Characterization of Multilayer Thin Film Structures for Gas Sensor Applications
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ABSTRACTA nicrofabricated silicon-based chemical gas sensor with a discontinuous film of Pt / TiOx, as the active sensing component has been characterized by atomic force microscopy, environmental scanning electron microscopy, and transmission electron microscopy. A study of the device's multilayer structure and of the thin sensing film is undertaken to understand and control the sensing properties of the metal / semiconducting materials. The purpose of this research is to advance the understanding of the conduction mechanism and provide a basis for optimizing the sensing properties and microstructure of the sensing device.
2002 ◽
Vol 46
(1-2)
◽
pp. 431-438
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2014 ◽
Vol 20
(2)
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pp. 366-375
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2007 ◽
Vol 336-338
◽
pp. 405-408
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