A Novel Range of Noble Metal Organometallic Fluorides for use in the Fabrication of Submicron Metal Features by E-Beam or UV Irradiation
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SummaryThe preparation a nd characterisationo f a novel organoplatinum fluoride is described. The physical vapour deposition (PVD) of the material was performed in the temperature range 160–170°C, and electron beam bombardment or uv irradiation, results in the degradation of the compound to give high quality metal features down to dimensions of ca 60 nm.
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2012 ◽
Vol 38
(4)
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pp. 3317-3326
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2000 ◽
Vol 125
(1-3)
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pp. 331-334
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2010 ◽
Vol 207
(7)
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pp. 1549-1553
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