In-Situ Electromigration Damage of Al Interconnect Lines and the Influence of Grain Orientation

1999 ◽  
Vol 563 ◽  
Author(s):  
A. Buerke ◽  
H. Wendrock ◽  
T. KÖtter ◽  
S. Menzel ◽  
K. Wetzig ◽  
...  

AbstractIn this work the authors want to report some experiments concerning unpassivated Al interconnect lines of 8 and 1.4 microns width which have been damaged by in-situ electromigration in the SEM (temperature 230°C, current density 2 and 4×106 A/cm2, respectively). The wider line represents a polygrained structure with few blocking grains spanning the whole width, whereas the narrow line shows bamboo structure. Before electromigration, the local orientation and thus the position of all grain boundaries was mapped by EBSD technique along the entire interconnect line. During and after in-situ current loading in the SEM, the damaged sites were correlated with the grain boundary map to locate where the diffusion paths are situated most likely. It was found that not the deviation from <111> fibre texture, but the misorientation class of the grain boundaries is essential for the localization of the fatal defects.

2013 ◽  
Vol 753 ◽  
pp. 173-176
Author(s):  
Ping Yang ◽  
Yuan Yuan Shao ◽  
Ning Zhang ◽  
Ling Cheng ◽  
Wei Min Mao

The crystallographic and topographic anisotropies of columnar grains can exert strong influence on the subsequently hot rolled, cold rolled and annealed microstructures, textures and properties. The single type tilting grain boundaries among columnar grains will behave differently depending on grain orientations, rolling direction and stress state due to hot rolling and thus affect in return the microstructure and texture to some extents. This work aims to reveal the effects of grain boundaries and their neighboring grain orientation gradients in three types of Fe-3Si in differently processed samples using EBSD technique.


2013 ◽  
Vol 682 ◽  
pp. 25-32
Author(s):  
A. Boumaiza ◽  
N. Rouag ◽  
T. Baudin ◽  
R. Penelle

The change in crystallographic orientation distribution during deformation by deep drawing in mild steel has been investigated in order to understand their role in initiation and propagation of crack. The results show that the change of grain orientation from the initial recrystallization texture component of {111}<112> to deformation orientation {111}<110> incites the initiation and propagation of transgranular cracking in the region of {111}<112> small grains. Moreover, the transgranular misorientation and local orientation are analyzed in detail to discuss the change from {111}<112> to {111}<110>. The SEM-EBSD technique was used to reveal that change of orientationm, XRD was performed for the characterization of the global evolution of texture for deformed samples.


2006 ◽  
Vol 519-521 ◽  
pp. 1341-1348 ◽  
Author(s):  
Sybrand van der Zwaag ◽  
E. Anselmino ◽  
A. Miroux ◽  
David J. Prior

To obtain further progress and a more detailed understanding of the mechanisms involved in recrystallisation, new and more accurate techniques such as in-situ observations are necessary. This innovative method has been used to monitor the recrystallisation process in a FEGSEM equipped with hot stage. Observations are done in backscatter mode with particular attention to orientation contrast. EBSD maps of the observed areas can be acquired before and after recrystallisation. Details of the movement of the interfaces between the recrystallised region and the parent structure are recorded and analysed. The results show that the grain boundaries observed do not move smoothly but with a jerky motion. The recrystallising front sweeps through small areas, corresponding to single sub-grains or small groups of them, very rapidly and then stops at other sub-grain boundaries for varying time before progressing to the following area.


Author(s):  
Xiao Wang ◽  
Yuetao Zhang ◽  
Huaying Li ◽  
Ming-yu Huang

Type 316 steels have been heavily utilized as the structural material in many construction equipment and infrastructures. This paper reports the characterization of degradation in 316 austenitic stainless steel during the plastic deformation. The in-situ EBSD results revealed that, with the increase of plastic strain, the band contrast (BC) value progressively decreased in both grain and grain boundaries, and the target surface becomes uneven after the plastic tensile, which indicates that the increase of surface roughness. Meanwhile, the KAM and ρGND values are low in the origin specimen but increased significantly after the in-situ tensile. The results indicated that the KAM and ρGND are closely related to the deformation degree of the materials, which can be used as the indicator for assessing the degradation of 316 steel. Besides, the re-orientation of grain occurred after the tensile deformation, which can be recognized from the lattice orientation and local orientation maps.


1996 ◽  
Vol 84 ◽  
pp. 17-22
Author(s):  
A. Ranaivoarisoa ◽  
J. M. Olive ◽  
D. Desjardins

An optical method named In Situ Surface Observation Technique (ISSOT) is presented in this paper. This method is used to detect crack nucleation from a flaw (here a pit) at mesoscopic scale during a triangular push-pull cycling test under the control of charge amplitude in aqueous solution ofMgCl2 at 117°C. It can be found that the crack initiation time determined by using this technique represents 2 % of that estimated from a mechanical criterion. Moreover, the follow of the crack tip evolution by the ISSOT allows to measure average local crack growth rates. It has been shown that the variations of the latter were related to the effects of barriers such as grain boundaries, twin boundaries and grain boundaries triple junction.


2005 ◽  
Vol 495-497 ◽  
pp. 1249-1254 ◽  
Author(s):  
Henryk Paul ◽  
Julian H. Driver ◽  
Arnaud Lens

The crystallography of recrystallization nucleation has been investigated in channel-die deformed pure aluminium bicrystals with {100}<011>/{110}<001> and {100}<001>/{110}<001> orientations. The new grain orientations and misorientations were followed by systematic local orientation measurements using SEM and semi-automatic measurements in a TEM. In particular, orientation mapping combined with in-situ sample heating was used to investigate the formation and growth of new grains and their crystallographic orientation changes at very early stages of recrystallization. Grain boundary migration and ‘consumption’ of the as-deformed areas was always favoured along directions parallel to the traces of the {111} slip planes that had been most active during deformation. The orientations of the first formed nuclei were misoriented with respect to the orientations identified within the neighbouring deformed areas by α(<111>, <112>, or <100>)relations.


2016 ◽  
Vol 23 (06) ◽  
pp. 1650050 ◽  
Author(s):  
BOUTASSOUNA DJAMAL ◽  
RENÉ LE GALL ◽  
IBEN KHALDOUN LEFKAIER

In this paper, we investigate the influence of temperature on the nickel grain boundary equilibrium segregation of sulfur and the resulting intergranular fracturing susceptibility. Auger electron spectroscopy has been used to study equilibrium segregation of sulfur to the grain boundaries of a metallic nickel, with a mass bulk content of 3.6[Formula: see text]ppm in sulfur. Samples were first annealed at adequate temperatures for sufficiently large equilibrium time, and then quenched in water at room temperature. The analysis carried out shows a significant increase of sulfur concentration in the grain boundary with decreasing temperature. However, the sulfur content in the grain boundary shows a drastic shrink at 700[Formula: see text]C. This can be interpreted by the formation of an aggregate sulfide compound in the area of the grain boundaries. At 650[Formula: see text]C, in situ brittle fracture becomes unworkable and only intragranular fractures are observed. Using the results obtained through the investigation of the grain boundaries by Auger spectroscopy, the standard segregation energy is estimated as [Formula: see text].


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