The Influence of Hydrogen Plasma Passivation on Electrical and Optical Properties of Aigan Samples Grown on Sapphire
Keyword(s):
AbstractHydrogen plasma passivation effects are studied for undoped AlGaN layers grown by MOCVD. Hydrogen treatment at 200°C for lh led to a substantial decrease in carrier concentration accompanied by an increase in electron mobility. The magnitude of the near-band edge absorption tails also dramatically decreased after hydrogen passivation. The effect is explained by pairing of negatively charged hydrogen acceptors with positively charged native donors commonly believed to be related to nitrogen vacancies. The bond strength in such hydrogen complexes increases as the composition of AlGaN moves towards AIN, as revealed by results of post hydrogenation annealing.
2017 ◽
Vol 43
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pp. S506-S510
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2016 ◽
Vol 41
(3)
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pp. 273-277
2010 ◽
Vol 2
(6)
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pp. 1780-1784
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2004 ◽
Vol 22
(1)
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pp. 77
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2001 ◽
Vol 40
(Part 2, No. 3A)
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pp. L189-L191
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