Evaluation of Mechanical Properties of Sputtered Ceramic Films from Nanoindentation and Wafer Curvature Techniques

1995 ◽  
Vol 403 ◽  
Author(s):  
Rama B. Inturi ◽  
John A. Barnard
Keyword(s):  
Mechanical Properties ◽  
Ambient Temperature ◽  
Glass Substrate ◽  
Room Temperature ◽  
Elastic Behavior ◽  
X Ray Diffraction ◽  
Substrate Effects ◽  
X Ray ◽  
Glass Substrates ◽  
Ceramic Films

AbstractTiB2, MoSi2, Si3N4 and Ta4N ceramic films were magnetron sputtered on oxidized Si and Coming 7059 glass substrates at ambient temperature. X-ray diffraction studies indicate that the structure of the films is very different on the two substrates, even though the surface of both substrates is amorphous. The hardness and elastic modulii of the films on oxidized Si are slightly higher than those of the films deposited on Coming glass substrate, even at indentation depths where substrate effects are considered to be negligible. A substantial increase in hardness (5–10 GPa) was observed for TiB2 films, when compared to the properties of bulk stoichiometric TiB2. Stress- temperature diagrams determined from room temperature to 250 C indicate that all the films prepared in this study display a pure elastic behavior in that temperature range.

Physical and Mechanical Properties of Cement Paste Were Used Partially with Fly Ash and Kaolin Waste

2017 ◽  
Vol 866 ◽  
pp. 199-203
Author(s):  
Chidchanok Chainej ◽  
Suparut Narksitipan ◽  
Nittaya Jaitanong
Keyword(s):  
Mechanical Properties ◽  
Fly Ash ◽  
Room Temperature ◽  
Physical And Mechanical Properties ◽  
Partial Replacement ◽  
X Ray Diffraction ◽  
X Ray ◽  
Lime Water ◽  
Diffraction Patterns ◽  
Iron Mold

The aims of this research were study the microstructures and mechanical properties for partial replacement of cement with Fly ash (FA) and kaolin waste (KW). Ordinary Portland cement were partially replaced with FA and KW in the range of 25-35% and 10-25% by weight of cement powder. The kaolin waste was ground for 180 minutes before using. The specimen was packing into an iron mold which sample size of 5×5×5 cm3. Then, the specimens were kept at room temperature for 24 hours and were moist cured in the incubation lime water bath at age of 3 days. After that the specimens were dry cured with plastic wrap at age of 3, 7, 14 and 28 days. After that the compounds were examined by x-ray diffraction patterns (XRD) and the microstructures were examined by scanning electron microscopy (SEM). The compressive strength was then investigated.

Effect of Hot Forging and Different Cooling Rates on the Microstructure, Mechanical Properties of Carbon Steel Containing 0.8 and 1.2Al

2014 ◽  
Vol 622-623 ◽  
pp. 174-178
Author(s):  
Ahmed Ismail Zaky Farahat ◽  
Mohamed Kamal Elfawkhry
Keyword(s):  
Mechanical Properties ◽  
Carbon Steel ◽  
Mechanical Testing ◽  
Room Temperature ◽  
Induction Furnace ◽  
Hot Forging ◽  
X Ray Diffraction ◽  
Cooling Rates ◽  
X Ray ◽  
Sem Microstructure

Two alloys of steel containing nominally 0.45C-1.0Si-2.0Mn-0.8Al and 1.2Al were cast in open air induction furnace. Dilatation testing was carried out to recognize the effect on Aluminum on the different critically transformation temperatures. The alloys were hot forged at 1200°C and then subjected to different cooling rates. Mechanical testing was carried out at room temperature. Optical and SEM microstructure were observed. X-ray diffraction was conducted to observe the microstructure constituents.

Effect of Nitrogen Addition on Mechanical Property of Ti-Cr-Sn Alloy

2010 ◽  
Vol 654-656 ◽  
pp. 2126-2129 ◽  
Author(s):  
Yuichi Nakahira ◽  
Tomonari Inamura ◽  
Hiroyasu Kanetaka ◽  
Shuichi Miyazaki ◽  
Hideki Hosoda
Keyword(s):  
Mechanical Properties ◽  
Room Temperature ◽  
Tensile Tests ◽  
Nitrogen Addition ◽  
N Addition ◽  
X Ray Diffraction ◽  
Solution Hardening ◽  
X Ray ◽  
Bcc Phase ◽  
Cold Workability

Effect of nitrogen (N) addition on mechanical properties of Ti-Cr-Sn alloy was investigated in this study. Ti-7mol%Cr-3mol%Sn was selected and less than 0.5wt% of N were systematically added. The alloys were characterized by optical microscopy, X-ray diffraction analysis and tensile tests at room temperature. The apparent phase was β (bcc) phase, whereas the presence of precipitates was confirmed in 0.5wt%N-added alloy only which did not exhibit sufficient cold workability. The grain size was not largely affected by N addition being less than 0.5wt%. Tensile tests revealed that less than 0.5wt%N addition improves the strength which is due to the solution hardening by interstitial N atoms.

