Thermodynamic Considerations in Thin-Film Metallizations

1985 ◽  
Vol 47 ◽  
Author(s):  
Robert Beyers
Keyword(s):  
Integrated Circuits ◽  
Ternary Phase ◽  
Elevated Temperatures ◽  
Reaction Products ◽  
New Materials ◽  
Subsequent Reaction ◽  
Ternary Phase Diagrams ◽  
Circuit Fabrication ◽  
The Stability ◽  
Selection Of

ABSTRACTThe drive to produce smaller devices in integrated circuits is wellknown. Concurrent with this drive is the need to incorporate new materials, such as silicides, as interconnects, diffusion barriers, and contacts. During circuit fabrication, these materials are in contact with other solids and gases at elevated temperatures. Consequently, reactions may occur which degrade the materials present. Since the reactions of interest typically involve three elements distributed in several phases, ternary phase diagrams are required to predict the occurrence of a reaction and the subsequent reaction products, or, conversely, the stability of the phases present. Hence, ternary diagrams can provide important guidance in the selection of optimal materials and the design of reliable processing schedules.

Stability of As and B doped Si with respect to overlaying CoSi2 and TiSi2 thin films

1989 ◽  
Vol 4 (5) ◽  
pp. 1209-1217 ◽  
Author(s):  
K. Maex ◽  
G. Ghosh ◽  
L. Delaey ◽  
V. Probst ◽  
P. Lippens ◽  
...  
Keyword(s):  
Thin Film ◽  
Thin Films ◽  
Phase Diagrams ◽  
Thermodynamic Data ◽  
Ternary Phase ◽  
Experimental Results ◽  
Silicide Formation ◽  
Isothermal Sections ◽  
Ternary Phase Diagrams ◽  
The Stability

The thermodynamic equilibrium of structures consisting of a thin film silicide (TiSi2 or CoSi2) on doped Si (with As or B) is investigated. Isothermal sections of the ternary phase diagrams for Ti–Si–B, Co–Si–B, Ti–Si–As, and Co–Si–As have been evaluated, indicating the stability of high B concentrations in Si underneath a CoSi2 layer, the instability of high As concentrations in Si underneath a CoSi2 layer, and of B and As concentrations underneath a TiSi2 layer. The obtained thermodynamic predictions agree very well with experimental results (i) on the redistribution of dopants during silicide formation, (ii) on the diffusion of dopants from an ion implanted silicide, and (iii) on the stability of highly doped regions underneath the silicide, both for the case of TiSi2 and CoSi2. It is shown that even though the inaccuracy of reported thermodynamic data is substantial, thermodynamic calculations provide a useful guidance and are consistent with the experimental results.

Effect of a Third Element on the Stability of NiSi Thin Films on Si

2006 ◽  
Vol 249 ◽  
pp. 127-134 ◽  
Author(s):  
Dominique Mangelinck
Keyword(s):  
Thin Films ◽  
Thermal Stability ◽  
Phase Diagrams ◽  
High Temperatures ◽  
Driving Force ◽  
Ternary Phase ◽  
The Third ◽  
Ternary Phase Diagrams ◽  
The Stability ◽  
Thermal Stability Of

The effect of Pt and Ge on the stability of NiSi films has been examined. The addition of a small amount of Pt (5 at%) in the Ni film increases the disilicide nucleation temperature to 900oC leading to a better stability of NiSi at high temperatures. For Ni films on Si1-xGex with x=0.29 and 0.58, no NiSi2 was found after annealing at 850°C. The increase in thermal stability of NiSi has been explained in terms of nucleation concept. Calculated ternary phase diagrams allow to understand the effect of the third element (Pt or Ge) on the driving force for nucleation. The redistribution of this element can also be explained with the ternary phase diagrams.

scholarly journals Description of the stability of residual marine fuel using ternary phase diagrams and SARA analysis

2021 ◽  
Vol 266 ◽  
pp. 02006
Author(s):  
K.I. Smyshlyaeva ◽  
N.K. Kondrasheva ◽  
V.A. Rudko
Keyword(s):  
Phase Diagrams ◽  
Ternary Phase ◽  
Graphic Method ◽  
Marine Fuel ◽  
Ternary Phase Diagrams ◽  
The Stability

The results of the analysis of the properties of components of residual marine fuels (RMF) are described. The stability areas of marine fuels are determined using ternary phase diagrams VisRes - ULSD – LGOCC, Asphalt – ULSD – LCGO, Asphalt – ULSD – LGODC. The graphic method for determining the stability of A.B. Stankiewicz based on SARA analysis is used to describe the stability of RMF on the basis of VisRes - ULSD – LGOCC. The areas of stability, instability, and metastability of marine fuel are presented on the graph according to the Stankiewicz method, which can be used to predict the stability of RMF.

