Effect of Annealing and Passivation on the Electromigration and Linewidth Dependence

1995 ◽  
Vol 391 ◽  
Author(s):  
R.O. Carnes ◽  
C.H. Lee ◽  
P.T. Keating ◽  
E.M. Barrall II ◽  
B.R. York ◽  
...  
Keyword(s):  
Grain Size ◽  
Failure Modes ◽  
Preferred Orientation ◽  
Film Stress ◽  
X Ray Diffraction ◽  
Thermal Budget ◽  
Geometric Confinement ◽  
The Impact ◽  
The Relationship ◽  
Post Deposition

AbstractContinued miniaturization of conductor geometry below 0.5μm has by a concomitant decrease in Al deposition temperature, typically below 300°C. The degree of reliability exhibited by these films is strongly dependent on the grain size distribution and metallurgical configuration. This investigation focuses on the impact of post-deposition processing on changes in conductor microstructure and electromigration for films deposited at low temperature. AlCu(l%)Si(l%) was deposited at 300°C on PECVD phosphosilicate glass. The impact of post-deposition thermal budget on the as deposited grain size and distribution, preferred orientation and stress/strain states were analyzed using scanning electron microscopy, X-Ray diffraction and bending beam technique, respectively. These characteristics were also measured on unpassivated films subjected to the same thermal budget as SiO2 passivated films so that the geometric confinement and Al-SiO2 surface interaction could be quantified. Electromigration characteristics were measured for linewidths in the range W=1.0μm to W=10μm, for passivated and unpassivated films. A direct correlation between passivation and grain size was observed for both failure modes. This paper will also discuss the relationship between film stress and preferred orientation, the observed failure modes and their linewidth dependence.

Ionic conductivity in nanocrystalline Gd doped ceria

2008 ◽  
Vol 1122 ◽  
Author(s):  
Gianguido Baldinozzi ◽  
David Simeone ◽  
Dominique Gosset ◽  
Mickael Dollé ◽  
Georgette Petot-Ervas
Keyword(s):  
Grain Size ◽  
Ionic Conductivity ◽  
Sol Gel ◽  
Doped Ceria ◽  
Narrow Size Distribution ◽  
Conductivity Measurements ◽  
X Ray Diffraction ◽  
X Ray ◽  
Grain Sizes ◽  
The Impact

AbstractWe have synthesized Gd-doped ceria polycrystalline samples (5, 10, 15 %mol), having relative densities exceeding 95% and grain sizes between 30 and 160 nm after axial hot pressing (750 °C, 250 MPa). The samples were prepared by sintering nanopowders obtained by sol-gel chemistry methods having a very narrow size distribution centered at about 16 nm. SEM and X-ray diffraction were performed to characterize the sample microstructures and to assess their structures. We report ionic conductivity measurements using impedance spectroscopy. It is important to investigate the properties of these systems with sub-micrometric grains and as a function of their composition. Therefore, samples having micrometric and nanometric grain sizes (and different Gd content) were studied. Evidence of Gd segregation near the grain boundaries is given and the impact on the ionic conductivity, as a function of the grain size and Gd composition, is discussed and compared to microcrystalline samples.

Stress Modification in Tungsten Films Deposited by Ion-Assisted Evaporation

1988 ◽  
Vol 128 ◽  
Author(s):  
R. A. Roy ◽  
R. Petkie ◽  
D. S. Yee ◽  
J. Karasinski ◽  
A. Boulding
Keyword(s):  
Ion Bombardment ◽  
Film Stress ◽  
Clear Correlation ◽  
Original Structure ◽  
Qualitative Behavior ◽  
X Ray Diffraction ◽  
Ion Energy ◽  
X Ray ◽  
Impurity Model ◽  
The Relationship

ABSTRACTThe modification of film stress in evaporated tungsten was studied as a function of deposition environment. Using concurrent ion bombardment of the growing film, the stress was seen to vary systematically with ion energy, ion flux, and substrate temperature. The qualitative behavior fits the model of stress modification developed for niobium films. X-ray diffraction was used to study the structure of the films, and a clear correlation between crystallographic texture and film stress is found. The original structure/impurity model for film stress modification due to ion bombardment has been modified to account for the relationship between film stress and texture.

