The Necessity of RTCVD in Advanced Epitaxial Growth of Si and SiGe

1995 ◽  
Vol 387 ◽  
Author(s):  
W. B. De Boer ◽  
M. J.J. Theunissen ◽  
R. H. J. Van Der Linden

AbstractDevice-quality epi material can be grown at temperatures ranging from 600 to 800°C in commercially available production reactors. The exceptionally steep transitions of Ge, B and, to a lesser extent, P, are characteristics of Si and strained SiGe epi growth from dichlorosilane and germane in hydrogen ambient at atmospheric or reduced pressure. Although the growth rates depend on the dopant gas flows at low temperatures, layer thickness and doping level control is excellent. Selective multilayer growth at reduced pressure seems a viable process and can be applied in e.g. HBT's.In spite of the fact that a lot of the progress in low-temperature epitaxy has been made in lampheated reactors, it is argued that RTP is not needed for low-temperature epitaxy. This is in contrast to conventional (high-temperature) epitaxy where RTP is becoming indispensable. Real RTP, heating and cooling the wafer in just a couple of seconds, would improve the throughput of the present generation single wafer epi reactors tremendously and seems feasible.

CrystEngComm ◽  
2019 ◽  
Vol 21 (22) ◽  
pp. 3409-3414 ◽  
Author(s):  
Paul Alexander Vermeulen ◽  
Jamo Momand ◽  
Bart Jan Kooi

Single-crystal like WTe2 films are grown by exploiting van der Waals epitaxy at low temperatures, using pulsed laser deposition.


Energies ◽  
2021 ◽  
Vol 14 (17) ◽  
pp. 5398
Author(s):  
Birol Kılkış ◽  
Malik Çağlar ◽  
Mert Şengül

This paper addresses the challenges the policymakers face concerning the EU decarbonization and total electrification roadmaps towards the Paris Agreement set forth to solve the global warming problem within the framework of a 100% renewable heating and cooling target. A new holistic model was developed based on the Rational Exergy Management Model (REMM). This model optimally solves the energy and exergy conflicts between the benefits of using widely available, low-temperature, low-exergy waste and renewable energy sources, like solar energy, and the inability of existing heating equipment, which requires higher exergy to cope with such low temperatures. In recognition of the challenges of retrofitting existing buildings in the EU stock, most of which are more than fifty years old, this study has developed a multi-pronged solution set. The first prong is the development of heating and cooling equipment with heat pipes that may be customized for supply temperatures as low as 35 °C in heating and as high as 17 °C in cooling, by which equipment oversizing is kept minimal, compared to standard equipment like conventional radiators or fan coils. It is shown that circulating pump capacity requirements are also minimized, leading to an overall reduction of CO2 emissions responsibility in terms of both direct, avoidable, and embodied terms. In this respect, a new heat pipe radiator prototype is presented, performance analyses are given, and the results are compared with a standard radiator. Comparative results show that such a new heat pipe radiator may be less than half of the weight of the conventional radiator, which needs to be oversized three times more to operate at 35 °C below the rated capacity. The application of heat pipes in renewable energy systems with the highest energy efficiency and exergy rationality establishes the second prong of the paper. A next-generation solar photo-voltaic-thermal (PVT) panel design is aimed to maximize the solar exergy utilization and minimize the exergy destruction taking place between the heating equipment. This solar panel design has an optimum power to heat ratio at low temperatures, perfectly fitting the heat pipe radiator demand. This design eliminates the onboard circulation pump, includes a phase-changing material (PCM) layer and thermoelectric generator (TEG) units for additional power generation, all sandwiched in a single panel. As a third prong, the paper introduces an optimum district sizing algorithm for minimum CO2 emissions responsibility for low-temperature heating systems by minimizing the exergy destructions. A solar prosumer house example is given addressing the three prongs with a heat pipe radiator system, next-generation solar PVT panels on the roof, and heat piped on-site thermal energy storage (TES). Results showed that total CO2 emissions responsibility is reduced by 96.8%. The results are discussed, aiming at recommendations, especially directed to policymakers, to satisfy the Paris Agreement.


1857 ◽  
Vol 3 ◽  
pp. 90
Author(s):  
W. J. Macquorn Rankine

The experiments of M. Regnault having been made by introducing water at a high temperature from a boiler into a calorimeter, containing water at a low temperature, and power exercised by the steam in the boiler in expelling the water was converted into heat by fluid friction, thus producing a rise of temperature in the calorimeter, for which allowance ought to be made in calculating the specific heat of liquid water from each experiment. Mr Joule's determination of the dynamical value of the specific heat of liquid water at low temperatures affords the means of calculating the correction required in each case.


