Laser Irradiation Effect on Saw Properties of Layered Structure of Oxide/Piezoelectric Substrate

1996 ◽  
Vol 459 ◽  
Author(s):  
Yo Ichikawa ◽  
Masatoshi Kitagawa ◽  
Kentaro Setsune ◽  
Syun-ichiro Kawashima
Keyword(s):  
Laser Irradiation ◽  
Layered Structure ◽  
Laser Energy ◽  
Laser Pulses ◽  
Elastic Stiffness ◽  
Center Frequency ◽  
Irradiation Effect ◽  
Saw Devices ◽  
Krf Excimer Laser ◽  
Piezoelectric Substrate

ABSTRACTUsing surface acoustic wave (SAW) propagating in the layered structure of oxide/piezoelectric substrate, a responsibility of the oxide thin films for the laser irradiation has been investigated. Amorphous Ti-O, Si-O and Si-X-O, where X is other metal elements, films were formed on the surface of the SAW device composed of quartz or LiTaO3 substrate and several hundred Al electrode fingers for oscillating and detecting the SAW. A KrF excimer laser with 248nm in wavelength was used for the irradiation. The center frequency of the SAW devices was immediately decreased by the irradiation of the laser pulses. Although the response to the irradiation was reversible for lower laser energy, the change of the center frequency was irreversible for the laser energy density higher than 20mJ/cm2. It is considered that the response appeared in the frequency shift is generated by a change of an elastic stiffness of the films lowered by an absorption of the laser energy.

Poly-Resistor Thin Film Formation by Excimer Laser Micromachine

2015 ◽  
Vol 780 ◽  
pp. 17-21
Author(s):  
A.F.M. Anuar ◽  
Yufridin Wahab ◽  
M.Z. Zainol ◽  
H. Fazmir ◽  
M. Najmi ◽  
...  
Keyword(s):  
Thin Film ◽  
Excimer Laser ◽  
Laser Energy ◽  
Film Formation ◽  
Chemical Vapor ◽  
Laser Pulses ◽  
Beam Size ◽  
Silicon Thin Film ◽  
Pressure Chemical ◽  
Krf Excimer Laser

A simple theoretical model and resistor fabrication for calculating the resistance of a polycrystalline silicon thin film is presented. The resistance value for poly-resistor is perfomed in terms of polysilicon thickness and its total area. The KrF excimer laser micromachine is used in assisting the resistor formation for a low pressure chemical vapor deposition (LPCVD) based polysilicon. Laser micromachine with three main parameters is used to aid the fabrication of the poly-resistor; namely as the pulse rate (i.e. number of laser pulses per second), laser beam size and laser energy. These parameters have been investigated to create the isolation between materials and also to achieve the desired poly-resistor shape. Preliminary results show that the 35 um beam size and 15 mJ of energy level is the most effective parameter to produce the pattern. Poly-resistor formation with 12 and 21 number of squares shows the total average resistance of 303.52 Ω and 210.14 Ω respectively. The laser micromachine process also significantly reduce the total time and number of process steps that are required for resistor fabrication.

scholarly journals Improving Optical and Electrical Properties of GaN Epitaxial Wafers and Enhancing Luminescent Properties of GaN-Based Light-Emitting-Diode with Excimer Laser Irradiation

Symmetry ◽  
2021 ◽  
Vol 13 (10) ◽  
pp. 1935
Author(s):  
Yijian Jiang ◽  
Haoqi Tan ◽  
Yan Zhao
Keyword(s):  
Electrical Properties ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Laser Energy ◽  
Hole Concentration ◽  
Light Output ◽  
Annealing Treatment ◽  
Optical And Electrical Properties ◽  
Excimer Laser Irradiation ◽  
Krf Excimer Laser

The effect of KrF excimer laser irradiation on the optical and electrical properties of epitaxial wafers with a p-GaN surface were investigated at different laser energy densities and pulse numbers. The laser-irradiated samples were annealed in oxygen. The laser irradiation-induced changes in optical and electrical properties of GaN epitaxial wafers were examined using PL, I–V, XPS, SIMS, and Hall effect measurements. Experimental results show that under an appropriate laser-irradiated condition, optical and electrical properties of the samples were improved to different degrees. The samples which were annealed after laser irradiation have better electrical properties such as the hole concentration and sheet resistance than those without annealing. We hypothesize that the pulsed KrF excimer laser irradiation dissociates the Mg–H complexes and annealing treatment allows the hydrogen to diffuse out more completely under the oxygen atmosphere at a proper temperature, by which the crystalline symmetry of GaN is improved. Under appropriate laser conditions and O2-activated annealing, the light output of the laser-irradiated GaN-based LED sample is about 1.44 times that of a conventional LED at 20 mA. It is found that the wall-plug efficiency is 10% higher at 20 mA and the reverse leakage current is 80% lower at 5 V.