Characterization of Stress and Texture in Rtcvd Poly-Si Layers by X-Ray Diffraction

1991 ◽  
Vol 239 ◽  
Author(s):  
István Bársony ◽  
Jos G.E. Klappe ◽  
Tom W. Ryan
Keyword(s):  
Deposition Temperature ◽  
Polycrystalline Silicon ◽  
Columnar Structure ◽  
Film Stress ◽  
Grain Structure ◽  
X Ray Diffraction ◽  
X Ray ◽  
Residual Film ◽  
Post Deposition

ABSTRACTThe properties of polycrystalline silicon layers deposited by RTCVD have been studied by texture, stress and electrical analyse. The intrinsic layers intended for applications in integrated IC processing are very much textured with the preferred orientation depending on deposition temperature and atmosphere. Very low residual film stress in the order of 10 dyn/cm2 was detected, and a transition from compressive to tensile stress with increasing deposition temperature around 800°C was observed. This was associated with the development of the columnar structure by the (110) orientation becoming dominant at the expense of the (100) texture. Also the effect of post-deposition anneal ambience on the grain structure has been studied. Grain size and grain-boundary trapping in after doped layers have been evaluated in P-implanted RTA activated layers.

Measuring Residual and Applied Stress using X-Ray Diffraction on Materials with Preferred Orientation and Large Grain Size

1992 ◽  
Vol 36 ◽  
pp. 585-593
Author(s):  
James Pineault ◽  
Michael Brauss
Keyword(s):  
Grain Size ◽  
Stress Measurement ◽  
Preferred Orientation ◽  
Polycrystalline Materials ◽  
X Ray Diffraction ◽  
X Ray ◽  
Common Solution ◽  
Virtual Window ◽  
The Common ◽  
Comparison Of The Results

AbstractOne of the most difficult tasks in applied and residual stress measurement of polycrystalline materials using x-ray diffraction is dealing with preferred orientation and large grain size.A common solution to large grain size problems has been to choose a larger aperture, but in certain cases this is undesirable and/or impossible. When preferred orientation has been identified as the problem, the common approach has been to choose another diffraction plane or oscillate the x-ray diffraction head during data collection. Remedies such as these can distort the peak breadth and are often not sufficient to totally negate the grain size and preferred orientation effects.A technique described as the “step scan with virtual window” has been developed jointly at MTL (formerly Canmet) and Proto Mfg. Ltd. to deal specifically with the aforementioned effects of grain size and preferred orientation.This paper highlights some of the problems that arise in stress analysis of materials exhibiting preferred orientation and large grain size. Subsequently a comparison of the results obtained using standard diffraction technique, oscillation and the “step scan with virtual window” is made.

A STUDY OF MICROCRYSTALLINITY OF Pd3Si DURING THE CRYSTALLIZATION OF AMORPHOUS Pd80Si20 BY X-RAY DIFFRACTION

1989 ◽  
Vol 03 (04) ◽  
pp. 313-318
Author(s):  
K.Q. XIAO ◽  
Y.D. DONG ◽  
Y.Z. HE
Keyword(s):  
Grain Size ◽  
Electrical Resistivity ◽  
Metallic Glass ◽  
Sharp Increase ◽  
Lattice Strain ◽  
Preferred Orientation ◽  
Strain Variation ◽  
X Ray Diffraction ◽  
X Ray

The origin of Pd 3 Si grain size and lattice strain variation during the crystallization of Pd 80 Si 20 metallic glass was discussed. A correlation between the preferred orientation of grains and the sharp increase of grain size was analyzed. Results also show that the change of electrical resistivity was very sensitive to that of the grain size.

Effects of La-Dopant on Phase, Microstructure and Dielectric Properties of Bi4Ti3O12 Ceramics

2010 ◽  
Vol 93-94 ◽  
pp. 251-254 ◽  
Author(s):  
Pasinee Siriprapa ◽  
Anucha Watcharapasorn ◽  
Sukanda Jiansirisomboon
Keyword(s):  
Dielectric Constant ◽  
Grain Size ◽  
Dielectric Properties ◽  
Solid State ◽  
Diffraction Analysis ◽  
Solid State Reaction ◽  
Preferred Orientation ◽  
X Ray Diffraction ◽  
Conventional Solid State Reaction ◽  
X Ray

Bi4-xLaxTi3O12 (where x = 0, 0.25, 0.50, 0.75 and 1) powders and ceramics were prepared using conventional solid state reaction and sintering procedures. The calcination was carried out at 750 °C for 4 h and sintering was done at 1150 °C for 4 h. The density of all ceramics was found to be comparable regardless of La concentration. X-ray diffraction analysis showed that preferred orientation of ceramic grains was reduced with addition of La ions. This reduced preferred orientation was accompanied by a decrease in grain size. The temperature dependence of dielectric constant showed a decrease in Tc with increasing La concentration.

