Semiconductor Superlattices Studied by Grazing X-ray Scattering and Diffraction
Keyword(s):
X Ray
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Semiconductor superlattices have been studied by grazing incidence x-ray scattering and x-ray diffraction. For superlattices of 100-period InGaAs/GaAs, lateral structural ordering has been found to occur in the material. For one particular sample (M1400), periodic thickness modulations have been observed in the InGaAs layers. X-ray results also provide evidence for an improvement of interface quality by using interrupt-growth method for 55-period AlAs/GaAs superlattices grown by MBE.
2013 ◽
Vol 47
(1)
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pp. 102-109
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