Vacancy-Type Defects in as-Grown and Proton-Irradiated 6H-SiC
Keyword(s):
P Type
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ABSTRACTAnnealing of defects in as-grown and proton irradiated bulk n- and p-type 6H-SiC has been investigated by positron lifetime spectroscopy and Doppler-broadening measurements. The grown-in defects do not anneal out until 1600 °C, whereas the radiation induced defects show three main annealing stages well below this temperature. During annealing, the formation of larger defect complexes can be observed.
Keyword(s):
2000 ◽
Vol 152
(3)
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pp. 171-180
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2009 ◽
Vol 615-617
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pp. 357-360
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