Investigations on Ni-Mo Alloy Microstructure with Mo Atom Content

2011 ◽  
Vol 230-232 ◽  
pp. 1093-1098
Author(s):  
Ning Li ◽  
Cheng Hui Gao ◽  
Guang Ming Cheng
Keyword(s):  
Grain Size ◽  
Electron Microscope ◽  
Crystal Defects ◽  
X Ray Diffraction ◽  
Tiny Particle ◽  
Amorphous Content ◽  
Transmission Electron ◽  
Mo Content ◽  
The Relationship ◽  
Basement Surface

Using X-ray diffraction (XRD), scanning electron microscope (SEM) and transmission electron microscope (TEM) to describe the relationship between Mo content and the amorphous content in deposites from the effects of the molybdate concentration on microstructure, phase content and morphology of the deposits. It is found when the Mo content is low to 18at.%, the deposits are composed of nanocrystalline main phases and the grain size is below 10nm with tiny particle at the basement surface. When Mo in 18~33at.%, the deposits are composed of amorphous phase up to more than 60wt.% proportion, and the grain size of the nanocrystalline existing in the deposits is stability of 3~10nm with tiny particle and well-distribution of the basement surface. When Mo content is exceeding 33at.%, the deposits performance is of the crystalline properties with more crystal defects in the coating.

Nanoscale Design of Adaptive Tribological Coatings

2008 ◽  
Author(s):  
Liming Pan ◽  
Ben Dawson ◽  
Jacqueline Krim ◽  
Colin Baker ◽  
James Pearson ◽  
...  
Keyword(s):  
Grain Size ◽  
Surface Region ◽  
Film Stress ◽  
Surface Topology ◽  
Scanning Tunneling ◽  
Great Promise ◽  
Tunneling Microscopy ◽  
Scaling Properties ◽  
Wear Rates ◽  
The Impact

We report a joint theoretical and experimental study of the tribological properties of gold-yttrium stabilized zirconia (YSZ) based nanocomposite coatings, with a focus on the role of nanocrystalline grain size. Nanocomposites hold great promise for space and ambient applications, on account of their ability to adapt to and exhibit low friction and wear rates in constantly varying environmental conditions. Their internal structure has been the topic of prior literature, but the impact of grain size on tribological performance has heretofore not been considered, and the surface topology has not been reported. As such, we have performed both experimental and theoretical studies, to model the impact of grain size on film stress and wear attributes, and to document surface region grain size distributions through scanning tunneling microscopy (STM) measurements of self-affine fractal scaling properties. Nanocrystalline gold crystal sizes, as determined from STM and x-ray diffraction (XRD) data are consistent with those inferred from high resolution transmission electron microscopy (HRTEM) measurements. Our modeling results associate smaller grain sizes with lower wear rates, consistent with experiments. The findings show promise for nanoscale customization of coatings so as to tailor them at the nanoscale in an application specific manner.

Effect of Cu on the Microstructure and the Property of Al-Ce-Ni-Cu Amorphous Nanocomposite Materials

2012 ◽  
Vol 624 ◽  
pp. 248-251
Author(s):  
Hong Wei Zhang ◽  
Can Bang Zhang ◽  
Li Li Zhang ◽  
Feng Rui Zhai ◽  
Jia Jin Tian
Keyword(s):  
Thermal Stability ◽  
Differential Scanning Calorimetry ◽  
Grain Size ◽  
Annealing Temperature ◽  
Nanocomposite Materials ◽  
X Ray Diffraction ◽  
Scanning Calorimetry ◽  
Nano Composite ◽  
X Ray ◽  
The Relationship

Preparing amorphous alloy of Al87Ce3Ni10-xCux（x=0,1,3,5）with single roller spin quenching technology, after annealing the alloy for 20 minutes at 180 degrees Celsius, 200 degrees Celsius, 220 degrees Celsius and 240 degrees Celsius, and then the nanocomposites can be obtained. he microhardness of amorphous nano-composite materials are measured .The microstructure, grain size of , thermal stability, midrohardness are related with the annealing temperature and the composition of alloy, and studying the relationship between them by X-ray diffraction (XRD) and differential scanning calorimetry (DSC).The present results indicated that with the increase of the content of Cu, the grain size of decreases, the increasing of the microhardness is due to the grain refinement: with the increase of the content of Cu, precipitation temperature of moves to low, which is helpful for the precipitation of phase.

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