Laser MBE for Atomically Defined Ceramic Film Growth

1995 ◽  
Vol 397 ◽  
Author(s):  
H. Koinuma ◽  
M. Kawasaki ◽  
M. Yoshimoto
Keyword(s):  
Film Growth ◽  
Molecular Layer ◽  
High Vacuum ◽  
Layer Growth ◽  
Atomic Scale ◽  
In Situ Monitoring ◽  
Layer By Layer ◽  
Sintered Ceramic ◽  
Infinite Layer ◽  
Laser Mbe

ABSTRACTLaser MBE is a process especially useful for epitaxial layer-by-layer growth of ceramic thin films directly from sintered ceramic targets. By employing high vacuum MBE conditions, the process has a restriction in the controllability of chemical composition, e.g. nonstoi chiometry in oxides and nitrides, as compared with conventional pulsed laser deposition, but instead gains the possibility of in situ monitoring of surface reaction on an atomic scale by RHEED. Ever since our first success in observing RHEED intensity oscillation for CeO2 film growth on Si(l11), we have verified the molecular layer epitaxy by laser MBE for perovskite oxides (SrTiO3, BaTiO3, SrVO3 ,etc) and infinite-layer cuprates MCuO2 (M= Sr, Ba, Ca) on SrTiO3 substrates as well as for oxide and nitride films on Si substrates. Key factors to design the laser MBE system, operation parameters, and recent experimental results are presented and discussed.

Radical-triggered cross-linking for molecular layer deposition of SiAlCOH hybrid thin films

2021 ◽  
Author(s):  
Kristina Ashurbekova ◽  
Karina Ashurbekova ◽  
Iva Saric ◽  
Evgeny Modin ◽  
Mladen Petravic ◽  
...  
Keyword(s):  
Thin Film ◽  
Film Growth ◽  
Molecular Layer ◽  
Thin Film Growth ◽  
Cross Linking ◽  
Layer By Layer ◽  
Molecular Layer Deposition ◽  
Layer Deposition ◽  
Hybrid Thin Films ◽  
Enhanced Stability

We developed a thin film growth with a radical-initiated cross-linking of vinyl groups in a layer-by-layer manner via molecular layer deposition (MLD). The cross-linked film exhibited improved properties like 12% higher density and enhanced stability compared to the non-cross-linked film.

Structural Defects and Their Relationship to Nucleation of Gan Thin Films

1996 ◽  
Vol 423 ◽  
Author(s):  
Weida Gian ◽  
Marek Skowronski ◽  
Greg S. Rohrer
Keyword(s):  
Film Growth ◽  
Three Dimensional ◽  
Scanning Force Microscopy ◽  
Columnar Structure ◽  
Layer Growth ◽  
Buffer Layers ◽  
Structural Defects ◽  
Layer By Layer ◽  
Extended Defects ◽  
Edge Dislocations

AbstractMicrostructure and extended defects in α-GaN films grown by organometallic vapor phase epitaxy on sapphire substrates using low temperature AIN (or GaN) buffer layers have been studied using transmission electron microscopy. The types and distribution of extended defects were correlated with the film growth mode and the layer nucleation mechanism which was characterized by scanning force microscopy. The nature of the extended defects was directly related to the initial three-dimensional growth. It was found that inhomogeneous nucleation leads to a grain-like structure in the buffer; the GaN films then have a columnar structure with a high density of straight edge dislocations at grain boundaries which are less likely to be suppressed by common annihilation mechanisms. Layer-by-layer growth proceeds in many individual islands which is evidenced by the observation of hexagonal growth hillocks. Each growth hillock has an open-core screw dislocation at its center which emits monolayer-height spiral steps.

In-situ Multilayer Film Growth Characterization by Brewster Angle Reflectance Differential Spectroscopy

1993 ◽  
Vol 324 ◽  
Author(s):  
N. Dietz ◽  
D.J. Stephens ◽  
G. Lucovsky ◽  
K.J. Bachmann
Keyword(s):  
Optical Constants ◽  
Multilayer Film ◽  
Film Growth ◽  
Polarized Light ◽  
Layer Growth ◽  
Brewster Angle ◽  
Film Deposition ◽  
In Situ Monitoring ◽  
Differential Spectroscopy

AbstractBrewster Angle Reflectance Differential Spectroscopy (BARDS) has been proposed as an optical method for real-time characterization of the growth of thin films. BARDS is based on changes in the reflectivity, Rp, of parallel (p)-polarized light incident at, or near, the Brewster angle of the substrate material. Changes in R are sufficiently large to monitor layer growth, and to determine the thickness and the optical constants of the deposited film. In this paper we extend the method to multilayer film deposition. The derivative properties of R are correlated with differences in the optical constants of the two materials, and with the sharpness of their interface. We present spectra for SiO2/Si3N4/SiO2/Si, demonstrating some of these aspects of this new and effective approach to in-situ monitoring.