Author(s):  
F. H. Louchet ◽  
L. P. Kubin

Experiments have been carried out on the 3 MeV electron microscope in Toulouse. The low temperature straining holder has been previously described Images given by an image intensifier are recorded on magnetic tape.The microtensile niobium samples are cut in a plane with the two operative slip directions [111] and lying in the foil plane. The tensile axis is near [011].Our results concern:- The transition temperature of niobium near 220 K: at this temperature and below an increasing difference appears between the mobilities of the screw and edge portions of dislocations loops. Source operation and interactions between screw dislocations of different slip system have been recorded.


Alloy Digest ◽  
2008 ◽  
Vol 57 (1) ◽  

Abstract Invar is an Fe-Ni alloy with 36% Ni content that exhibits the lowest expansion of known metals from very low temperatures up to approximately 230 deg C (445 deg F). Invar M93 is a cryogenic Invar with improved weldability. This datasheet provides information on composition, physical properties, hardness, elasticity, tensile properties, and shear and bend strength as well as fracture toughness and fatigue. It also includes information on low temperature performance as well as forming and joining. Filing Code: FE-143. Producer or source: Metalimphy Precision Alloys.


2020 ◽  
Vol 96 (3s) ◽  
pp. 392-395
Author(s):  
В.А. Бутузов ◽  
А.Е. Назаренко ◽  
Н.Ю. Дмитриев ◽  
В.А. Трофимов ◽  
В.А. Косевский ◽  
...  

Представлены результаты разработки цифрового изолятора на основе интегрального микротрансформатора в специализированном корпусе, выполненном по технологии низкотемпературной совместно обжигаемой керамики (LTCC). Согласно результатам измерений тестовых образцов максимальная скорость передачи данных разработанного цифрового изолятора - не менее 30 Мбит/с. The paper presents the results of the development of a digital insulator based on an integral microtransformer in a specialized package made in technology of low-temperature co-fired ceramics. The isolator is a microassembly consisting of a transceiver chip and an integrated transformer. According to the test results, the maximum data rate speed of the developed digital insulator is not less than 30 Mbit/s.


2020 ◽  
Vol 96 (3s) ◽  
pp. 148-153
Author(s):  
С.Д. Федотов ◽  
А.В. Бабаев ◽  
В.Н. Стаценко ◽  
К.А. Царик ◽  
В.К. Неволин

Представлены результаты изучения морфологии поверхности и структуры слоев AlN, сформированных аммиачной МЛЭ на темплейтах 3C-SiC/Si(111) on-axis- и 4° off-axis-разориентации. Опробован технологический режим низкотемпературной эпитаксии зародышевого слоя AlN на поверхности 3C-SiC(111). Среднеквадратичная шероховатость поверхности (5 х 5 мкм) слоев AlN толщиной 150 ± 50 нм составила 2,5-3,5 нм на темплейтах 3C-SiC/Si(111) on-axis и 3,3-3,5 нм на 4° off-axis. Показано уменьшение шероховатости смачивающего слоя AlN при изменении скорости роста. Получены монокристаллические слои AlN(0002) со значениями FWHM (ω-геометрия) 1,4-1,6°. The paper presents the surface morphology and crystal structure of AlN layers formed by ammonia MBE on 3C-SiC/Si(111) on-axis and 4° off-axis disorientation. It offers the technological approach of low-temperature epitaxy of the AlN nucleation layer on the 3C-SiC (111) surface. Root mean square roughness (5 х 5 |xm) of AlN layers with thickness of 150 ± 50 nm was 2,5-3,5 nm onto on-axis templates and 3.3-3.5 nm onto 4° off-axis. It appears that the RMS roughness of the AlN surface is changing with the growth rate variation. Single-crystal AlN(0002) layers with FWHM values (ω-geometry) of 1.4-1.6° have been obtained.


Nanomaterials ◽  
2020 ◽  
Vol 11 (1) ◽  
pp. 28
Author(s):  
Anastasios I. Tsiotsias ◽  
Nikolaos D. Charisiou ◽  
Ioannis V. Yentekakis ◽  
Maria A. Goula

CO2 methanation has recently emerged as a process that targets the reduction in anthropogenic CO2 emissions, via the conversion of CO2 captured from point and mobile sources, as well as H2 produced from renewables into CH4. Ni, among the early transition metals, as well as Ru and Rh, among the noble metals, have been known to be among the most active methanation catalysts, with Ni being favoured due to its low cost and high natural abundance. However, insufficient low-temperature activity, low dispersion and reducibility, as well as nanoparticle sintering are some of the main drawbacks when using Ni-based catalysts. Such problems can be partly overcome via the introduction of a second transition metal (e.g., Fe, Co) or a noble metal (e.g., Ru, Rh, Pt, Pd and Re) in Ni-based catalysts. Through Ni-M alloy formation, or the intricate synergy between two adjacent metallic phases, new high-performing and low-cost methanation catalysts can be obtained. This review summarizes and critically discusses recent progress made in the field of bimetallic Ni-M (M = Fe, Co, Cu, Ru, Rh, Pt, Pd, Re)-based catalyst development for the CO2 methanation reaction.


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