2/(Ti-Si) barrier was studied by structural and electrical analysis.It was observed that the lowest sheet resistance of 5.1 Ω/‪ was obtained after 850 °C annealing for 30 min, however the resulting Ti-Si layer is practically still amorphous and contains only a very small fraction of C54 TiSis in the form of microcrystallites. This layer also contained Ti5Si3 as indicated by XRD. The barrier height of Cu/TiB2/(Ti-Si)/n-Si Schottky diodes is ˜0.6 V and it does not show significant changes in the range 400–700 °C. Electrical monitoring is a very effective tool to detect deterioration of the barrier. No penetration is observed by AES at 700 °C, while the I–V curve shows changes in properties.

scholarly journals Synthesis of cadmium hydroxide nanostructure via composite-hydroxide-mediated approach

2019 ◽  
Vol 9 ◽  
pp. 184798041985255 ◽  
Author(s):  
J Adnan ◽  
M Arfan ◽  
T Shahid ◽  
MZ Khan ◽  
R Masab ◽  
...  
Keyword(s):  
Fourier Transform ◽  
Infrared Spectroscopy ◽  
Fourier Transform Infrared Spectroscopy ◽  
Fourier Transform Infrared ◽  
Energy Dispersive ◽  
Growth Time ◽  
Scanning Electron Micrographs ◽  
X Ray Diffraction ◽  
X Ray ◽  
Scanning Electron

Polycrystalline cadmium hydroxide nanomaterials have successfully been synthesized by composite-hydroxide-mediated approach with growth time variation. The influence of growth time on structural, morphological, elemental, and optical properties was explored using X-ray diffraction, scanning electron microscopy, Fourier transform infrared spectroscopy, energy dispersive X-ray spectroscopy, and ultraviolet–visible spectroscopy. X-ray diffraction results revealed the hexagonal and monoclinic phases of cadmium hydroxide along with rhombohedral impurity phase of cadmium carbonate. Fourier transform infrared spectroscopy further endorsed the X-ray diffraction results and confirmed the Cd–O bonding vibrations. Time-dependent uniform distribution of spherical morphology was observed in the scanning electron micrographs of the product. The presence of cadmium and oxygen in the energy dispersive X-ray spectroscopy results fingerprinted the purity and formation of the desired nanomaterials. Crystallite size was decreased with the increase of growth time as estimated by the Debye–Scherrer method. Furthermore, the optical bandgap was measured by Tauc’s relation using ultraviolet–visible absorption spectra and found to be in the range of 3.2–3.5 eV.

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