Local Texture and Electromigration in Fine Line Microelectronic Aluminum Metallization

1994 ◽  
Vol 343 ◽  
Author(s):  
J. L. Hurd ◽  
K. P. Rodbell ◽  
D. B. Knorr ◽  
N. L. Koligman
Keyword(s):  
Electron Backscatter Diffraction ◽  
Fiber Texture ◽  
X Ray Diffraction ◽  
Aluminum Films ◽  
Pole Figures ◽  
Grain Orientations ◽  
Aluminum Metallization ◽  
Backscatter Diffraction ◽  
Relationship Of ◽  
The Relationship

ABSTRACTAluminum films 1 μm thick were deposited on oxidized silicon by sputtering and partially ionized beam evaporation to vary the crystallographic texture. These films were patterned into lines and subsequently annealed at 400 °C for 1 h. A strong correlation between the electromigration behavior and the blanket film texture (X-ray diffraction (XRD) / pole figures) has been reported previously for these films. In this work, an Electron Backscatter Diffraction (EBSD) a.k.a. Backscatter Kikuchi Diffraction (BKD) technique was employed using a scanning electron microscope (SEM) to interrogate individual grain orientations. BKD pole figures were acquired for lines ≥0.3 μm wide and for blanket (pad) regions. Identical, inverse pole figures were found for blanket films measured using both XRD and BKD (pads). Furthermore, the BKD (111) fiber texture shows a line width dependency, with narrow lines having a slightly improved texture over blanket (pad) regions. Local grain orientations were investigated near and within electromigration testing sites with characteristic void and hillock morphologies. The relationship of neighboring grain orientations to electromigration damage is shown.

Preferred Orientation, Grain Sizes and Grain Boundaries of Chalcopyrite-Type Thin Films

2007 ◽  
Vol 1012 ◽  
Author(s):  
Daniel Abou-Ras ◽  
Melanie Nichterwitz ◽  
Christian A. Kaufmann ◽  
Susan Schorr ◽  
Hans-Werner Schock
Keyword(s):  
Thin Films ◽  
Grain Boundaries ◽  
Electron Backscatter Diffraction ◽  
Fiber Texture ◽  
Distribution Functions ◽  
X Ray Diffraction ◽  
Grain Sizes ◽  
Grain Orientations ◽  
Grain Size Distributions ◽  
Backscatter Diffraction

AbstractChalcopyrite-type thin films - CuInS2, CuInSe2, CuGaSe2, and Cu(In,Ga)Se2 - in various completed solar cells were studied in cross-section by means of electron-backscatter diffraction (EBSD). Valuable information on grain sizes, local grain orientations, film textures, and grain boundaries were extracted from the EBSD linescans and maps. The grain-size distributions from the chalcopyrite-type thin films can be represented well by lognormal distribution functions. The EBSD measurements on CuGaSe2 thin film reveal a <110> fiber texture, in good agreement with x-ray diffraction texture analysis performed on the same sample. The EBSD maps from all samples studied exhibit considerable twinning in the chalcopyrite-type thin films. Indeed, the most frequent types of grain boundaries in these thin films are (near) Σ3 60°-<221> and 71°-<110> twins. It is shown that rotational 180°-<221> twins (which are symmetrically equivalent to 71°-<110>) are more frequently found than anion- or cation-terminated 60°-<221> twin boundaries.

