Texture and Microstructure Effects on Electromigration Behavior of Aluminum Metallization

1991 ◽  
Vol 225 ◽  
Author(s):  
D. B. Knorr ◽  
K. P. Rodbell ◽  
D. P. Tracy
Keyword(s):  
Grain Size ◽  
Standard Deviation ◽  
Pure Aluminum ◽  
Time To Failure ◽  
X Ray Diffraction ◽  
Aluminum Films ◽  
Failure Data ◽  
Transmission Electron ◽  
Aluminum Metallization ◽  
Microstructure Effects

ABSTRACTPure aluminum films are deposited under a variety of conditions to vary the crystallographic texture. After patterning and annealing at 400°C for 1 hour, electromigration tests are performed at several temperatures. Failure data are compared on the basis of t50 and standard deviation. Microstructure is quantified by transmission electron microscopy for grain size and grain size distribution and by X-ray diffraction for texture. A strong (111) texture significantly improves the electromigration lifetime and decreases the standard deviation in time to failure. This improvement correlates with both the fraction and sharpness of the (111) texture component.

Effect of Nitridation Magnetic Properties of Nanocrystalline Fe-Co Alloy Powders

2010 ◽  
Vol 654-656 ◽  
pp. 1106-1109
Author(s):  
Ya Qiong He ◽  
Chang Hui Mao ◽  
Jian Yang
Keyword(s):  
Grain Size ◽  
Magnetic Properties ◽  
Alloy Powder ◽  
High Energy ◽  
X Ray Diffraction ◽  
Powder Mixtures ◽  
X Ray ◽  
Transmission Electron ◽  
Nitridation Temperature ◽  
Microstructure And Magnetic Properties

Nanocrystalline Fe-Co alloy powders, which were prepared by high-energy mechanical milling, were nitrided under the mixing gas of NH3/H2 in the temperature range from 380°C to 510°C. X-ray diffraction (XRD) was used to analyze the grain size and reaction during the processing. The magnetic properties of the nitrided powders were measured by Vibrating Sample Magnetometer (VSM). The results show that with the appearance of Fe4N phase after nitride treatment, and the grain-size of FeCo phase decreases with the increase of nitridation temperature between 380°C to 450°C.The saturation magnetization of nitrided alloy powder treated at 480°C is about 18% higher than that of the initial Fe-Co alloy powder, accompanied by the reduction of the coercivity. Transmission electron microscope (TEM) was used, attempting to further analyze the effect of Fe4N phase on microstructure and magnetic properties of the powder mixtures.

Appropriate Conditions for Preparation of Nanosized WO3 through High-Energy-Milling

2011 ◽  
Vol 194-196 ◽  
pp. 665-668
Author(s):  
Chun Huan Chen ◽  
Rui Ming Ren
Keyword(s):  
Grain Size ◽  
Milling Time ◽  
Rotation Speed ◽  
Processing Parameters ◽  
High Energy ◽  
Charge Ratio ◽  
Activation Process ◽  
X Ray Diffraction ◽  
High Energy Milling ◽  
Transmission Electron

In order to synthesize WC-Co nanopowders through an integrated mechanical and thermal activation process, WO3-Co2O3-C nanopowders need to be obtained first. It is critical how to obtain the WO3-Co2O3-C nanopowders efficiently. The effect of processing parameters on the grain size during high-energy-milling of WO3-Co2O3-C mixed powders was studied via X-ray diffraction (XRD) and transmission electron microscopy (TEM). The results show that the grain size of reactants can be effectively decreased with increasing the milling time, rotation speed, and charge ratio. After a certain time milling, both WO3 and C powders achieve nano-level in grain size and mixed homogeneously. The appropriate milling parameters for fabricating nanosized WO3+C+Co2O3 powders are suggested to be 4 to 8 hours of milling time, 400 RPM of rotation speed, and 40:1 to 60:1 of charge ratio.

ZrN Diffusion Barrier in Aluminum Metallization Schemes

1982 ◽  
Vol 18 ◽  
Author(s):  
L. Krusin-Elbaum ◽  
M. Wittmer ◽  
C.-Y. Ting ◽  
J. J. Cuomo
Keyword(s):  
Grain Size ◽  
Diffusion Barrier ◽  
Annealing Temperature ◽  
Barrier Properties ◽  
Metal Nitrides ◽  
X Ray ◽  
Annealing Temperatures ◽  
Fine Grain ◽  
Transmission Electron ◽  
Aluminum Metallization

We have studied reactively sputtered ZrN, the most thermally stable of the refractory metal nitrides, for its diffusion barrier properties in aluminum metallization schemes with Rutherford backscattering spectroscopy and transmission electron microscopy (TEM). We find this compound to be very effective against aluminum diffusion up to 500 °C, independently of substrate temperature during sputtering. The useful temperature range can be extended by 50 °C with proper preannealing prior to aluminum deposition. The TEM study of the ZrN grain size as a function of annealing temperature revealed that the grain size does not change significantly upon annealing and that the grains are relatively small even at the highest annealing temperatures (about 300 Å at 900 °C). In addition, for annealing temperatures of and below 500 °C large portions of ZrN films were found to be of either amorphous or extremely fine–grain material, thus inhibiting the diffusion along grain boundaries. The presence of Zr3Al4Si5 ternary compound in samples annealed at 600 °C, as determined by X-ray analysis, may suggest that the ZrN barrier fails by decomposition of the film by aluminum.

