Electrical Characterization of Crystallized—Silicon Thin Films
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ABSTRACTA review is presented on the application of electrical measurements to evaluate the existence and effects of residual electronic defects in crystallized—silicon thin films. Experimental techniques include current—voltage characterization, electronbeam—induced conductivity, transient—capacitance measurements on thin—film capacitors, transient—conductance spectroscopy on thin—film transistors, and photoconductivity.
1979 ◽
1979 ◽
2015 ◽
Vol 3
(7)
◽
pp. 1468-1472
◽
1980 ◽
Keyword(s):
1979 ◽
Keyword(s):