Plagioclase twins in a basalt: an electron backscatter diffraction study

2016 ◽  
Vol 49 (6) ◽  
pp. 2145-2154 ◽  
Author(s):  
Chang Xu ◽  
Shan-Rong Zhao ◽  
Chuan Li ◽  
Xu He
Keyword(s):  
Alkali Basalt ◽  
Microprobe Analysis ◽  
Electron Backscatter Diffraction ◽  
Subsequent Transformation ◽  
Pole Figures ◽  
Growth History ◽  
Electron Backscatter ◽  
Crystallization Conditions ◽  
Backscatter Diffraction ◽  
The Relationship

Twins in plagioclase, which are abundant in rocks, have important implications for the growth history and subsequent transformation. There are many twin laws in plagioclase and some of them are difficult to identify. This paper presents an electron backscatter diffraction (EBSD) analysis combined with electron microprobe analysis of plagioclase twinning in the Niutoushan alkali basalt. Theoretical pole figures of 12 different twin laws for plagioclase were generated. By comparing the pole figures obtained from EBSD with the theoretical ones, 11 twin laws have been identified in the alkali basalt, and their frequency has also been determined: Albite (28%), Carlsbad (25%), Albite–Carlsbad (34%), Pericline (3%), Ala (2%), Manebach (1%), Albite–Ala (1%), Prism {110} (2%), Prism {1\bar 10} (1%), Prism {130} (1%) and Prism {1\bar 30} (1%). All the plagioclase twins in the alkali basalt are growth twins. The anorthite content of the plagioclase has a negative correlation with the frequency of the Pericline and Albite twin laws but a positive correlation with the frequency of all the other twin laws, which is consistent with previous results. The theoretical pole figures of twin laws for plagioclase introduced in this paper can be applied to investigating plagioclase twin laws in all plagioclase-bearing rocks, and the relationship between twin pattern and crystallization conditions of the rocks can be established.

ECCI, EBSD and EPSC characterization of rhombohedral twinning in polycrystalline α-alumina deformed in a D-DIA apparatus

2017 ◽  
Vol 50 (6) ◽  
pp. 1691-1704 ◽  
Author(s):  
Shirin Kaboli ◽  
Pamela C. Burnley
Keyword(s):  
Electron Backscatter Diffraction ◽  
X Ray Diffraction ◽  
Contrast Imaging ◽  
Twin Boundaries ◽  
Experimental Conditions ◽  
Polycrystalline Alumina ◽  
Orientation Mapping ◽  
Pole Figures ◽  
Backscatter Diffraction ◽  
Critical Resolved Shear Stress

Rhombohedral twinning in alumina (aluminium oxide, α-Al2O3) is an important mechanism for plastic deformation under high-temperature–pressure conditions. Rhombohedral twins in a polycrystalline alumina sample deformed in a D-DIA apparatus at 965 K and 4.48 GPa have been characterized. Three classes of grains were imaged, containing single, double and mosaic twins, using electron channeling contrast imaging (ECCI) in a field emission scanning electron microscope. These twinned grains were analyzed using electron backscatter diffraction (EBSD). The methodology for twin identification presented here is based on comparison of theoretical pole figures for a rhombohedral twin with experimental pole figures obtained with EBSD crystal orientation mapping. An 85°〈02{\overline 2}1〉 angle–axis pair of misorientation was identified for rhombohedral twin boundaries in alumina, which can be readily used in EBSD post-processing software to identify the twin boundaries in EBSD maps and distinguish the rhombohedral twins from basal twins. Elastic plastic self-consistent (EPSC) modeling was then used to model the synchrotron X-ray diffraction data from the D-DIA experiments utilizing the rhombohedral twinning law. From these EPSC models, a critical resolved shear stress of 0.25 GPa was obtained for rhombohedral twinning under the above experimental conditions, which is internally consistent with the value estimated from the applied load and Schmid factors determined by EBSD analysis.