Effects of Extrusion on the Mechanical Properties and Damping Capacity of Mg-1.8Cu-0.5Mn Alloy

2007 ◽  
Vol 546-549 ◽  
pp. 257-260 ◽  
Author(s):  
Zhen Yan Zhang ◽  
Li Ming Peng ◽  
Xiao Qin Zeng ◽  
Lin Du ◽  
Lan Ma ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Tensile Properties ◽  
Room Temperature ◽  
Tensile Tests ◽  
Optical Microscope ◽  
Damping Capacity ◽  
X Ray Diffraction ◽  
Dynamic Mechanical Analyzer ◽  
X Ray ◽  
Solute Atoms

Effects of extrusion on mechanical properties and damping capacity of Mg-1.8wt.%Cu -0.5wt.%Mn (MCM1805) alloy have been investigated. Tensile tests and dynamic mechanical analyzer were respectively used to measure tensile properties and damping capacity at room temperature of as-cast and as-extruded MCM1805 alloy. The microstructure was studied using optical microscope, X-ray diffraction and scanning electron microscope with an energy dispersive X-ray spectrometer. Granato-Lücke model was used to explain the influences of extrusion on damping capacity of MCM1805 alloy. The results showed that extrusion dramatically decreases the grain size but has little influence on phase composition and solute atoms concentration of MCM1805 alloy, and the grain refinement was the dominant reason for the obvious increase of tensile properties and decrease of internal friction of MCM1805 alloy.

scholarly journals Compositional Dependence of Structural Properties of Prepared Alloys and Films

2011 ◽  
Vol 2011 ◽  
pp. 1-6
Author(s):  
M. F. A. Alias ◽  
A. A. J. Al-Douri ◽  
E. M. N. Al-Fawadi ◽  
A. A. Alnajjar
Keyword(s):  
Room Temperature ◽  
Thermal Evaporation ◽  
High Accuracy ◽  
Compositional Dependence ◽  
X Ray Diffraction ◽  
Thermal Evaporation Method ◽  
X Ray ◽  
Glass Substrates ◽  
Different Temperatures ◽  
Good Agreement

Results of a study of alloys and films with various Pb content have been reported and discussed. Films of of thickness 1.5 μm have been deposited on glass substrates by flash thermal evaporation method at room temperature, under vacuum at constant deposition rate. These films were annealed under vacuum around 10−6Torr at different temperatures up to 523 K. The composition of the elements in alloys was determined by standard surfaces techniques such as atomic absorption spectroscopy (AAS) and X-ray fluorescence (XRF), and the results were found of high accuracy and in very good agreement with the theoretical values. The structure for alloys and films is determined by using X-ray diffraction. This measurement reveals that the structure is polycrystalline with cubic structure and there are strong peaks at the direction (200) and (111). The effect of heat treatment on the crystalline orientation, relative intensity, and grain size of films is presented.

Deposition of aluminum Oxynitride Films by Magnetron Sputtering: Effect of Bombardment and Substrate Heating on Structural and Mechanical Properties

1995 ◽  
Vol 388 ◽  
Author(s):  
Russell V. Smilgys ◽  
Eric Takamura ◽  
Irwin L. Singer ◽  
Steven W. Robey ◽  
Douglas A. Kirkpatrick
Keyword(s):  
Mechanical Properties ◽  
Magnetron Sputtering ◽  
Aluminum Oxynitride ◽  
X Ray Diffraction ◽  
Etch Pits ◽  
X Ray ◽  
Substrate Heating ◽  
Glass Substrates ◽  
Planar Magnetron ◽  
Continuous Indentation

ABSTRACTAluminum oxynitride films, 1 μm thick, are deposited onto glass substrates by planar magnetron sputtering from an alumina target in a mixture of nitrogen and argon. one set of films is deposited onto glass substrates that are heat sunk to a holder, whose temperature is held below 100°C. a second set of films is deposited onto glass substrates that are mechanically clamped to a holder, whose temperature is allowed to rise up to 250°C. Characterization by continuous indentation testing, secondary electron microscopy, and x-ray diffraction reveals significant differences in mechanical properties and surface structure between the two sets of films. Films deposited with holder cooling have a smooth surface and no evidence of crystallinity; films deposited without holder cooling have etch pits on their surface that vary with position across the substrate. the later films show crystallinity and have twice the hardness and a 60% greater elastic modulus.

