Chemistry and Deposition Driven by Monoenergetic Synchrotron Radiation: Initial Studies of Condensed Silanes and Water on Noble Metals
Keyword(s):
The Core
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AbstractWe extend previous work in broadband synchrotron radiation (SR) excitation of condensed multilayers to the study of reactions driven by monoenergetic SR. The long term goal of this work is to understand the importance of core-level excitation on the reactions that lead to materials growth. Results are presented for two systems of interest: formation of silica from Si(CH3)4 and H20 mixtures with 90 eV irradiation (below the core levels) and the energy dependence of the reaction of SiH4 and H2O.