β-Ca11B2Si4O22: six-fold twinning, crystal structure and thermal expansion

2018 ◽  
Vol 233 (6) ◽  
pp. 379-390 ◽  
Author(s):  
Sergey N. Volkov ◽  
Valentina A. Yukhno ◽  
Rimma S. Bubnova ◽  
Vladimir V. Shilovskikh
Keyword(s):  
Crystal Structure ◽  
Thermal Expansion ◽  
High Temperature ◽  
Electron Backscatter Diffraction ◽  
Monoclinic Structure ◽  
X Ray Diffraction ◽  
X Ray ◽  
Electron Backscatter ◽  
Backscatter Diffraction ◽  
Relationship Of

Abstract The low-temperature polymorph β-Ca11B2Si4O22 crystallizes as a monoclinic structure [space group is P21/c, a=14.059(9), b=6.834(5), c=10.597(7) Å, β=100.735(8)°]. The crystal investigated by single-crystal X-ray diffraction was a twin composed of six individuals. The crystal structure is similar to that of mineral spurrite, Ca5(SiO4)2CO3, and can be described as a framework of [CaO5] and [CaO6] polyhedra, the cavities of which are filled with [SiO4] and [BO3] groups. The orientation relationship of twin domains was investigated by electron backscatter diffraction (EBSD). Thermal expansion was studied by high-temperature X-ray powder diffraction. It is slightly anisotropic: α11=10, α22=16, α33=12×10−6°C−1 at 200°C.

Textured α-Alumina through Electrophoretic Deposition and Templated Grain Growth

2009 ◽  
Vol 412 ◽  
pp. 261-266
Author(s):  
Li Zhang ◽  
Anand Krishna Kanjarla ◽  
Jef Vleugels ◽  
Omer Van der Biest
Keyword(s):  
Grain Growth ◽  
Electrophoretic Deposition ◽  
Electron Backscatter Diffraction ◽  
Fiber Texture ◽  
X Ray Diffraction ◽  
Templated Grain Growth ◽  
Fine Grained ◽  
Alumina Particles ◽  
Deposition Electrode ◽  
Backscatter Diffraction

The development of texture was studied during electrophoretic deposition in alumina suspensions containing plate shaped alumina particles. The mechanism of platelet orientation during EPD was examined with respect to the influence of the electric field, gravity and hydrodynamic forces. This was realized by using two different deposition cells, with vertically or horizontally positioned deposition electrode. The texture of the green deposit was further enhanced during sintering by templated grain growth in which the platelet shaped alumina particles were growing at the expense of the fine grained matrix. The sharp ‘fiber texture’ obtained after templated grain growth during sintering of the deposit was characterized by means of x-ray diffraction and Electron Backscatter Diffraction (EBSD).

Texture and Microstructure Effects on Electromigration Behavior of Aluminum Metallization

1991 ◽  
Vol 225 ◽  
Author(s):  
D. B. Knorr ◽  
K. P. Rodbell ◽  
D. P. Tracy
Keyword(s):  
Grain Size ◽  
Standard Deviation ◽  
Pure Aluminum ◽  
Time To Failure ◽  
X Ray Diffraction ◽  
Aluminum Films ◽  
Failure Data ◽  
Transmission Electron ◽  
Aluminum Metallization ◽  
Microstructure Effects

ABSTRACTPure aluminum films are deposited under a variety of conditions to vary the crystallographic texture. After patterning and annealing at 400°C for 1 hour, electromigration tests are performed at several temperatures. Failure data are compared on the basis of t50 and standard deviation. Microstructure is quantified by transmission electron microscopy for grain size and grain size distribution and by X-ray diffraction for texture. A strong (111) texture significantly improves the electromigration lifetime and decreases the standard deviation in time to failure. This improvement correlates with both the fraction and sharpness of the (111) texture component.

scholarly journals Stable and Metastable Phase Equilibria Involving the Cu6Sn5 Intermetallic

2021 ◽  
Author(s):  
A. Leineweber ◽  
M. Löffler ◽  
S. Martin
Keyword(s):  
Phase Equilibria ◽  
Electron Backscatter Diffraction ◽  
Metastable Phase ◽  
Stable Phase ◽  
X Ray Diffraction ◽  
X Ray ◽  
Heat Treated ◽  
Ordered Phases ◽  
Backscatter Diffraction ◽  
Kinetics Of

