Formation of Titanium Silicide on Ion-Implanted Silicon

1997 ◽  
Vol 470 ◽  
Author(s):  
Y.E Gilboa ◽  
M. Eizenberg
Keyword(s):  
Titanium Silicide ◽  
X Ray Diffraction ◽  
Transmission Electron ◽  
Diffusion Controlled ◽  
Different Temperatures ◽  
Heavily Doped ◽  
Process Measurements ◽  
Dopant Redistribution ◽  
Secondary Ion ◽  
Different Doses

AbstractThe formation of TiSi2 was compared over samples implanted with arsenic and BF2 at different doses and annealed at different temperatures and lengths of time in a rapid thermal process. Measurements were done to determine the composition and thickness of the suicide formed. The composition was determined from Auger electron spectroscopy, Rutherford backscattering spectroscopy, and transmission electron microscopy. The phase formation of the suicide was characterized by X-ray diffraction. Dopant redistribution was studied using secondary ion mass spectroscopy. Comparing the results of the different implant doses we found that the amount of suicide formed over heavily doped Si at formation temperatures of 600°C to 650°C was reduced compared to undoped Si. At formation temperatures above 750°C the implanted dose and species did not significantly affect the amount of suicide formation. Above 750°C the TiSi2 structure was found to be the C54 phase. Arsenic was found to diffuse into the Ti suicide layer in a diffusion controlled process. Boron was found to accumulate at the Ti suicide interfaces both with the substrate and with the surface TixOyNz layer.

A TEM investigation of a hyper-eutectic lead-tin alloy

1988 ◽  
Vol 46 ◽  
pp. 562-563
Author(s):  
John A. Sutliff
Keyword(s):  
Volume Diffusion ◽  
Eutectic Mixture ◽  
Precipitation Reaction ◽  
Directionally Solidified ◽  
X Ray Diffraction ◽  
X Ray ◽  
Transmission Electron ◽  
Diffusion Controlled ◽  
Discontinuous Precipitation Reaction ◽  
Controlled Precipitation

Near-eutectic Pb-Sn alloys are important solders used by the electronics industry. In these solders, the eutectic mixture, which solidifies last, is the important microstructural consituent. The orientation relation (OR) between the eutectic phases has previously been determined for directionally solidified (DS) eutectic alloys using x-ray diffraction or electron chanelling techniques. In the present investigation the microstructure of a conventionally cast, hyper-eutectic Pb-Sn alloy was examined by transmission electron microscopy (TEM) and the OR between the eutectic phases was determined by electron diffraction. Precipitates of Sn in Pb were also observed and the OR determined. The same OR was found in both the eutectic and precipitation reacted materials. While the precipitation of Sn in Pb was previously shown to occur by a discontinuous precipitation reaction,3 the present work confirms a recent finding that volume diffusion controlled precipitation can also occur.Samples that are representative of the solder's cast microstructure are difficult to prepare for TEM because the alloy is multiphase and the phases are soft.

scholarly journals Effect of Annealing on the ZnS Nanocrystals Prepared by Chemical Precipitation Method

2013 ◽  
Vol 2013 ◽  
pp. 1-7 ◽  
Author(s):  
Nadana Shanmugam ◽  
Shanmugam Cholan ◽  
Natesan Kannadasan ◽  
Kannadasan Sathishkumar ◽  
G. Viruthagiri
Keyword(s):  
Chemical Precipitation ◽  
Chemical Precipitation Method ◽  
Precipitation Method ◽  
X Ray Diffraction ◽  
Visible Absorption ◽  
Atomic Force ◽  
Transmission Electron ◽  
Different Temperatures ◽  
Uv Visible ◽  
Dta Curves

Nanocrystals of ZnS have been synthesized through simple chemical precipitation method using thiourea as sulphur source. The synthesized products were annealed at different temperatures in the range of 200–800∘C. The as-synthesized and annealed samples were characterized by X-ray diffraction (XRD), UV-Visible absorption (UV-Vis), and room temperature photoluminescence (PL) measurements. The morphological features of ZnS annealed at 200 and 500∘C were studied by atomic force microscope (AFM) and transmission electron microscope (TEM) techniques. The phase transformation of ZnS and formation of ZnO were confirmed by thermogravimetric (TG) and differential thermal analysis (DTA) curves.

