Energy Dependent Growth Rates of AIN using Pulsed Supersonic Jets
Keyword(s):
AbstractAIN films were grown on Si< 100 >, using unskimmed pulsed supersonic jets of ammonia and trimethylaluminum (TMA). By seeding the ammonia gas in hydrogen or helium, several different energies of the N precursor were used to examine the effect of N kinetic energy on the growth rate of AIN. The energy of the Al precursor, TMA, was 130 meV in all cases. The highest growth rate (0.115 μm/hr) was achieved with the high energy ammonia jet. The role of number density on film growth is discussed.
2014 ◽
Vol 254
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pp. 131-137
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Keyword(s):
1987 ◽
Vol 184
(1-2)
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pp. L375-L382
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Keyword(s):
2010 ◽
Vol 25
(5)
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pp. 991-998
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Keyword(s):
2010 ◽
Vol 6
(S275)
◽
pp. 59-67
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Keyword(s):
1987 ◽
Vol 184
(1-2)
◽
pp. L375-L382
◽
1993 ◽
Vol 51
◽
pp. 640-641
Keyword(s):