Effect of Electron Beam Irradiation-Enhanced Diffusion on A W-Aluminum Oxide-Ti/Cu Multilayer

1998 ◽  
Vol 540 ◽  
Author(s):  
S. Ohta ◽  
H. Takahashi
Keyword(s):  
Aluminum Oxide ◽  
Electron Irradiation ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Oxide Phase ◽  
Rf Magnetron Sputtering ◽  
Cross Sectional ◽  
Thin Foils ◽  
Diffraction Patterns ◽  
Ti Films

AbstractTungsten, aluminum oxide and Ti films were deposited onto a Cu substrate by means of a rf magnetron sputtering method. TEM thin foils for cross-sectional irradiation were prepared using a focused ion beam (FIB). Electron irradiation was carried out in a Hitachi H- 1300 electron microscope at I MV. The specimen temperatures during irradiation were 300, 473, 623 and 703K. The phases of W, aluminum oxide and Ti films were identified from selected area diffraction patterns as bcc, amorphous and hcp phases, respectively. The phases of W and Ti did not change due to irradiation. However, the amorphous aluminum oxide phase transformed to crystalline γ-Aluminum oxide. Electron irradiation caused no change in the composition of the interface of W/aluminum oxide, but diffusion was enhanced on the interfaces of aluminum oxide/Ti and Ti/Cu.

TEM Investigations of Damage Caused by Indentation of Multilayer TiN/Ti/a-C-H Coatings

2012 ◽  
Vol 186 ◽  
pp. 188-191
Author(s):  
Łukasz Major
Keyword(s):  
Focused Ion Beam ◽  
Mechanical Test ◽  
Ion Beam ◽  
Growth Direction ◽  
Metallic Phase ◽  
Energetic Cost ◽  
Multilayer Coatings ◽  
Static Test ◽  
Thin Foils ◽  
Diffraction Patterns

The effect of damage on microstructure of multilayer coatings (TiN/Ti/a-C:H) have been analyzed. They were deposited through Pulsed Laser Deposition technique (PLD). The coatings microstructure was characterized using TECNAI F20 (200kV) FEG. The phase and chemical composition were described by EDS (Energy Dispersive X-Ray Spectroscopy) and electron diffraction patterns respectively. Coatings damage resistance was tested by pushing diamond ball with 1N of the applied load (static test). Thin foils were prepared directly from the wear track by focused ion beam method (FIB) using QUANTA 200 3D DualBeam. The multilayer coatings were characterized by strongly dislocated microstructure in TiN layers (like in single layered TiN), while a-C:H were amorphous. After mechanical test the multilayer TiN/Ti/a-C:H coating was strongly deformed. Ceramic TiN and a-C:H layers showed brittle cracking, while very thin metallic Ti layers (presented at each interface) deformed plastically. Deformation lines were propagating in 450 to crystalline growth direction. The wear of crystalline TiN layers caused cracks along {111} planes. The presence of metallic phase lead to the cracking resistance properties increase and the increase an energetic cost of propagating cracks.

Tem Investigation of Phases Formed During Aluminium Wetting of MgO at [100], [110] and [111] Orientations

2013 ◽  
Vol 58 (2) ◽  
pp. 497-500 ◽  
Author(s):  
J. Morgiel ◽  
N. Sobczak ◽  
M. Pomorska ◽  
R. Nowak ◽  
J. Wojewoda-Budka
Keyword(s):  
Electron Microscopy ◽  
Focused Ion Beam ◽  
Sessile Drop ◽  
Ion Beam ◽  
Reaction Products ◽  
Liquid Aluminium ◽  
Coarse Dendrite ◽  
Thin Foils ◽  
Transmission Electron ◽  
Diffraction Patterns

The interaction of liquid aluminium (5N) with single crystal MgO substrates of [100], [110] and [111] orientations (surface roughness <1 nm) were studied using sessile drop wettability test performed at 1000ºC for 1 hour in vacuum (5 x 10-6 mbar). The observations performed using scanning electron microscopy (SEM) showed that the interaction of liquid metal with MgO crystals in all cases resulted in the formation of reaction products region (RPR) of thickness varying from ∽40 up to ∽80 microns in depth. In each case the RPR consisted mainly of coarse dendrite-like crystallites of few microns thick surrounded by net of much thinner channels. Occasionally away from the RPR centre the areas built of much finner but also dendrite- or filament-like crystallites were noted. The thin foils for transmission electron microscopy (TEM) investigations were cut using focused ion beam system (FIB) both from drop/RPR as well as RPR/MgO interfacial regions. The electron diffractions proved that the dominating coarse dendrite-like crystallites are of the same α-Al2O3 type throughout the whole RPR for all substrates orientations. Similarly, the colonies of finer crystallites always showed diffraction patterns characteristic for MgAl2O4 spinel. Therefore, the performed investigation indicated, that both the reaction layer depth and the reaction path represented by the sequence and type of phases present in Al/MgO RPR remain roughly similar for all examined orientations, i.e. that the substrate orientation control neither reaction kinetics, nor affects final phase composition of RPR.

