Real-Time Monitoring of Indium Tin Oxide Laser Ablation in Liquid Crystal Display Patterning

1998 ◽  
Vol 526 ◽  
Author(s):  
M.H. Hong ◽  
Y.F. Lu ◽  
M. Meng ◽  
T.S. Low

AbstractAudible acoustic wave detection is applied to investigate KrF excimer laser ablation of Indium Tin Oxide (ITO) thin film layer for Liquid Crystal Display (LCD) patterning. It is found that there is no acoustic wave generation if laser fluence is lower than ITO ablation threshold. For laser fluence higher than the threshold, audible acoustic wave will be detected due to shock wave generation during ITO laser ablation. The amplitude of the acoustic wave is closely related to the laser ablation rate. With more laser pulse applied, the amplitude is dropped to zero because the ITO layer is completely removed. However, if laser fluence is increased higher than ablation threshold for glass substrate, the amplitude is also dropped with pulse number but not to zero. It is due to laser ablation of ITO layer and glass substrate at the same time. Since the thickness of ITO layer is in a scale of 100 nm, laser interaction with glass substrate will happen even at the first pulse of high laser fluence irradiation. Laser ablation induced ITO plasma emission spectrum in visible light region is analyzed by an Optical Multi-channel Analyzer (OMA). Specific spectral lines are In I (325.8, 410.2 and 451.1 nm) and In II 591.1 nm. Spectral intensities of 410.2 and 451.1 nm lines are selected to characterize the evolution of ITO plasma intensity with laser fluence and pulse number. It is found that the spectral intensities are reduced to zero with laser pulse number. It is also found that spectral lines other than ITO plasma will appear for laser fluence higher than ablation threshold for glass substrate. Threshold fluences for glass and ITO ablation are estimated for setting up a parameter window to control LCD patterning in real-time.

2014 ◽  
Vol 722 ◽  
pp. 56-59
Author(s):  
De Zhi Hu

This paper analyzes the micro-mechanism of interaction between femtosecond laser and one dimension material. It gets the figure of temperature change with time by calculating the Two Temperature Equation(TTE) in the process of the laser ablation. And it presents the surface characters of metal material. Additionally, the plasma is generated when the temperature of ion subsystem is far higher than the melting point of copper metal. The paper can give the laser ablation threshold by the numerical calculation. It will help the researchers ensuring the laser fluence for preparing the copper film better.


Author(s):  
Hansong Zeng ◽  
Yi Zhao ◽  
Benxin Wu ◽  
Chris Taylor ◽  
Ronald L. Jacobsen ◽  
...  

Picosecond laser ablation of Polydimethylsiloxane (PDMS) has been studied experimentally. The measurements show that laser ablation rate per pulse increases with laser fluence and pulse number. The laser-drilled hole diameter increases with pulse number, and it saturates above certain pulse number for low fluence. The study shows that picosecond laser ablation may provide a good solution for micromachining PDMS, which is more flexible and versatile than the replica molding technique.


2021 ◽  
Vol 127 (9) ◽  
Author(s):  
A. Feuer ◽  
R. Weber ◽  
R. Feuer ◽  
D. Brinkmeier ◽  
T. Graf

AbstractThe influence of the laser fluence on the quality of percussion-drilled holes was investigated both experimentally and by an analytical model. The study reveals that the edge quality of the drilled microholes depends on the laser fluence reaching the rear exit of the hole and changes with the number of pulses applied after breakthrough. The minimum fluence that must reach the hole’s exit in order to obtain high-quality microholes in stainless steel was experimentally found to be 2.8 times the ablation threshold.


