Laser Induced Nanofabrication on Titanium Thin Films

1995 ◽  
Vol 397 ◽  
Author(s):  
B.D. Huey ◽  
D.A. Bonnell ◽  
A.D. Akhsakhalian ◽  
A.A. Gorbunov ◽  
A. Sewing ◽  
...  
Keyword(s):  
Thin Films ◽  
Scanning Probe Microscopy ◽  
Optical Resolution ◽  
Diffraction Limit ◽  
Scanning Probe ◽  
Nanometer Scale ◽  
Ion Laser ◽  
Titanium Thin Films ◽  
Novel Structures ◽  
Argon Ion

ABSTRACTIllumination of titanium thin films with an argon-ion laser has been used to fabricate nanometer scale features by localized oxidation. The laser induces a temperature gradient in the metal film, within which oxidation may occur. Due to the non-linearity of the reaction with temperature, the reaction zone can be laterally confined to regions narrower than the diffraction limit of optical resolution. Scanning probe microscopy indicates widths ranging from 105 to 600 nm and heights of 0.8 to 30 nm. The possibility of forming novel structures is demonstrated.

Algorithms for Dynamic Hardness Measurements by Scratch Testing in the Submicron and Nanometer Scale

2013 ◽  
Vol 853 ◽  
pp. 619-624
Author(s):  
Natalia Lvova ◽  
K. Kravchuk ◽  
I. Shirokov
Keyword(s):  
Contact Area ◽  
Scanning Probe Microscopy ◽  
Scanning Probe ◽  
Nanometer Scale ◽  
Geometrical Parameters ◽  
Scratch Testing ◽  
Dynamic Hardness ◽  
Probe Microscopy ◽  
Parameters Analysis

The automatic scratch geometrical parameters analysis algorithms based on the images obtained by scanning probe microscopy have been developed. We provide a description of the technique to determine the contact area and the scratch volume with and without account of the pile-ups. The developed algorithms are applied to measure the dynamic hardness by sclerometry on the submicron and nanometer scale.

Optoeletronic investigation of Cu2ZnSn(S,Se)4 thin-films & Cu2ZnSn(S,Se)4/CdS interface with scanning probe microscopy

2015 ◽  
Vol 59 (2) ◽  
pp. 231-236 ◽  
Author(s):  
Jiangjun Li ◽  
Yugang Zou ◽  
Ting Chen ◽  
Jinsong Hu ◽  
Dong Wang ◽  
...  
Keyword(s):  
Thin Films ◽  
Scanning Probe Microscopy ◽  
Scanning Probe ◽  
Probe Microscopy

Bias assisted scanning probe microscopy direct write lithography enables local oxygen enrichment of lanthanum cuprates thin films

2015 ◽  
Vol 26 (32) ◽  
pp. 325302 ◽  
Author(s):  
Francesco Lavini ◽  
Nan Yang ◽  
Rama K Vasudevan ◽  
E Strelcov ◽  
S Jesse ◽  
...  
Keyword(s):  
Thin Films ◽  
Scanning Probe Microscopy ◽  
Oxygen Enrichment ◽  
Scanning Probe ◽  
Direct Write ◽  
Probe Microscopy ◽  
Local Oxygen

CW Argon-ion laser initiated aluminum induced crystallization of amorphous silicon thin films

2004 ◽  
Vol 808 ◽  
Author(s):  
Sampath K. Paduru ◽  
Husam H. Abu-safe ◽  
Hameed A. Naseem ◽  
Adnan Al-Shariah ◽  
William D. Brown
Keyword(s):  
Thin Films ◽  
Amorphous Silicon ◽  
Power Density ◽  
Threshold Power ◽  
Argon Ion Laser ◽  
Ion Laser ◽  
Power Densities ◽  
Argon Ion ◽  
Induced Crystallization ◽  
Aluminum Induced Crystallization

ABSTRACTCW Argon-ion laser initiated aluminum induced crystallization (AIC) of RF magnetron sputtered amorphous silicon (a-Si) thin films has been investigated. It was found that lasers could be effectively used to initiate AIC process at very low threshold power densities. An argon-ion laser (λ=514.5 nm) was used to anneal Al/a-Si/glass structures with varying power densities ranging between 55 and 125 W/cm2 and exposure times ranging from 10 to 120 s. X-ray diffraction analysis showed the resulting films to be polycrystalline. The crystallization rate increased both with power density and exposure time. Environmental scanning electron microscopy (ESEM) analysis showed that the surface features change with increasing power density and irradiation time. A dendritic growth pattern was observed in the initial stages of interaction between the films. A strong crystalline Raman peak at around 520 cm-1 was observed in the Raman spectra of the crystallized samples.

scholarly journals Prospects of scanning probe microscopy for nanometer-scale lithography.

1995 ◽  
Vol 8 (4) ◽  
pp. 669-676 ◽  
Author(s):  
LARRY AKIO NAGAHARA ◽  
HIROTAKA OHNO ◽  
HIROSHI TOKUMOTO
Keyword(s):  
Scanning Probe Microscopy ◽  
Scanning Probe ◽  
Nanometer Scale ◽  
Probe Microscopy
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