Automated Diagonal Slice and View Solution for 3D Device Structure Analysis

2018 ◽  
Author(s):  
Sang Hoon Lee ◽  
Jeff Blackwood ◽  
Stacey Stone ◽  
Michael Schmidt ◽  
Mark Williamson ◽  
...  
Keyword(s):  
Cross Section ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Image Data ◽  
Planar Surface ◽  
Device Structure ◽  
Cross Sectional ◽  
Device Structures ◽  
The Cross ◽  
Planar Analysis

Abstract The cross-sectional and planar analysis of current generation 3D device structures can be analyzed using a single Focused Ion Beam (FIB) mill. This is achieved using a diagonal milling technique that exposes a multilayer planar surface as well as the cross-section. this provides image data allowing for an efficient method to monitor the fabrication process and find device design errors. This process saves tremendous sample-to-data time, decreasing it from days to hours while still providing precise defect and structure data.

TEM Sample Preparation Tricks for Advanced DRAMs

2015 ◽  
Author(s):  
Ching Shan Sung ◽  
Hsiu Ting Lee ◽  
Jian Shing Luo
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Sample Preparation ◽  
Integrated Circuit ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Tem Analysis ◽  
Cross Sectional ◽  
Transmission Electron ◽  
Characterization Of Materials

Abstract Transmission electron microscopy (TEM) plays an important role in the structural analysis and characterization of materials for process evaluation and failure analysis in the integrated circuit (IC) industry as device shrinkage continues. It is well known that a high quality TEM sample is one of the keys which enables to facilitate successful TEM analysis. This paper demonstrates a few examples to show the tricks on positioning, protection deposition, sample dicing, and focused ion beam milling of the TEM sample preparation for advanced DRAMs. The micro-structures of the devices and samples architectures were observed by using cross sectional transmission electron microscopy, scanning electron microscopy, and optical microscopy. Following these tricks can help readers to prepare TEM samples with higher quality and efficiency.

Site-Specific Low Angle Plasma FIB Milling for Cross-Sectional Electrical Characterization

2019 ◽  
Author(s):  
Chuan Zhang ◽  
Jane Y. Li ◽  
John Aguada ◽  
Howard Marks
Keyword(s):  
Cross Section ◽  
Focused Ion Beam ◽  
Electrical Characteristic ◽  
Preparation Method ◽  
Ion Beam ◽  
Grazing Angle ◽  
Electrical Characterization ◽  
Sample Preparation Method ◽  
Cross Sectional ◽  
Site Specific

Abstract This paper introduces a novel sample preparation method using plasma focused ion-beam (pFIB) milling at low grazing angle. Efficient and high precision preparation of site-specific cross-sectional samples with minimal alternation of device parameters can be achieved with this method. It offers the capability of acquiring a range of electrical characteristic signals from specific sites on the cross-section of devices, including imaging of junctions, Fins in the FinFETs and electrical probing of interconnect metal traces.

Comparison of Focused Ion Beam and Conventional Techniques on Tem Specimen Preparation of Metal-Ceramic Interfaces

1998 ◽  
Vol 4 (S2) ◽  
pp. 860-861 ◽  
Author(s):  
A. Ramirez de Arellano López ◽  
W.-A. Chiou ◽  
K. T. Faber
Keyword(s):  
Focused Ion Beam ◽  
Ceramic Coating ◽  
Steel Substrate ◽  
Ion Beam ◽  
Specimen Preparation ◽  
Inhomogeneous Materials ◽  
Cross Sectional ◽  
Fine Grain ◽  
Basic Industry ◽  
Coated Surface

The results of TEM analyses of materials are critically dependent on the quality of the sample prepared. Although numerous techniques have been developed in the last two decades, differential thinning of inhomogeneous materials remains a serious problem. Recently, focused ion beam (FIB) technique has been introduced for cross-sectional sample preparation for TEM and SEM.A novel system for depositing a fine-grain (∼ 200 nm) ceramic coating on a metal surface via a patent pending Small-Particle Plasma Spray (SPPS) technique has been developed at the Basic Industry Research Laboratory of Northwestern University. To understand the properties of the coated surface, the ceramic/metal interface and the microstructure of the ceramic coating must be investigated. This paper presents a comparison of the microstructure of an A12O3 coating on a mild steel substrate prepared using conventional and FEB techniques.