scholarly journals Orderly Perforation of Polyester Films by Excimer Laser

2015 ◽  
Author(s):  
Wenqi Li ◽  
Erol Sancaktar
Keyword(s):  
Excimer Laser ◽  
Laser Energy ◽  
Laser Pulses ◽  
High Laser Fluence ◽  
High Laser ◽  
Area Increase ◽  
Excimer Laser Irradiation ◽  
Krf Excimer Laser ◽  
Different Thickness ◽  
Pet Films

The effects of 248 nm KrF excimer laser irradiation on combinations of different thickness PET films and different stainless steel mask mesh opening sizes were considered as a possible method to achieve different size perforations on different thickness PET films, in order to provide an effective and controllable perforation technology. Therefore, ablation behavior of PET films has been investigated for different laser energy fluence and number of laser pulses. Morphology of irradiated samples was observed by optical microscopy, and atomic forced microscopy to study topography and microstructures after laser ablation. An attempt has been made of correlate these findings with the orientation, strength and mechanical properties of the polymer. The experimental results reveal that the percentage of perforation and the average perforated area increase with increasing number of pulses for all film thicknesses. The affected area, defined as the perforated area plus the heat affected zone (a black-char-region around the perforated area) decrease with increasing number of pulses. Due to the heat conducted from the steel mash wire, especially at cell corners, the perforation process seems to start initially at the cell corners. High laser fluence seems to lead to surface depressions due to thermal shock and surface stress waves along the process directions confirmed by tensile testing and x-ray analyses. The presence and the geometry of surface depressions were confirmed by atomic forced microscopy.

Raman Measurements on Graphite Modified by High Power Laser Irradiation

1984 ◽  
Vol 35 ◽  
Author(s):  
J. Steinbeck ◽  
G. Braunstein ◽  
M.S. Dresselhaus ◽  
B.S. Elman ◽  
T. Venkatesan
Keyword(s):  
Energy Density ◽  
Laser Pulse ◽  
Laser Irradiation ◽  
High Power ◽  
Laser Energy ◽  
Laser Pulses ◽  
Laser Energy Density ◽  
High Power Laser ◽  
Power Laser ◽  
Raman Microprobe

AbstractThe behavior of highly anisotropic materials under short pulses of high power laser irradiation has been studied by irradiating highly oriented pyrolytic graphite (HOPG) with 30 nsec Ruby-laser pulses with energy densities between 0.1 and 5.0J/cm2. Raman spectroscopy has been used to investigate the laser-induced modifications to the crystalline structure as a function of laser energy density of the laser pulse. A Raman microprobe was used to investigate the spatial variations of these near-surface regions. The irradiation of HOPG with energy densities above ~ 0.6J/cm2 leads to the appearance of the ~ 1360 cm-1 disorder-induced line in the first order Raman spectrum. The intensity of the ~ 1360cm-1 line increases with increasing laser energy density. As the energy density of the laser pulse reaches about 1.0J/cm2, the ~ 1360cm-1 line and the ~ 1580cm-1 Raman-allowed mode broaden and coalesce into a broad asymmetric band, indicating the formation of a highly disordered region, consistent with RBS-channeling measurements. However, as the laser energy density of the laser pulses is further increased above 3.0J/cm2, the two Raman lines narrow and can again be resolved suggesting laser-induced crystallization. The Raman results are consistent with high resolution electron microscopy observations showing the formation of randomly oriented crystallites. Raman Microprobe spectra revealed three separate regions of behavior: (i) an outer unirradiated region where the material appears HOPG-like with a thin layer of material coating the surface, (ii) an inner irradiated region where the structure is uniform, but disordered, and (iii) an intermediate region between the other regions where the structure is highly disordered. The changes in structure of the inner region are consistent with the behavior observed with RBS and conventional Raman spectra. The identification of an amorphous carbon-like layer on the outer region is consistent with a large thermomechanical stress at the graphite surface, introduced by the high power laser pulse, and known to occur in metals.