Fe–Cr/Al2O3 metal-ceramic composites: Nature and size of the metal particles formed during hydrogen reduction

1994 ◽  
Vol 9 (1) ◽  
pp. 229-235 ◽  
Author(s):  
Ch. Laurent ◽  
J.J. Demai ◽  
A. Rousset ◽  
K.R. Kannan ◽  
C.N.R. Rao
Keyword(s):  
Hydrogen Reduction ◽  
Ceramic Composites ◽  
X Ray Diffraction ◽  
X Ray ◽  
Total Reduction ◽  
Transmission Electron ◽  
Combined Use ◽  
Metal Ceramic ◽  
Different Temperatures ◽  
Metallic Species

Fe-Cr/Al2O3 metal-ceramic composites prepared by hydrogen reduction at different temperatures and for different periods have been investigated by a combined use of Mössbauer spectroscopy, x-ray diffraction, transmission electron microscopy, and energy-dispersive x-ray spectroscopy in order to obtain information on the nature of the metallic species formed. Total reduction of Fe3+ does not occur by increasing the reduction time at 1320 K from 1 to 30 h, and the amount of superparamagnetic metallic species is essentially constant (about 10%). Temperatures higher than 1470 K are needed to achieve nearly total reduction of substitutional Fe3+. Interestingly, iron favors the reduction of chromium. The composition of the Fe-Cr particles is strongly dependent on their size, the Cr content being higher in particles smaller than 10 nm.

Preparation and Property of Al87Ce3Ni8.5Mn1.5 Nanophase Amorphous Composites

2011 ◽  
Vol 412 ◽  
pp. 263-266
Author(s):  
Hong Wei Zhang ◽  
Li Li Zhang ◽  
Feng Rui Zhai ◽  
Jia Jin Tian ◽  
Can Bang Zhang
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Single Phase ◽  
Volume Fraction ◽  
Material Structure ◽  
X Ray Diffraction ◽  
Scanning Calorimetry ◽  
X Ray ◽  
Transmission Electron ◽  
Different Temperatures

The higher mechanical strength of Al87Ce3Ni8.5Mn1.5 nanophase amorphous composites has been obtained with two methods. The first nanophase amorphous composites are directly produced by the single roller spin quenching technology. The method taken for the second nanophase amorphous composites is at first to obtain amorphous single-phase alloy, followed by annealed at different temperatures .The formative condition, the microstructure, the particle size, the volume fraction of α-Al phase and microhardness of nanophase amorphous composites etc have been investigated and compared by X-ray diffraction (XRD) and transmission electron microscopy (TEM) and differential scanning calorimetry (DSC). The microstructure of composites produced by the second method is higher than the former, the fabricated material structure of the system is more uniform and the process is easier to control.

The Features of a High-Temperature Synthesis of ZrO2 in a Core-Shell ZrO2@C Structure

2019 ◽  
Vol 950 ◽  
pp. 133-137
Author(s):  
Alexander M. Volodin ◽  
Vladimir O. Stoyanovskii ◽  
Vladimir I. Zaykovskii ◽  
Roman M. Kenzhin ◽  
Aleksey A. Vedyagin
Keyword(s):  
Elevated Temperatures ◽  
Cubic Phase ◽  
Core Shell ◽  
X Ray Diffraction ◽  
High Temperature Synthesis ◽  
Transmission Electron ◽  
Different Temperatures ◽  
Carbon Coated ◽  
Physicochemical Methods ◽  
Argon Adsorption