Abstract Cu6Sn5 intermetallic occurs in the form of differently ordered phases η, η′ and η′′. In solder joints, this intermetallic can undergo changes in composition and the state of order without or while interacting with excess Cu and excess Sn in the system, potentially giving rise to detrimental changes in the mechanical properties of the solder. In order to study such processes in fundamental detail and to get more detailed information about the metastable and stable phase equilibria, model alloys consisting of Cu3Sn + Cu6Sn5 as well as Cu6Sn5 + Sn-rich melt were heat treated. Powder x-ray diffraction and scanning electron microscopy supplemented by electron backscatter diffraction were used to investigate the structural and microstructural changes. It was shown that Sn-poor η can increase its Sn content by Cu3Sn precipitation at grain boundaries or by uptake of Sn from the Sn-rich melt. From the kinetics of the former process at 513 K and the grain size of the η phase, we obtained an interdiffusion coefficient in η of (3 ± 1) × 10−16 m2 s−1. Comparison of this value with literature data implies that this value reflects pure volume (inter)diffusion, while Cu6Sn5 growth at low temperature is typically strongly influenced by grain-boundary diffusion. These investigations also confirm that η′′ forming below a composition-dependent transus temperature gradually enriches in Sn content, confirming that Sn-poor η′′ is metastable against decomposition into Cu3Sn and more Sn-rich η or (at lower temperatures) η′. Graphic Abstract

Mitrofanovite, Pt3Te4, a new mineral from the East Chuarvy deposit, Fedorovo–Pana intrusion, Kola Peninsula, Russia

2018 ◽  
Vol 83 (4) ◽  
pp. 523-530 ◽  
Author(s):  
Victor V. Subbotin ◽  
Anna Vymazalová ◽  
František Laufek ◽  
Yevgeny E. Savchenko ◽  
Chris J. Stanley ◽  
...  
Keyword(s):  
Kola Peninsula ◽  
Electron Backscatter Diffraction ◽  
New Mineral ◽  
Synthetic Analogue ◽  
X Ray Diffraction ◽  
X Ray ◽  
Structural Identity ◽  
Polarised Light ◽  
Fe Alloys ◽  
Backscatter Diffraction

AbstractMitrofanovite, Pt3Te4, is a new telluride discovered in low-sulfide disseminated ore in the East Chuarvy deposit, Fedorovo–Pana intrusion, Kola Peninsula, Russia. It forms anhedral grains (up to ~20 μm × 50 μm) commonly in intergrowths with moncheite in aggregates with lukkulaisvaaraite, kotulskite, vysotskite, braggite, keithconnite, rustenburgite and Pt–Fe alloys hosted by a chalcopyrite–pentlandite–pyrrhotite matrix. Associated silicates are: orthopyroxene, augite, olivine, amphiboles and plagioclase. Mitrofanovite is brittle; it has a metallic lustre and a grey streak. Mitrofanovite has a good cleavage, along {001}. In plane-polarised light, mitrofanovite is bright white with medium to strong bireflectance, slight pleochroism, and strong anisotropy on non-basal sections with greyish brown rotation tints; it exhibits no internal reflections. Reflectance values for the synthetic analogue of mitrofanovite in air (Ro, Re’ in %) are: 58.4, 54.6 at 470 nm; 62.7, 58.0 at 546 nm; 63.4, 59.1 at 589 nm; and 63.6, 59.5 at 650 nm. Fifteen electron-microprobe analyses of mitrofanovite gave an average composition: Pt 52.08, Pd 0.19, Te 47.08 and Bi 0.91, total 100.27 wt.%, corresponding to the formula (Pt2.91Pd0.02)Σ2.93(Te4.02Bi0.05)Σ4.07 based on 7 atoms; the average of eleven analyses on synthetic analogue is: Pt 52.57 and Te 47.45, total 100.02 wt.%, corresponding to Pt2.94Te4.06. The density, calculated on the basis of the formula, is 11.18 g/cm3. The mineral is trigonal, space group R$\overline 3 $m, with a = 3.9874(1), c = 35.361(1) Å, V = 486.91(2) Å3 and Z = 3. The crystal structure was solved and refined from the powder X-ray-diffraction data of synthetic Pt3Te4. Mitrofanovite is structurally and chemically related to moncheite (PtTe2). The strongest lines in the powder X-ray diffraction pattern of synthetic mitrofanovite [d in Å (I) (hkl)] are: 11.790(23)(003), 5.891(100)(006), 2.851(26)(107), 2.137(16)(1013), 2.039(18)(0114), 1.574(24)(0120), 1.3098(21)(0027). The structural identity of natural mitrofanovite with synthetic Pt3Te4 was confirmed by electron backscatter diffraction measurements on the natural sample. The mineral name is chosen to honour Felix P. Mitrofanov, a Russian geologist who was among the first to discover platinum-group element mineralisation in the Fedorova–Pana complex.