Development of Oral Microemulsions of Morus alba Extract for Osteoarthritis

2014 ◽  
Vol 1060 ◽  
pp. 41-44
Author(s):  
Thapani Noi-Ang ◽  
Anusorn Charoensin ◽  
Aksiporn Warangkanagool ◽  
Athid Kulkong ◽  
Nattaporn Soonthornsit ◽  
...  
Keyword(s):  
Phase Diagrams ◽  
High Performance ◽  
Room Temperature ◽  
Ternary Phase ◽  
Physical Stability ◽  
Visual Observation ◽  
Stability Study ◽  
Ternary Phase Diagrams ◽  
The Stability ◽  
Precipitation Phase

This study aimed to develop oral microemulsions (MEs) containing M. alba extract. The stability study of the extract incorporated in the ME was also included. First, pseudo-ternary phase diagrams were constructed using caprylic/capric triglyceride (oil), PEG-8 caprylic/capric glycerides (S), polyglyceryl-3 diisostearate (CoS). Propylene glycol (PG) was used as a cosolvent. Then, the formulations were chosen to incorporate MSE and subjected to stability testing at 4o C, room temperature (RT) and 45o C at 75% RH for 8 weeks. Physical stability of the formulations was assessed by visual observation on the precipitation, phase separation and cloud point. Chemical stability was determined by quantitative analysis of oxyresveratrol using high performance liquid chromatography (HPLC). The results showed that with increasing the ratio of S/CoS, the area of ME existing region in phase diagrams increased. The addition of PG into aqueous phase at ratio 1:1 slightly affected the formation of MEs. Physical stability was not affected by temperature but was influenced by the components of the formulations. However, degradation of the extract was affected by both temperature and components of the formulations. The extract was stable at 4o C and RT. However, at 45o C, it degraded about 16-57%, depending on the components of the formulations. The best ME formulation consisted of 10% caprylic/capric triglyceride, 80% PEG-8 caprylic/capric glycerides and polyglyceryl-3 diisostearate (4:1), and 10% water and PG (1:1).

The Preparation of (E)-Resveratrol Nanoemulsion and In Vitro Release

2011 ◽  
Vol 236-238 ◽  
pp. 2357-2361 ◽  
Author(s):  
Yue Zhang ◽  
Jun Gang Gao ◽  
Dan Peng Ma
Keyword(s):  
Particle Size ◽  
Particle Size Distribution ◽  
Propylene Glycol ◽  
Ternary Phase ◽  
Test Results ◽  
Mass Ratio ◽  
Ternary Phase Diagrams ◽  
The Mean ◽  
The Stability

Here a novel procedure to prepare stable (E)-resveratrol nanoemulsion is reported. The optimum (E)-resveratrol nanoemulsion formulation was sifted based on the pseudo ternary phase diagrams and particle size distribution. An optimized prescription was given as (E)-resveratrol 0.35%, EL-40 22.6%, 1,2-propylene glycol 5.03%, IPM 9.21% and water 62.81% (mass ratio), with the mean particle size 47.3 nm. The morphology of the (E)-resveratrol nanoemulsion was characterized by TEM. The test results demonstrate that the nanoemulsion could dramatically improve the stability and release of (E)-resveratrol.

scholarly journals Spatio-temporal selection of reference genes in the two congeneric species of Glycyrrhiza

2021 ◽  
Vol 11 (1) ◽  
Author(s):  
Yuping Li ◽  
Xiaoju Liang ◽  
Xuguo Zhou ◽  
Yu An ◽  
Ming Li ◽  
...  
Keyword(s):  
Gene Expression ◽  
Developmental Stage ◽  
Reference Genes ◽  
Developmental Stages ◽  
Individual Factors ◽  
Congeneric Species ◽  
Spatio Temporal ◽  
The Stability ◽  
Different Tissues ◽  
Selection Of

AbstractGlycyrrhiza, a genus of perennial medicinal herbs, has been traditionally used to treat human diseases, including respiratory disorders. Functional analysis of genes involved in the synthesis, accumulation, and degradation of bioactive compounds in these medicinal plants requires accurate measurement of their expression profiles. Reverse transcription quantitative real-time PCR (RT-qPCR) is a primary tool, which requires stably expressed reference genes to serve as the internal references to normalize the target gene expression. In this study, the stability of 14 candidate reference genes from the two congeneric species G. uralensis and G. inflata, including ACT, CAC, CYP, DNAJ, DREB, EF1, RAN, TIF1, TUB, UBC2, ABCC2, COPS3, CS, R3HDM2, were evaluated across different tissues and throughout various developmental stages. More importantly, we investigated the impact of interactions between tissue and developmental stage on the performance of candidate reference genes. Four algorithms, including geNorm, NormFinder, BestKeeper, and Delta Ct, were used to analyze the expression stability and RefFinder, a comprehensive software, provided the final recommendation. Based on previous research and our preliminary data, we hypothesized that internal references for spatio-temporal gene expression are different from the reference genes suited for individual factors. In G. uralensis, the top three most stable reference genes across different tissues were R3HDM2, CAC and TUB, while CAC, CYP and ABCC2 were most suited for different developmental stages. CAC is the only candidate recommended for both biotic factors, which is reflected in the stability ranking for the spatio (tissue)-temporal (developmental stage) interactions (CAC, R3HDM2 and DNAJ). Similarly, in G. inflata, COPS3, R3HDM2 and DREB were selected for tissues, while RAN, COPS3 and CS were recommended for developmental stages. For the tissue-developmental stage interactions, COPS3, DREB and ABCC2 were the most suited reference genes. In both species, only one of the top three candidates was shared between the individual factors and their interactions, specifically, CAC in G. uralensis and COPS3 in G. inflata, which supports our overarching hypothesis. In summary, spatio-temporal selection of reference genes not only lays the foundation for functional genomics research in Glycyrrhiza, but also facilitates these traditional medicinal herbs to reach/maximize their pharmaceutical potential.