An Investigation of PT/PT (111) Homoepitaxy with Molecular Dynamics Simulation and Static-Energy Calculation.

1993 ◽  
Vol 317 ◽  
Author(s):  
Ruoping wang ◽  
Bryan S. Kalp ◽  
Kristen A. Fichthorn
Keyword(s):  
Molecular Dynamics ◽  
Molecular Dynamics Simulation ◽  
Film Growth ◽  
Effective Medium Theory ◽  
Layer Growth ◽  
Dynamics Simulation ◽  
Energy Calculation ◽  
Layer By Layer ◽  
Static Energy ◽  
Step Edges

ABSTRACTWe present the results of a study of Pt/Pt (111) epitaxial thin-film growth with Molecular-dynamics simulation and static-energy calculation. Interatomic forces are modeled with Corrected-Effective-Medium theory. Atomic details of deposition, such as dissipation of the kinetic energy of an impinging gas atom, adatom motion on and approaching descending step edges, effects of the geometry of a step edge on the interlayer transport of adatoms, etc., have been intensively investigated. We have observed a novel mechanism for adatom incorporation into descending-step edges which involves a concerted motion of the adatom and edge atoms. Our study supports the “island size and shape” model which has been proposed to explain the reentrant layer-by-layer growth mode seen experimentally in Pt/Pt (111) homoepitaxy.

Comparative Study on in-situ Ellipsometric Monitoring of III-Nitride Film Growth via Plasma-Enhanced Atomic Layer Deposition

2019 ◽  
Vol 28 (03n04) ◽  
pp. 1940020
Author(s):  
Adnan Mohammad ◽  
Deepa Shukla ◽  
Saidjafarzoda Ilhom ◽  
Brian Willis ◽  
Ali Kemal Okyay ◽  
...  
Keyword(s):  
Growth Rate ◽  
Real Time ◽  
Film Growth ◽  
Atomic Layer ◽  
Layer Growth ◽  
In Situ Monitoring ◽  
Rf Plasma ◽  
Nitride Film ◽  
The Impact

In this paper a comparative in-situ ellipsometric analysis is carried out on plasma-assisted ALD-grown III-nitride (AlN, GaN, and InN) films. The precursors used are TMA, TMG, and TMI for AlN, GaN, and InN respectively, while Ar is used as purge gas. For all of the films N2/H2/Ar plasma was used as the co-reactant. The work includes real-time in-situ monitored saturation curves, unit ALD cycle analysis, and >500 cycle film growth runs. In addition, the films are grown at different substrate temperatures to observe the impact of temperature not only on the growth rate but on how it influenced the precursor chemisorption, ligand removal, and nitrogen incorporation surface reactions. All three nitride films confirm fairly linear growth character. The growth rate per cycle (GPC) for each film is also measured with respect to rf-plasma power to obtain the surface saturation conditions during ALD growth. The real-time in-situ monitoring of the film growth can really be beneficial to understand the atomic layer growth and film formation in each individual ALD cycle.

scholarly journals Multilayer Self-Assemblies as Electronic and Optical Materials

1997 ◽  
Vol 488 ◽  
Author(s):  
DeQuan Li ◽  
M. Lütt ◽  
Xiaobo Shi ◽  
M. R. Fitzsimmons
Keyword(s):  
Thin Film ◽  
Self Assembly ◽  
Film Growth ◽  
Building Blocks ◽  
Layer Growth ◽  
The Self ◽  
Growth Surface ◽  
Layer By Layer ◽  
Self Assembled ◽  
Average Electron

AbstractThe layer-by-layer growth of film structures consisting of sequential depositions of oppositely charged polymers and macrocycles (ring-shaped molecules) have been constructed using molecular self-assembly techniques. These self-assembled thin films were characterized with X-ray reflectometry, which yielded (1) the average electron density, (2) the average thicknesses, and (3) the roughness of the growth surface of the self-assembled multilayer of macrocycles and polymers. These observations suggest that inorganic-organic interactions play an important role during the initial stages of thin-film growth, but less so as the thin film becomes thicker. Optical absorption techniques were also used to characterize the self-assembled multilayers. Phorphyrin and phthalocyanine derivatives were chosen as the building blocks of the self-assembled multilayers because of their interesting optical properties.

