Fluorine atom induced decreases to the contribution of infrared vibrations to the static dielectric constant of Si–O–F alloy films
1997 ◽
Vol 15
(3)
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pp. 836-843
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1988 ◽
Vol 147
(1)
◽
pp. 223-228
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1982 ◽
Vol 43
(7)
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pp. 507-510
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