Zirconium oxide was obtained via traditional precipitation from a ZrOCl2 solution with ammonia followed by drying at 110 °C. The carbon-coated samples were synthesized by calcination of the pristine zirconia mixed with polyvinylalcohol. The obtained ZrO2@C samples of core-shell structure as well as the reference samples of pristine zirconia were calcined at different temperatures from 500 to 1400 °C. All the materials were examined by a set of physicochemical methods (a low-temperature argon adsorption, transmission electron microscopy, X-ray diffraction analysis, photoluminescence spectroscopy). It was found that the carbon coating prevents the sintering of the oxide nanoparticles, which allows one to maintain the specific surface area, the size of the oxide core and, finally, stabilize its phase composition. Transformation of the cubic phase into monoclinic phase becomes significantly complicated. Thus, 40% of the cubic phase was detected even after calcination of the ZrO2@C sample at 1400 °C. Moreover, the carbon-coated samples treated at elevated temperatures with subsequent removal of the carbon shell were found to possess the highest concentration of the defects related to a presence of the anion vacancies in zirconia.

Strain-Induced Diffusion in Heteroepitaxially Grown CuInSe2 on GaAs Substrates

1995 ◽  
Vol 399 ◽  
Author(s):  
P. Fons ◽  
S. Niki ◽  
A. Yamada ◽  
A. Okada ◽  
D.J. Tweet
Keyword(s):  
Thin Film ◽  
Secondary Ion Mass Spectrometry ◽  
Second Phase ◽  
X Ray Diffraction ◽  
X Ray ◽  
State Of Stress ◽  
Gaas Substrates ◽  
Transmission Electron ◽  
Secondary Ion ◽  
Lattice Matched

ABSTRACTA series of CuInSe2 thin films of varying thicknesses were grown on both GaAs(001) substrates and nominally lattice-matched In0.29Ga0.71As (001) linearly graded buffers by MBE at 450°C. Transmission electron microscopy and high resolution x-ray diffraction measurements revealed the presence of a second phase with chalcopyrite symmetry strained to the CuInSe2 thin film in-plane lattice constant for CuInSe2 films grown on GaAs substrates. Further examination confirmed that the second phase possessed chalcopyrite symmetry. No second phase was observed in films grown on nearly lattice-matched In0.29Ga0.71As (001) linearly graded buffers. Secondary ion mass spectrometry confirmed the presence of interdiffusion from of Ga from the substrate into the CuInSe2layer. It is speculated that this diffusion is related to the state of stress due to heteroepitaxial misfit.

Synthesis and Activity of Co-doped Barium Cerium Zirconate for Hydrogen Reforming and Purification

2008 ◽  
Vol 1126 ◽  
Author(s):  
Aravind Suresh ◽  
Joysurya Basu ◽  
Nigel M Sammes ◽  
Barry C Carter ◽  
Benjamin A Wilhite
Keyword(s):  
Hydrogen Generation ◽  
Ac Impedance ◽  
Cubic Phase ◽  
X Ray Diffraction ◽  
Ac Impedance Spectroscopy ◽  
Methanol Partial Oxidation ◽  
Transmission Electron ◽  
Catalytically Active ◽  
Different Temperatures ◽  
Co Precipitation

AbstractBaCe0.25Zr0.60Co0.15O3-x (BCZC) was synthesized via oxalate co-precipitation route. Material was characterized by X-ray diffraction (XRD) and transmission electron microscopy (TEM). Catalytic activity of BCZC with respect to hydrogen generation via methanol partial oxidation was determined. Conductivity of the material at different temperatures and under different environments was determined by AC impedance spectroscopy. XRD and TEM results indicated that BCZC was synthesized as a homogeneous cubic phase material. Catalyst tests indicated that BCZC was catalytically active towards hydrogen generation and AC impedance results were positive enough to warrant further electrochemical studies.

Effect of Calcination Temperature on the Morphological and Phase Structure of Hydrothermally Synthesized Copper Ion Doped TiO2 Nanotubes

2014 ◽  
Vol 1024 ◽  
pp. 7-10 ◽  
Author(s):  
Mohd Hasmizam Razali ◽  
M.N. Ahmad-Fauzi ◽  
Abdul Rahman Mohamed ◽  
Srimala Sreekantan
Keyword(s):  
Calcination Temperature ◽  
Morphological Evolution ◽  
Copper Ion ◽  
X Ray Diffraction ◽  
X Ray ◽  
Transmission Electron ◽  
Different Temperatures ◽  
Scanning Electronmicroscopy ◽  
Higher Temperature ◽  
Uniform Diameter