Author(s):  
Katharina Kuhn ◽  
Carmen U. Schmid ◽  
Ralph G. Luthardt ◽  
Heike Rudolph ◽  
Rolf Diebolder

AbstractInadvertent Er:YAG laser irradiation occurs in dentistry and may harm restorative materials in teeth. The aim of this in vitro study was to quantify Er:YAG laser-induced damage to a nanohybrid composite in simulated clinical scenarios for inadvertent direct and indirect (reflection) laser irradiation. The simulation was performed by varying the output energy (OE;direct˃indirect) reaching the specimen and the operating distance (OD;direct˂indirect). Composite specimens were irradiated by an Er:YAG laser. The ablation threshold was determined and clinically relevant parameters were applied (n = 6 for each OE/OD combination) for direct (OE: 570 mJ/OD: 10 mm, OE: 190 mJ/OD: 10 mm) and indirect irradiation (OE: 466 mJ/OD: 15 mm, OE: 57 mJ/OD: 15 mm, OE: 155 mJ/OD: 15 mm, OE: 19 mJ/OD: 15 mm). The extent of damage in the form of craters was evaluated using a laser scanning microscope (LSM) and a conventional light microscope (LM). The ablation threshold was determined to be 2.6 J/cm2. The crater diameter showed the highest value (LM: 1075 ± 18 µm/LSM: 1082 ± 17 µm) for indirect irradiation (reflectant:dental mirror) (OE: 466 mJ/OD: 15 mm). The crater depth showed the highest and comparable value for direct (OE: 570 mJ/OD: 10 mm; LSM: 89 ± 2 µm) and indirect irradiation (OE: 466 mJ/OD: 15 mm; LSM: 90 ± 4 µm). For each OD, the crater diameter, depth, and volume increased with higher laser fluence. However, the OD—and thus the laser spot diameter—also had an enlarging effect. Thus, indirect irradiation (reflectant:dental mirror) with only 47% of the laser fluence of direct irradiation led to a larger diameter and a comparable depth. The three-dimensional extent of the crater was large enough to cause roughening, which may lead to plaque accumulation and encourage caries, gingivitis, and periodontitis under clinical conditions. Clinicians should be aware that reflected irradiation can still create such craters.


2021 ◽  
Vol 39 (1B) ◽  
pp. 197-202
Author(s):  
Ghufran S. Jaber ◽  
Khawla S. Khashan ◽  
Maha J. Abbas

The effects of varying laser pulse numbers on the fabricated of ZnONPs by pulsed laser ablation in deionized water of Zn-metal are investigated. The Nd: YAG laser at energy 600mJ prepared three samples by change the laser pulse number (100, 150, and 200). The results were collected and examined using an electron scanning microscope, XRD – diffraction, and transmission electron microscope. The result revealed the colloidal spherical shape and the homogeneous composition of the ZnO NPs. The nanoparticles resulted in different concentrations and sized distributions by changing the pulse number of a laser. The average particle size and the mass concentration of particle size increase with an increasing number of laser pulses by fixed the laser energy.


Processes ◽  
2018 ◽  
Vol 6 (8) ◽  
pp. 108 ◽  
Author(s):  
Gitae Moon ◽  
Wonjun Jang ◽  
Intae Son ◽  
Hyun Cho ◽  
Yong Park ◽  
...  

Indium tin oxide (ITO) transparent electrodes are troubled with high cost and poor mechanical stability. In this study, layer-by-layer (LBL)-processed thin films with single-walled carbon nanotubes (SWNTs) exhibited high transparency and electrical conductivity as a candidate for ITO replacement. The repetitive deposition of polycations and stabilized SWNTs with a negative surfactant exhibits sufficiently linear film growth and high optoelectronic performance to be used as transparent electrodes for vertically aligned (VA) liquid crystal display (LCD) cells. The LC molecules were uniformly aligned on the all of the prepared LBL electrodes. VA LCD cells with SWNT LBL electrodes exhibited voltage-transmittance (V-T) characteristics similar to those with the conventional ITO electrodes. Although the response speeds were slower than the LCD cell with the ITO electrode, as the SWNT layers increased, the display performance was closer to the LCD cells with conventional ITO electrode. This work demonstrated the good optoelectronic performance and alignment compatibility with LC molecules of the SWNT LBL assemblies, which are potential alternatives to ITO films as transparent electrodes for LCDs.


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