Cross-sectional microanalysis for tracking the effect of solvent on the morphological evaluation of PLA/AgNWs bionanocomposties

2021 ◽  
pp. 096739112110230
Author(s):  
Meltem Sezen ◽  
Busra Tugba Camic
Keyword(s):  
Focused Ion Beam ◽  
Silver Nanowires ◽  
Low Cost ◽  
Ion Beam ◽  
Lower Surface ◽  
Polymer Matrices ◽  
Elemental Distribution ◽  
Medical Sciences ◽  
Surface Area Ratio ◽  
Cross Sectional

The emphasis of biocompatible polymer applications in medical sciences and biotechnology has remarkably increased. Developing new low-cost, low-toxicity and lightweight composite forms of biopolymers has become even more attractive since the addition of new species into polymer matrices assist to improve biomedical activities of such materials to a higher extend. Developments in nanoscience and nanotechnology recently contribute to controlled fabrication and ultraprecise diagnosis of such materials. This study concerns the observation of solution processing effects in the fabrication of porous PLA/AGNWs bionanocomposite coatings using electron and ion processing based serial cross-sectioning and high-resolution imaging. The nanostructuring and characterization were both performed in a focused ion-beam-scanning electron microscope (FIB-SEM) platform. HR-SEM imaging was conducted on-site to track solvent based morphological property alterations of PLA and PLA/AgNWs structures. Simultaneous SEM-EDS analyses revealed the elemental distribution and the chemical composition along the cross-sectioned regions of the samples. Accordingly, it was observed that, in case of acetone dissolved materials, both pristine PLA and PLA/AgNWs samples sustained their foamy structure. When chloroform was used as the solvent, the porosity of the polymer matrices was less and the resulting structure was found to be denser than samples dissolved in acetone with a lower surface area ratio inside the material. This can be attributed to the rapid volatilization of acetone compared to chloroform, and hence the formation of interconnected pore network. For both nanocomposite biopolymers dissolved in acetone and chloroform, silver nanowires were homogeneously distributed throughout PLA matrices.

Imaging and reconstruction of the cytoarchitecture of axonal fibres: enabling biomedical engineering studies involving brain microstructure

2021 ◽  
Author(s):  
Andrea Bernardini ◽  
Marco Trovatelli ◽  
Michal Klosowski ◽  
Matteo Pederzani ◽  
Davide Zani ◽  
...  
Keyword(s):  
Focused Ion Beam ◽  
Ion Beam ◽  
Cell Organelles ◽  
Convection Enhanced Delivery ◽  
Cross Sectional ◽  
Drug Molecules ◽  
Fiber Tracts ◽  
Brain Microstructure ◽  
3D Volume ◽  
The Brain

Abstract There is an increased need and focus to understand how local brain microstructure affects the transport of drug molecules directly administered to the brain tissue, for example in convection-enhanced delivery procedures. This study reports the first systematic attempt to characterize the cytoarchitecture of commissural, long association and projection fibers, namely: the corpus callosum, the fornix and the corona radiata. Ovine samples from three different subjects were stained with osmium tetroxide (to enhance contrast from cell organelles and the fibers), embedded in resin and then imaged using scanning electron microscope combined with focused ion beam milling to generate 3D volume reconstructions of the tissue at subcellular spatial resolution. Particular focus has been given to the characteristic cytological feature of the white matter: the axons and their alignment in the tissue. Via 2D images a homogeneous myelination has been estimated via detection of ~40% content of lipids in all the different fiber tracts. Additionally, for each tract, a 3D reconstruction of relatively large volumes (15μm x 15μm x 15μm – including a significant number of axons) has been performed. Namely, outer axonal ellipticity, outer axonal cross-sectional area and their relative perimeter have been measured. The study of well-resolved microstructural features provides useful insight into the fibrous organization of the tissue, whose micromechanical behaviour is that of a composite material presenting elliptical tortuous tubular fibers embedded in the extra-cellular matrix. Drug flow can be captured through microstructurally-based models, leading to a workflow to enable physically-accurate simulations of drug delivery to the targeted tissue.

Method for Cross-sectional Thin Specimen Preparation from a Specific Site Using a Combination of a Focused Ion Beam System and Intermediate Voltage Electron Microscope and Its Application to the Characterization of a Precipitate in a Steel

2001 ◽  
Vol 7 (3) ◽  
pp. 287-291
Author(s):  
Toshie Yaguchi ◽  
Hiroaki Matsumoto ◽  
Takeo Kamino ◽  
Tohru Ishitani ◽  
Ryoichi Urao
Keyword(s):  
Electron Microscope ◽  
Focused Ion Beam ◽  
Ion Beam ◽  
Specific Site ◽  
Specimen Preparation ◽  
Thin Specimen ◽  
Cross Sectional ◽  
Electron Detector ◽  
Specimen Holder

AbstractIn this study, we discuss a method for cross-sectional thin specimen preparation from a specific site using a combination of a focused ion beam (FIB) system and an intermediate voltage transmission electron microscope (TEM). A FIB-TEM compatible specimen holder was newly developed for the method. The thinning of the specimen using the FIB system and the observation of inside structure of the ion milled area in a TEM to localize a specific site were alternately carried out. The TEM fitted with both scanning transmitted electron detector and secondary electron detector enabled us to localize the specific site in a halfway milled specimen with the positional accuracy of better than 0.1 µm. The method was applied to the characterization of a precipitate in a steel. A submicron large precipitate was thinned exactly at its center for the characterization by a high-resolution electron microscopy and an elemental mapping.

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