Morphological evolution and phase transformations of copper ion doped TiO2nanotubes after being calcined at different temperatures were studied by field emission scanning electronmicroscopy, transmission electron microscopy, and X-ray diffraction. After calcination at 300°C, the nanotubes with uniform diameter and length wereobtained. At 400°C, the nanotube structures were maintained. Nevertheless the inner tube diameter became narrower, and in same instances disappeared due to aggregation of nanotubes. The copper ion doped TiO2nanotubes then transformed to nanorodsat 500°C and the length of the nanorodsshortens after calcination at 600 °C. When the calcination temperature was further increased to 700°C, the nanorodsdisintegrate to form nanoparticles. On the other hand the phase structures of copper ion doped TiO2nanotubes calcined at 300 and 400 °C were TiO2hexagonal. After calcined at higher temperature (600 and 700°C) they transformed to anatase TiO2(tetragonal).

scholarly journals Effect of Reaction Temperature on Size and Optical Properties of NiTiO3Nanoparticles

2012 ◽  
Vol 9 (1) ◽  
pp. 282-288 ◽  
Author(s):  
R. Vijayalakshmi ◽  
V. Rajendran
Keyword(s):  
Electron Microscopy ◽  
Particle Size ◽  
Uv Spectroscopy ◽  
Particle Size Effect ◽  
Infrared Spectrometry ◽  
X Ray Diffraction ◽  
Transmission Electron ◽  
Nickel Titanate ◽  
Different Temperatures ◽  
Wet Chemical

Nickel titanate (NiTiO3) nanoparticles were successfully prepared by wet-chemical method, using nickel acetate and titanium(IV) isopropoxide as Ni, Ti sources and citric acid as complexing reagent. The gel was calcined at different temperatures from 500-700 °C. Results of thermogravimetric analysis (TGA) are given. Fourier transform infrared spectrometry (FTIR), X-ray diffraction (XRD), Scanning electron microscopy (SEM),transmission electron microscopy (TEM), ultraviolet (UV) spectroscopy, vibrating sample magnetometer (VSM) were used to characterize the crystallization process, particle size, morphology, optical and magnetic properties of the calcined nanoparticles. TEM result reveals that the NiTiO3was homogeneous and hexagon morphology with the grain size of 30-70 nm. The band gap values of the NiTiO3nanoparticles were calculated to be 3.43, 3.39 and 3.31 eV. The magnetic property was confirmed that the NiTiO3nanoparticles of super paramagnetic behavior in nature. Our results suggested that the temperature plays an important role in the particle size effect of nanocrystalline NiTiO3.

Titaniun Silicide Formation on Heavily Doped Arsenic-Implanted Silicon

1985 ◽  
Vol 48 ◽  
Author(s):  
S. L. Dowben ◽  
D. W. Marsh ◽  
G. A. Smith ◽  
N. Lewis ◽  
T. P. Chow ◽  
...  
Keyword(s):  
Refractory Metals ◽  
Titanium Silicide ◽  
Oxide Semiconductor ◽  
Processing Temperature ◽  
Silicide Formation ◽  
Subsequent Behavior ◽  
Heavily Doped ◽  
High Temperature Processing ◽  
Dopant Redistribution ◽  
New Generation

Every new generation of metal/oxide/semiconductor (MOS) technology has achieved higher densities and switching speeds. In order to match these characteristics of MOS circuits, a metallization which has a low resistivity, has electrical and chemical stability, can withstand high-temperature processing and can be manufactured relatively easily and reliably is needed. These requirements make the refractory metals a suitable if not ideal choice [1,2]. However, there has been some question as to the reliability of processing during silicide formation when using refractory metals. When the metallization is used to form self-aligned silicide structures over heavily doped source and drain regions, it is crucial to understand the subsequent behavior of the dopant during the processing period. Whereas others have studied different aspects of dopant redistribution [3–8], we report in this paper a systematic study of the electrical, structural, and elemental properties of titanium silicide formation on arsenic implanted silicon as a function of implanted dose and processing temperature.

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