Monitoring and Control in Vapor phase Epitaxy

1997 ◽  
Vol 502 ◽  
Author(s):  
T. P. Pearsall
Keyword(s):  
Control System ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Growth Conditions ◽  
Temperature Control System ◽  
Monitoring And Control ◽  
Non Invasive ◽  
Innovative Solutions ◽  
Precision And Accuracy ◽  
And Control

ABSTRACTMonitoring and control in epitaxy based on chemical vapor deposition is a challenge created by growth conditions that often preclude more common sensors like thermocouples and mass spectrometry. We report results of experiments to measure and control temperature and flux by non-invasive optical sensing. We have developed a temperature control system with precision and accuracy better that 5°C. Satisfactory control of flux poses difficulties that will require innovative solutions before a useful control system can be developed.

Flux monitoring and control in epitaxy by chemical vapor deposition

1998 ◽  
Vol 188 (1-4) ◽  
pp. 63-68 ◽  
Author(s):  
T.P Pearsall ◽  
N Brown ◽  
N.L Ricker ◽  
M Johnson
Keyword(s):  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Monitoring And Control ◽  
Flux Monitoring ◽  
And Control

DEVELOPMENT OF COMPUTERIZED MONITORING AND CONTROL SYSTEM OF THE MOBILE ROBOT’S POSITIONING ON LARGE FERROMAGNETIC SURFACES BASED ON INTELLIGENT TECHNIQUES. AUTOMATION OF THE MONITORING AND CONTROL PROCESSES OF MOBILE ROBOT FOR PROCESSING OF LARGE INCLINED SURFACES

2019 ◽  
pp. 41-48
Author(s):  
Yan Guojun ◽  
Oleksiy Kozlov ◽  
Oleksandr Gerasin ◽  
Galyna Kondratenko
Keyword(s):  
Control System ◽  
Mobile Robot ◽  
Functional Structure ◽  
Monitoring And Control ◽  
Technological Parameters ◽  
Monitoring And Control System ◽  
Inclined Surfaces ◽  
Computerized Monitoring ◽  
And Control ◽  
Tracked Mobile Robot

The article renders the special features of the design of a tracked mobile robot (MR) for moving over inclined ferromagnetic surfaces while performing specified technological operations. There is conducted a synthesis of the functional structure and selective technological parameters (such as control coordinates) of the computerized monitoring and control system (CMCS) intended for use with this MR. Application of the CMCS with the proposed functional structure allows substantially increasing the accuracy of the MR monitoring and control, which in turn provides for a considerable enhancement in the quality and economic efficiency of the operations on processing of large ferromagnetic surfaces.

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