scholarly journals Photothermally Triggered Endosomal Escape and Its Influence on Transfection Efficiency of Gold-Functionalized JetPEI/pDNA Nanoparticles

2018 ◽  
Vol 19 (8) ◽  
pp. 2400 ◽  
Author(s):  
Lotte Vermeulen ◽  
Juan Fraire ◽  
Laurens Raes ◽  
Ellen De Meester ◽  
Sarah De Keulenaer ◽  
...  
Keyword(s):  
Drug Delivery ◽  
Laser Irradiation ◽  
Laser Energy ◽  
Transfection Efficiency ◽  
Laser Pulses ◽  
High Energy ◽  
Endosomal Escape ◽  
Localized Surface Plasmon ◽  
Endosomal Membrane ◽  
Photothermal Effects

Plasmonic nanoparticles for drug delivery have attracted increasing interest over the last few years. Their localized surface plasmon resonance causes photothermal effects on laser irradiation, which allows for delivering drugs in a spatio-temporally controlled manner. Here, we explore the use of gold nanoparticles (AuNP) as carriers for pDNA in combination with pulsed laser irradiation to induce endosomal escape, which is currently considered to be one of the major bottlenecks in macromolecular drug delivery on the intracellular level. In particular, we evaluate nanocomplexes composed of JetPEI (polyethylenimine)pDNA and 10 nm AuNP, which do not exhibit endosomal escape by themselves. After incubating HeLa cells with these complexes, we evaluated endosomal escape and transfection efficiency using low- and high-energy laser pulses. At low laser energy heat is produced by the nanocomplexes, while, at higher laser energy, explosive vapour nanobubbles (VNB) are formed. We investigated the ability of heat transfer and VNB formation to induce endosomal escape and we examine the integrity of pDNA cargo after inducing both photothermal effects. We conclude that JetPEI/pDNA/AuNP complexes are unable to induce meaningful transfection efficiencies because laser treatment causes either dysfunctionality of the cargo when VNB are formed or forms too small pores in the endosomal membrane to allow pDNA to escape in case of heating. We conclude that laser-induced VNB is the most suitable to induce effective pDNA endosomal escape, but a different nanocomplex structure will be required to keep the pDNA intact.

Crystallization of Amorphous Titanium Oxide Thin Films by Pulsed UV-Laser Irradiation

1995 ◽  
Vol 397 ◽  
Author(s):  
Yo Ichikawa ◽  
Hideaki Ada Chi ◽  
Kentaro Setsune ◽  
Syun-Ichiro Kawashima ◽  
Koichi Kugimiya
Keyword(s):  
Crystal Structure ◽  
Thin Films ◽  
Laser Irradiation ◽  
Optical Transmission ◽  
Laser Pulses ◽  
Uv Laser ◽  
Before And After ◽  
Krf Excimer Laser ◽  
Quartz Substrates ◽  
Local Crystal Structure

ABSTRACTEffects of ultraviolet (UV) laser irradiation on the local crystal structure have been investigated for amorphous Ti-O thin films sputtered on ST-cut quartz substrates. The irradiation was conducted with a pulsed KrF excimer laser of 248nm in wavelength. There were few changes in the optical transmission spectra of the films before and after the irradiation. The crystal structure of the films was characterized by electron diffraction, XPS and EXAFS analyses. The results obtained from these analyses suggest the films gradually crystallize to a TiO2 crystal with the rutile type structure by the increasing of the laser pulses.

Oxidation and Nitridation by Pulsed Laser Irradiation of Solids Immersed in Liquids

1986 ◽  
Vol 75 ◽  
Author(s):  
S. Roorda ◽  
A. Polman ◽  
S. B. Ogale ◽  
F. W. Saris
Keyword(s):  
Laser Irradiation ◽  
Rutherford Backscattering Spectrometry ◽  
Laser Energy ◽  
Pulsed Laser ◽  
Laser Pulses ◽  
Processing Parameters ◽  
Initial Surface ◽  
X Ray Diffraction ◽  
Compound Formation ◽  
Pulsed Laser Irradiation

AbstractNitridation and oxidation of titanium is achieved by pulsed laser irradiation of Ti immersed in liquid ammonia or water. Rutherford Backscattering Spectrometry shows that large amounts of nitrogen and oxygen can be incorporated in the metal surface to a depth of several 1000 Å. X-ray diffraction shows evidence of compound formation. Scanning Electron Microscopy reveals that initial surface texture is smoothed, and that stress induced cracks and holes may appear. Irradiation of Fe and Si immersed in various liquids shows that modification depends on which combination of solid and liquid is used. Influence of processing parameters such as laser-energy density and number of laser pulses on compound formation has been investigated. The process is viewed as a reactive solute incorporation in the laser melted surface layer, followed by compound formation.

