Smart‐Cut® : The Basic Fabrication Process for Unibond® Soi Wafers

1996 ◽  
Vol 446 ◽  
Author(s):  
A.J. Auberton‐Hervé ◽  
T. Barge ◽  
F. Metral ◽  
M. Bruel ◽  
B. Aspar ◽  
...  
Keyword(s):  
Wafer Bonding ◽  
Low Cost ◽  
Bulk Silicon ◽  
High Quality ◽  
Thin Film Thickness ◽  
Hydrogen Implantation ◽  
Electric Behavior ◽  
Bonding Technology ◽  
Good Uniformity ◽  
Quality Surface

AbstractThe advantage of SOI wafers for device manufacture has been widely studied. To be a real challenger to bulk silicon, SOI producers have to offer SOI wafers in large volume and at low cost. The new Smart‐Cut® SOI process used for the manufacture of the Unibond® SOI wafers answers most of the SOI wafer manufacturability issues. The use of Hydrogen implantation and wafer bonding technology is the best combination to get good uniformity and high quality for both the SOI and buried oxide layer. In this paper, the Smart‐Cut® process is described in detail and material characteristics of Unibond® wafers such as crystalline quality, surface roughness, thin film thickness homogeneity, and electric behavior.

Weakening of Hardness and Modulus of the Si Lattice by Hydrogen Implantation for Layer Transfer in Wafer Bonding Technology

2019 ◽  
Vol 16 (8) ◽  
pp. 385-391
Author(s):  
Diefeng Gu ◽  
H. Baumgart ◽  
Konstantin Bourdelle ◽  
George K. Celler ◽  
Abdelmageed Elmustafa
Keyword(s):  
Wafer Bonding ◽  
Layer Transfer ◽  
Hydrogen Implantation ◽  
Bonding Technology

scholarly journals Urban Air Quality Modeling Using Low-Cost Sensor Network and Data Assimilation in the Aburrá Valley, Colombia

Atmosphere ◽  
2021 ◽  
Vol 12 (1) ◽  
pp. 91
Author(s):  
Santiago Lopez-Restrepo ◽  
Andres Yarce ◽  
Nicolás Pinel ◽  
O.L. Quintero ◽  
Arjo Segers ◽  
...  
Keyword(s):  
Air Quality ◽  
Data Assimilation ◽  
Transport Model ◽  
Cost Model ◽  
Low Cost ◽  
Model Performance ◽  
Monitoring Network ◽  
Correlation Factor ◽  
Chemical Transport Model ◽  
High Quality

The use of low air quality networks has been increasing in recent years to study urban pollution dynamics. Here we show the evaluation of the operational Aburrá Valley’s low-cost network against the official monitoring network. The results show that the PM2.5 low-cost measurements are very close to those observed by the official network. Additionally, the low-cost allows a higher spatial representation of the concentrations across the valley. We integrate low-cost observations with the chemical transport model Long Term Ozone Simulation-European Operational Smog (LOTOS-EUROS) using data assimilation. Two different configurations of the low-cost network were assimilated: using the whole low-cost network (255 sensors), and a high-quality selection using just the sensors with a correlation factor greater than 0.8 with respect to the official network (115 sensors). The official stations were also assimilated to compare the more dense low-cost network’s impact on the model performance. Both simulations assimilating the low-cost model outperform the model without assimilation and assimilating the official network. The capability to issue warnings for pollution events is also improved by assimilating the low-cost network with respect to the other simulations. Finally, the simulation using the high-quality configuration has lower error values than using the complete low-cost network, showing that it is essential to consider the quality and location and not just the total number of sensors. Our results suggest that with the current advance in low-cost sensors, it is possible to improve model performance with low-cost network data assimilation.

scholarly journals Large-Scale and Deep-Seated Gravitational Slope Deformations on Mars: A Review

Geosciences ◽  
2021 ◽  
Vol 11 (4) ◽  
pp. 174
Author(s):  
Marco Emanuele Discenza ◽  
Carlo Esposito ◽  
Goro Komatsu ◽  
Enrico Miccadei
Keyword(s):  
Large Scale ◽  
High Quality ◽  
Surface Data ◽  
Geomorphological Processes ◽  
Gravitational Processes ◽  
Quality Surface ◽  
High Quality Surface ◽  
Mars Missions

The availability of high-quality surface data acquired by recent Mars missions and the development of increasingly accurate methods for analysis have made it possible to identify, describe, and analyze many geological and geomorphological processes previously unknown or unstudied on Mars. Among these, the slow and large-scale slope deformational phenomena, generally known as Deep-Seated Gravitational Slope Deformations (DSGSDs), are of particular interest. Since the early 2000s, several studies were conducted in order to identify and analyze Martian large-scale gravitational processes. Similar to what happens on Earth, these phenomena apparently occur in diverse morpho-structural conditions on Mars. Nevertheless, the difficulty of directly studying geological, structural, and geomorphological characteristics of the planet makes the analysis of these phenomena particularly complex, leaving numerous questions to be answered. This paper reports a synthesis of all the known studies conducted on large-scale deformational processes on Mars to date, in order to provide a complete and exhaustive picture of the phenomena. After the synthesis of the literature studies, the specific characteristics of the phenomena are analyzed, and the remaining main open issued are described.

scholarly journals Linum usitatisimum L. is the most important crop in Russia for the production of high-quality oil with low cost (review)

2021 ◽  
Vol 640 (4) ◽  
pp. 042014
Author(s):  
E N Turin ◽  
A N Susskiy ◽  
R S Stukalov ◽  
M V Shestopalov ◽  
E L Turina ◽  
...  
Keyword(s):  
Low Cost ◽  
High Quality ◽  
Important Crop

High Precision Low Temperature Direct Wafer Bonding Technology for Wafer-Level 3D ICs Manufacturing

2016 ◽  
Vol 75 (9) ◽  
pp. 345-353 ◽  
Author(s):  
F. Kurz ◽  
T. Plach ◽  
J. Suss ◽  
T. Wagenleitner ◽  
D. Zinner ◽  
...  
Keyword(s):  
Low Temperature ◽  
High Precision ◽  
Wafer Bonding ◽  
Wafer Level ◽  
3D Ics ◽  
Direct Wafer Bonding ◽  
Bonding Technology
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