Unusual Microstructural Development upon Gaseous Nitriding of Fe-4.65at% Al Alloy

2010 ◽  
Vol 89-91 ◽  
pp. 371-376
Author(s):  
S. Meka ◽  
R.E. Schacherl ◽  
E. Bischoff ◽  
Eric J. Mittemeijer
Keyword(s):  
Electron Backscatter Diffraction ◽  
Ferrite Matrix ◽  
Microstructural Development ◽  
Al Alloy ◽  
X Ray Diffraction ◽  
Gaseous Nitriding ◽  
Backscatter Diffraction ◽  
Micro Analysis ◽  
Very High ◽  
Plate Type

Employing NH3/H2 gas mixtures, Fe-4.65at% Al alloy specimens were nitrided to assess how the presence of Al, originally dissolved in the ferrite matrix, influences the development of γ-Fe4N1-x phase in the surface adjacent region. The nitrided specimens were characterized by light microscopy, X-ray diffraction, Electron Backscatter Diffraction and Electron Probe Micro Analysis. Surprisingly, formation of ε-Fe2N1-x was observed, although, for the applied nitriding parameters (nitriding potential and temperature), only the formation of γ-Fe4N1-x would be expected in case of nitriding pure ferrite. An unusual plate-type morphology of γ-Fe4N1-x was observed, contrasting with the usual continuous layer-type growth observed upon nitriding iron, Fe-Cr and Fe-V alloys. These unexpected phenomena may be explained as consequences of the need to realize a very high nitrogen supersaturation in the ferrite matrix in order to initiate the precipitation of AlN.

Growth of 4H-SiC Single Crystals on 6H-SiC Seeds with an Open Backside by PVT Method

2009 ◽  
Vol 615-617 ◽  
pp. 15-18 ◽  
Author(s):  
Emil Tymicki ◽  
Krzysztof Grasza ◽  
Katarzyna Racka ◽  
Marcin Raczkiewicz ◽  
Tadeusz Łukasiewicz ◽  
...  
Keyword(s):  
Single Crystals ◽  
Electron Backscatter Diffraction ◽  
Structural Defects ◽  
X Ray Diffraction ◽  
Force Microscopy ◽  
Optical Scanning ◽  
Atomic Force ◽  
The Stability ◽  
Backscatter Diffraction ◽  
Source Materials

4H-SiC single crystals grown by the seeded physical vapour transport method have been investigated. These crystals were grown on 6H-SiC seeds. The influence of the seed temperature, form and granulation of SiC source materials on the stability and efficiency of the 4H polytype growth have been investigated. A new way of the seed mounting - with an open backside - has been used. Crystals obtained were free of structural defects in the form of hexagonal voids. The crystalline structure of SiC crystals was investigated by EBSD (Electron Backscatter Diffraction) and X-Ray diffraction methods. Moreover, defects in crystals and wafers cut from these crystals were examined by optical, scanning electron and atomic force microscopy combined with KOH etching.

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