Control of Growth Dynamics by Molecular Design in the MOCVD of Electronic Ceramics
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ABSTRACTThe MOCVD technique is being used increasingly for the deposition of electronic ceramics such as Pb(Zr,Ti)O3, Ta2O5 and TiO2. For the mil potential of MOCVD to be realised, it is sometimes necessary to modify existing precursors so that process parameters in the MOCVD process are optimised. In this paper we describe our approach to “molecular design” and discuss how the substitution of simple alkoxide groups by β-diketonates or donor-functionalised ligands can result in precursors with improved physical properties and optimum MOCVD characteristics.
2013 ◽
Vol 1
(39)
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pp. 6278-6298
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2013 ◽
Vol 1034
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pp. 173-182
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2011 ◽
Vol 347-353
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pp. 3041-3045
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2018 ◽
Vol 55
(9)
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pp. 3462-3472
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