Electrophotographic Patterning of a-Si:H

1995 ◽  
Vol 377 ◽  
Author(s):  
H. Gleskova ◽  
S. Wagner ◽  
D. S. Shen
Keyword(s):  
Liquid Crystal ◽  
Amorphous Silicon ◽  
Liquid Crystal Displays ◽  
Active Matrix ◽  
Laser Printing ◽  
Matrix Liquid ◽  
First Time ◽  
Thick Glass ◽  
Printing Method

ABSTRACTA novel laser-printing method for the manufacturing of the backplane circuits of active-matrix liquid-crystal displays (AMLCD) is proposed and demonstrated. Xerographic toner is used as an etch mask for amorphous silicon (a-Si:H) and for the seeding of metal lines. We also demonstrate for the first time the direct-print patterning of silicon on ∼ 50 μm thick glass foil.

Large Scale and Large Area Amorphous Silicon Thin Film Transistor Arrays for Active Matrix Liquid Crystal Displays

1987 ◽  
Vol 95 ◽  
Author(s):  
H. Miki ◽  
S. Kawamoto ◽  
T. Horikawa ◽  
T. Maejima ◽  
H. Sakamoto ◽  
...  
Keyword(s):  
Thin Film ◽  
Liquid Crystal ◽  
Amorphous Silicon ◽  
Etching Rate ◽  
Thin Film Transistor ◽  
Liquid Crystal Displays ◽  
Silicon Nitride Film ◽  
Silicon Thin Film ◽  
Active Matrix ◽  
Matrix Liquid

AbstractThe preparation and properties of hydrogenated amorphous silicon thin film transistor arrays for active matrix liquid crystal displays are reported. The effect of amorphous silicon film preparation conditions on the field effect mobility of thin film transistors was investigated. The dry etching rate of silicon nitride film was studied.The thin film transistor arrays have 408 ˜ 640 transistors on the first version and 450 ˜ 640 ˜ 3 transistors on the second version. The liquid crystal panel fabricated using the first version arrays showed good characteristics.

Illuminators based on composite LEDs for multifunctional high-luminance active-matrix liquid-crystal displays

2011 ◽  
Vol 78 (7) ◽  
pp. 444 ◽  
Author(s):  
V. A. Bol’shukhin ◽  
V. S. Ilyasov ◽  
N. P. Soshchin ◽  
V. N. Ulasyuk
Keyword(s):  
Liquid Crystal ◽  
Liquid Crystal Displays ◽  
High Luminance ◽  
Active Matrix ◽  
Matrix Liquid
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