Effect of Deposition Temperature on the Structure and Mechanical Properties of Ti-6Al-4V Film

2013 ◽  
Vol 749 ◽  
pp. 643-647 ◽  
Author(s):  
Lei Li ◽  
Ya Feng Lu ◽  
Wen Xue Li ◽  
Li Ying Zeng ◽  
Yi Yang ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Room Temperature ◽  
Elastic Moduli ◽  
Preferred Orientation ◽  
Nanoindentation Test ◽  
X Ray Diffraction ◽  
X Ray ◽  
Phase Direction ◽  
Higher Temperature ◽  
Substrate Temperatures

Ti-6Al-4V films were deposited by direct-current magnetron sputtering at different substrate temperatures. The structure and the surface morphology of the films were characterized by X-ray diffraction (XRD) and scanning electron microscopy (SEM). The hardness and elastic moduli of Ti-6Al-4V films were measured by nanoindentation test. The results showed that the phase direction of the films deposited at room temperature was (102) orientation, and turned to almost complete (002) preferred orientation at 300°C. For a higher temperature of 500°C, the preferred orientation of the film disappeared and presented a random grain orientation. The hardness and elastic moduli of Ti-6Al-4V films obviously showed the dependence on the temperature. The relationships among temperature, microstructure and mechanical properties of Ti-6Al-4V films were discussed in this paper.

Structure and Electronic Properties of Evaporated Thin Films of Lead Sulfide

2009 ◽  
Vol 294 ◽  
pp. 85-92 ◽  
Author(s):  
A.A. Ibrahim
Keyword(s):  
Thin Films ◽  
Lead Sulfide ◽  
Room Temperature ◽  
Conduction Band Edge ◽  
X Ray Diffraction ◽  
X Ray ◽  
Glass Substrates ◽  
Temperature Electron ◽  
Transition Voltage ◽  
Dc Electrical Properties

Lead sulfide (PbS) thin films were prepared by thermal evaporation onto glass substrates from PbS powder. The structure and DC electrical properties of evaporated PbS thin film sandwich structures with thicknesses (d) up to 600 nm have been investigated. X-ray diffraction studies showed that the films were crystalline, with a preferred orientation in the [111] direction. Capacitance measurements indicated that the films had a relative permittivity of 5.7. Room-temperature current density-voltage (J–V) characteristics revealed ohmic conduction below a transition voltage (Vt) and a power–law dependence with an exponent of ≈ 2 at higher voltages. This behaviour was interpreted in terms of space–charge limited conductivity controlled by an exponential distribution of traps below the conduction band edge. Further evidence for this conduction process was provided by a linear dependence of Vt upon d2. Analysis of the results yielded a room temperature electron concentration no of ≈ (3.9 – 5.4) x 109 m-3.

Effect of Nd on Microstructures and Properties of AZ31 Wrought Mg Alloy

2007 ◽  
Vol 546-549 ◽  
pp. 301-304
Author(s):  
Wei Qiu ◽  
En Hou Han ◽  
Lu Liu
Keyword(s):  
Mechanical Properties ◽  
Room Temperature ◽  
Elevated Temperatures ◽  
Mg Alloys ◽  
The Other ◽  
Mg Alloy ◽  
X Ray Diffraction ◽  
X Ray ◽  
Microstructures And Mechanical Properties ◽  
Re Elements

Addition of RE elements to Al-containing Mg alloys can improve properties of Mg alloys at elevated temperatures. In the present investigation, hot-extruded AZ31+x%Nd. (x=0.1,0.3,0.6and1.0 wt%) wrought Mg alloy were prepared .The effects of Nd on microstructures and mechanical properties at room temperature of new alloy were investigated. The investigation found that Nd can bring about two kind of precipitation phases . One is AlNd phase, the other is AlNdMn phase, which were identified as Al11Nd3 and Al8NdMn4 by X-ray diffraction and TEM.

Influence of Temperature of Accumulative Roll Bonding on the Microstructure and Mechanical Properties of AA5251 Aluminum Alloy

2014 ◽  
Vol 59 (1) ◽  
pp. 127-131 ◽  
Author(s):  
J. Bogucka
Keyword(s):  
Mechanical Properties ◽  
Ambient Temperature ◽  
Accumulative Roll Bonding ◽  
Bonding Temperature ◽  
Tensile Tests ◽  
Structure Evolution ◽  
X Ray Diffraction ◽  
Roll Bonding ◽  
X Ray ◽  
Microstructure And Mechanical Properties

Abstract The influence of bonding temperature on microstructure and mechanical properties of AA5251 alloy sheets have been analyzed in the paper. The alloy was deformed with the method of accumulative roll bonding (ARB) in various temperature conditions i.e. at ambient temperature up to 5th cycle (ε = 4.0) and using pre-heating of sheet packs at 200°C and 300°C up to 10 cycles (ε = 8.0). The deformed material was subjected to structural observations using TEM, measurements of crystallographic texture with the technique of X-ray diffraction and tensile tests. It was established that the temperature of roll-bonding had a significant effect on the structure evolution and the observed changes of mechanical properties. High refinement of microstructure and optimum mechanical properties were obtained for the material processed at lower temperatures, i.e. at ambient temperature and pre-heating at 200°C. Recovery structure processes occurring during deformation were observed in the alloy bonded with pre-heating at 300°C and therefore mechanical properties were lower than for the alloy bonded at lower temperatures.

Sign in / Sign up

Export Citation Format

Share Document