scholarly journals Improved strategies to efficiently isolate thermophilic, thermotolerant, and heat-resistant fungi from compost and soil

2021 ◽  
Vol 20 (3) ◽  
pp. 325-339
Author(s):  
Frederick Witfeld ◽  
Dominik Begerow ◽  
Marco Alexandre Guerreiro
Keyword(s):  
Elevated Temperatures ◽  
Fungal Species ◽  
Dna Barcodes ◽  
Heat Shock Treatment ◽  
Isolation And Identification ◽  
Heat Resistant ◽  
Heat Stable ◽  
Promising Source ◽  
Culture Dependent ◽  
Selection Of

AbstractThermophilic, thermotolerant and heat-resistant fungi developed different physiological traits, enabling them to sustain or even flourish under elevated temperatures, which are life-hostile for most other eukaryotes. With the growing demand of heat-stable molecules in biotechnology and industry, the awareness of heat-adapted fungi as a promising source of respective enzymes and biomolecules is still increasing. The aim of this study was to test two different strategies for the efficient isolation and identification of distinctly heat-adapted fungi from easily accessible substrates and locations. Eight compost piles and ten soil sites were sampled in combination with different culture-dependent approaches to describe suitable strategies for the isolation and selection of thermophilous fungi. Additionally, an approach with a heat-shock treatment, but without elevated temperature incubation led to the isolation of heat-resistant mesophilic species. The cultures were identified based on morphology, DNA barcodes, and microsatellite fingerprinting. In total, 191 obtained isolates were assigned to 31 fungal species, from which half are truly thermophilic or thermotolerant, while the other half are heat-resistant fungi. A numerous amount of heat-adapted fungi was isolated from both compost and soil samples, indicating the suitability of the used approaches and that the richness and availability of those organisms in such environments are substantially high.

Stabilization of networked switched affine systems with event-triggered strategy

2021 ◽  
pp. 014233122110213
Author(s):  
Dandan Li ◽  
Zhiqiang Zuo ◽  
Yijing Wang
Keyword(s):  
Affine Systems ◽  
Switching Law ◽  
Event Time ◽  
Sliding Motion ◽  
State Dependent ◽  
Event Triggering ◽  
Stability Issue ◽  
The Stability ◽  
Event Based ◽  
Selection Of

Using an event-based switching law, we address the stability issue for continuous-time switched affine systems in the network environment. The state-dependent switching law in terms of the region function is firstly developed. We combine the region function with the event-triggering mechanism to construct the switching law. This can provide more candidates for the selection of the next activated subsystem at each switching instant. As a result, it is possible for us to activate the appropriate subsystem to avoid the sliding motion. The Zeno behavior for the switched affine system can be naturally ruled out by guaranteeing a positive minimum inter-event time between two consecutive executions of the event-triggering threshold. Finally, two numerical examples are given to demonstrate the effectiveness of the proposed method.

scholarly journals Dual role of CO in the stability of subnano Pt clusters at the Fe3O4(001) surface

2016 ◽  
Vol 113 (32) ◽  
pp. 8921-8926 ◽  
Author(s):  
Roland Bliem ◽  
Jessi E. S. van der Hoeven ◽  
Jan Hulva ◽  
Jiri Pavelec ◽  
Oscar Gamba ◽  
...  
Keyword(s):  
Density Functional ◽  
Elevated Temperatures ◽  
Time Lapse ◽  
Dual Role ◽  
Oxidation Catalyst ◽  
Scanning Tunneling ◽  
Tunneling Microscopy ◽  
Active Metal ◽  
Catalytically Active ◽  
The Stability

Interactions between catalytically active metal particles and reactant gases depend strongly on the particle size, particularly in the subnanometer regime where the addition of just one atom can induce substantial changes in stability, morphology, and reactivity. Here, time-lapse scanning tunneling microscopy (STM) and density functional theory (DFT)-based calculations are used to study how CO exposure affects the stability of Pt adatoms and subnano clusters at the Fe3O4(001) surface, a model CO oxidation catalyst. The results reveal that CO plays a dual role: first, it induces mobility among otherwise stable Pt adatoms through the formation of Pt carbonyls (Pt1–CO), leading to agglomeration into subnano clusters. Second, the presence of the CO stabilizes the smallest clusters against decay at room temperature, significantly modifying the growth kinetics. At elevated temperatures, CO desorption results in a partial redispersion and recovery of the Pt adatom phase.

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