KrF Excimer Laser Irradiation Effect on GaAs Atomic Layer Epitaxy

1989 ◽  
Vol 28 (Part 2, No. 12) ◽  
pp. L2327-L2329 ◽  
Author(s):  
Hironori Ishikawa ◽  
Yoshito Kawakyu ◽  
Masahiro Sasaki ◽  
Masao Mashita
Keyword(s):  
Laser Irradiation ◽  
Excimer Laser ◽  
Atomic Layer ◽  
Atomic Layer Epitaxy ◽  
Irradiation Effect ◽  
Excimer Laser Irradiation ◽  
Krf Excimer Laser

scholarly journals Carbon-coated magnetic particles increase tissue temperatures after laser irradiation

2015 ◽  
Vol 08 (05) ◽  
pp. 1550018 ◽  
Author(s):  
Shupeng Liu ◽  
Na Chen ◽  
Fufei Pang ◽  
Zhengyi Chen ◽  
Tingyun Wang
Keyword(s):  
Laser Irradiation ◽  
Magnetic Particles ◽  
Laser Energy ◽  
Thermal Therapy ◽  
Vibrating Sample Magnetometer ◽  
X Ray Diffraction ◽  
X Ray ◽  
Fbg Sensor ◽  
Transmission Electron ◽  
Carbon Coated

Purpose: This work focused on the investigation the hyperthermia performance of the carbon-coated magnetic particles (CCMPs) in laser-induced hyperthermia. Materials and methods: We prepared CCMPs using the organic carbonization method, and then characterized them with transmission electron microscopy (TEM), ultraviolet-visible (UV-Vis) spectrophotometry, vibrating sample magnetometer (VSM) and X-ray diffraction (XRD). In order to evaluate their performance in hyperthermia, the CCMPs were tested in laser-induced thermal therapy (LITT) experiments, in which we employed a fully distributed fiber Bragg grating (FBG) sensor to profile the tissue's dynamic temperature change under laser irradiation in real time. Results: The sizes of prepared CCMPs were about several micrometers, and the LITT results show that the tissue injected with the CCMPs absorbed more laser energy, and its temperature increased faster than the contrast tissue without CCMPs. Conclusions: The CCMPs may be of great help in hyperthermia applications.

scholarly journals Preliminary Laser Cleaning Studies of a Consolidated Prehistoric Basketry Coming from the Pile Building of Fiavè-Carera in the North-East of Italy

2006 ◽  
Vol 2006 ◽  
pp. 1-5 ◽  
Author(s):  
Romina Belli ◽  
Antonio Miotello ◽  
Paolo Mosaner ◽  
Laura Toniutti ◽  
Marta Bazzanella
Keyword(s):  
Energy Density ◽  
Material Removal ◽  
Laser Energy ◽  
Laser Cleaning ◽  
Original Surface ◽  
North East ◽  
The North ◽  
Cleaning Procedures ◽  
Krf Excimer Laser ◽  
Organic Deposits

In the archaeological field, some specific advantages are recognized to laser cleaning, like, for example, the absence of mechanical contacts with the sample. The cleaning procedures generally involve a multilayer structure (dust, dirty, organic deposits, and, in some cases, consolidant substances). In this work, prehistoric wood samples (found and consolidated in 1970s) have been laser irradiated (KrF excimer laser) in order to restore their original surface aspect. A certain amount of burned matter was also present. Samples came from a fragment of a prehistoric basketry found in the lake dwelling site of Fiavè-Carera, Trento, Italy (1500–1400 BC). It was observed that the laser cleaning effects are strictly dependent on the irradiation parameters (power density and number of pulses). Efficient material removal was possible by using appropriate energy density. Moreover, for lower laser energy density, special structures appeared on the surface of the consolidating substance that we attributed to heating-induced stresses on the consolidant surface.

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