Microscopic Mechanisms for Reduced Static Dielectric Constants in Si-O-F Alloy Films
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AbstractThere is considerable interest in insulators with static dielectric constants lower than SiO2; an alloy system attracting recent attention is Si-O-F. Alloying of F atoms into plasma-deposited SiO2 films leads to major changes in the SiO2 bond-stretching and -bending infrared bands accounting for a significant fraction of the reduction in the dielectric constant. These changes are explained by F induced modifications of force constants and effective charges of the neighboring Si-O-Si groups.
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2011 ◽
Vol 470
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pp. 60-65
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1997 ◽
Vol 15
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pp. 836-843
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2013 ◽
Vol 12
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pp. 1350057
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1996 ◽
Vol 100
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pp. 1368-1371
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