Correlation Between Plasma Excited States and Thin Film Characteristics in He-SiH4 PECVD

1984 ◽  
Vol 38 ◽  
Author(s):  
A. Ricard ◽  
Y. Chouan ◽  
D. Collobert

AbstractThe excited states of He-5 % SiH4 PECVD have been analysed by emission and absorption spectroscopy.Variations of spectral line intensities and He(23S) metastable densities have been correlated to the SiH over SiH2 bond ratio and to the deposition speed.The best correlation has been found with the He excited states, specially He(23S) metastables : SiH films without SiH2 bonds have been obtained when the He(23S) densities reach a minimum value.

1976 ◽  
Vol 32 ◽  
pp. 343-349
Author(s):  
Yu.V. Glagolevsky ◽  
K.I. Kozlova ◽  
V.S. Lebedev ◽  
N.S. Polosukhina

SummaryThe magnetic variable star 21 Per has been studied from 4 and 8 Å/mm spectra obtained with the 2.6 - meter reflector of the Crimean Astrophysical Observatory. Spectral line intensities (Wλ) and radial velocities (Vr) have been measured.


2006 ◽  
Vol 35 (8) ◽  
pp. 942-943 ◽  
Author(s):  
Kazuo Takimiya ◽  
Katsuhiro Sakamoto ◽  
Tetsuo Otsubo ◽  
Yoshihito Kunugi

1993 ◽  
Vol 230 (2) ◽  
pp. 209-216 ◽  
Author(s):  
Norihisa Mino ◽  
Kazufumi Ogawa ◽  
Takatoshi Minoda ◽  
Masahiro Takatsuka ◽  
Seimei Sha ◽  
...  

2011 ◽  
Vol 97 (3) ◽  
pp. 189-224 ◽  
Author(s):  
A.K. Bhatia ◽  
E. Landi

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