Oxygen Pressure Dependence of Morphology of Morphology of La2-xSrxCuO4 Ultra-Thin Films

1997 ◽  
Vol 11 (21n22) ◽  
pp. 981-987
Author(s):  
H. Q. Yin ◽  
T. Arakawa ◽  
Y. Kaneda ◽  
T. Yoshikawa ◽  
N. Haneji ◽  
...  
Keyword(s):  
Thin Films ◽  
Pressure Dependence ◽  
Film Growth ◽  
Ambient Pressure ◽  
High Energy ◽  
Layer Growth ◽  
Growth Mode ◽  
Layer By Layer ◽  
Island Growth ◽  
Experimental Conditions

La 2-x Sr x CuO 4 ultra-thin films with thickness 200 Å were fabricated by pulsed laser deposition method in oxygen ( O 2) atmosphere. The morphology of deposited films was investigated by reflection high energy electron diffraction (RHEED), atomic force microscopy (AFM) and scanning electronic microscopy (SEM). The strong oxygen ambient pressure dependence of film morphology was observed. In high oxygen ambient pressure, the film growth is dominated by island growth mode. The results imply that the experimental conditions of oxygen ambient pressure and substrate temperature are critical for the layer-by-layer growth mode.

Atomic Layer Growth of SiO2 on Si(100) Using the Sequential Deposition of SiCl4 and H2O

1993 ◽  
Vol 334 ◽  
Author(s):  
Ofer Sneh ◽  
Michael L. Wise ◽  
Lynne A. Okada ◽  
Andrew W. Ott ◽  
Steven M. George
Keyword(s):  
High Pressure ◽  
Film Growth ◽  
Atomic Layer ◽  
Reaction Scheme ◽  
Layer Growth ◽  
Film Deposition ◽  
Layer By Layer ◽  
High Pressure Cell ◽  
Experimental Apparatus ◽  
Binary Reaction

AbstractThis study explored the surface chemistry and the promise of the binary reaction scheme:(A) Si-OH+SiCl4 → Si-Cl + HCl(B) Si-Cl + H2O → Si-OH + HClfor controlled SiO2 film deposition. In this binary ABAB… sequence, each surface reaction may be self-terminating and ABAB… repetitive cycles may produce layer-by-layer controlled deposition. Using this approach, the growth of SiO2 thin films on Si(100) with atomic layer control was achieved at 600 K with pressures in the 1 to 50 Torr range. The experiments were performed in a small high pressure cell situated in a UHV chamber. This design couples CVD conditions for film growth with a UHV environment for surface analysis using laser-induced thermal desorption (LITD), temperature-programmed desorption (TPD) and Auger electron spectroscopy (AES). The controlled layer-by-layer deposition of SiO2 on Si(100) was demonstrated and optimized using these techniques. A stoichiometric and chlorine-free SiO2 film was also produced as revealed by TPD and AES analysis. SiO2 growth rates of approximately 1 ML of oxygen per AB cycle were obtained at 600 K. These studies demonstrate the methodology of using the combined UHV/high pressure experimental apparatus for optimizing a binary reaction CVD process.

Molecular layer-by-layer growth of SrTiO3 and BaTiO3 films by laser molecular beam epitaxy

1996 ◽  
Vol 41 (1) ◽  
pp. 134-137 ◽  
Author(s):  
T. Maeda ◽  
G.H. Lee ◽  
T. Ohnishi ◽  
M. Kawasaki ◽  
M. Yoshimoto ◽  
...  
Keyword(s):  
Molecular Beam Epitaxy ◽  
Molecular Beam ◽  
Molecular Layer ◽  
Layer Growth ◽  
Layer By Layer ◽  
Laser Molecular Beam Epitaxy

A compact UHV X-ray diffractometer for studying surfaces and interfaces

1998 ◽  
Vol 5 (3) ◽  
pp. 887-889
Author(s):  
Yoshikazu Fujii ◽  
Takeshi Nakamura ◽  
Mutsumi Kai ◽  
Kentaroh Yoshida
Keyword(s):  
High Vacuum ◽  
Layer Growth ◽  
Ultra High Vacuum ◽  
Layer By Layer ◽  
Crystal Surfaces ◽  
X Ray ◽  
Surfaces And Interfaces ◽  
Optical Table ◽  
Specimen Orientation

A compact ultra-high-vacuum (UHV) X-ray diffractometer for surface glancing X-ray scattering has been constructed. All the equipment, including a rotating-anode source of 18 kW and a UHV specimen chamber, is arranged on one optical table of dimensions 70 × 90 cm. The specimen chamber is 14 cm in diameter and 20 cm high and can be evacuated up to 3 × 10−8 Pa. It is equipped with two Be windows of thicknesses 0.2 and 0.4 mm. Specimen orientation in the vacuum is controlled from the outside. The specimen can be heated up to 773 K. The chamber has two evaporation cells and can be used for in situ observations of growing crystal surfaces. Using this instrument, we observed a mechanically polished Ag surface and successfully made an in situ observation of the layer-by-layer growth of a PbSe(111) surface. The instrument will be useful for preliminary experiments using laboratory sources, prior to final measurements at synchrotron radiation facilities.

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