TEM Study of FePt and FePt:C/FePt Composite Double-Layered Thin Films

2013 ◽  
Vol 275-277 ◽  
pp. 1952-1955
Author(s):  
Ling Fang Jin ◽  
Xing Zhong Li
Keyword(s):  
Electron Microscopy ◽  
Thin Films ◽  
Transmission Electron Microscopy ◽  
Grain Size ◽  
Magnetic Properties ◽  
Composite Layer ◽  
X Ray Diffraction ◽  
X Ray ◽  
Transmission Electron

New functional nanocomposite FePt:C thin films with FePt underlayers were synthesized by noneptaxial growth. The effect of the FePt layer on the ordering, orientation and magnetic properties of the composite layer has been investigated by adjusting FePt underlayer thickness from 2 nm to 14 nm. Transmission electron microscopy (TEM), together with x-ray diffraction (XRD), has been used to check the growth of the double-layered films and to study the microstructure, including the grain size, shape, orientation and distribution. XRD scans reveal that the orientation of the films was dependent on FePt underlayer thickness. In this paper, the TEM studies of both single-layered nonepitaxially grown FePt and FePt:C composite L10 phase and double-layered deposition FePt:C/FePt are presented.

scholarly journals Microstructure and Mechanical Properties of 4Al Alumina-Forming Austenitic Steel after Cold-Rolling Deformation and Annealing

Materials ◽  
2020 ◽  
Vol 13 (12) ◽  
pp. 2767 ◽  
Author(s):  
Chenchen Jiang ◽  
Qiuzhi Gao ◽  
Hailian Zhang ◽  
Ziyun Liu ◽  
Huijun Li
Keyword(s):  
Grain Size ◽  
Cold Rolling ◽  
Grain Boundaries ◽  
Austenitic Steel ◽  
Rolling Reduction ◽  
X Ray Diffraction ◽  
Transmission Electron ◽  
Cold Rolling Reduction ◽  
Average Grain Size ◽  
Cold Rolled

Microstructural evolutions of the 4Al alumina-forming austenitic steel after cold rolling with different reductions from 5% to 30% and then annealing were investigated using electron backscattering diffraction (EBSD), X-ray diffraction (XRD) and transmission electron microscopy (TEM). Tensile properties and hardness were also measured. The results show that the average grain size gradually decreases with an increase in the cold-rolling reduction. The low angle grain boundaries (LAGBs) are dominant in the cold-rolled samples, but high angle grain boundaries (HAGBs) form in the annealed samples, indicating that the grains are refined under the action of dislocations. During cold rolling, high-density dislocations are initially introduced in the samples, which contributes to a large number of dislocations remaining after annealing. With the sustaining increase in cold-rolled deformation, the samples exhibit more excellent tensile strength and hardness due to the decrease in grain size and increase in dislocation density, especially for the samples subjected to 30% cold-rolling reduction. The contribution of dislocations on yield strength is more than 60%.

CONTROLLED SYNTHESIS OF THE ZnWO4 NANOSTRUCTURE AND STUDY OF THEIR STRUCTURAL AND OPTICAL PROPERTIES

2012 ◽  
Vol 21 (01) ◽  
pp. 1250002 ◽  
Author(s):  
NGUYEN MANH HUNG ◽  
LAM THI HANG ◽  
NGUYEN VAN KHANH ◽  
DU THI XUAN THAO ◽  
NGUYEN VAN MINH
Keyword(s):  
Electron Microscopy ◽  
Grain Size ◽  
Optical Properties ◽  
Reaction Time ◽  
X Ray Diffraction ◽  
Structural And Optical Properties ◽  
Calcination Time ◽  
Transmission Electron ◽  
Pure Phase ◽  
Size And Morphology

We investigate the effects of calcination time and concentration of solution on the structure, as well as optical properties in ZnWO4 nanopowder prepared by hydrothermal method. The prepared powder were characterized by X-ray diffraction (XRD), scanning electron microscopy (SEM), transmission electron microscopy (TEM), Raman scattering, optical absorption and photoluminescent spectroscopy (PL). It is shown that the grain size and morphology of ZnWO4 nanopowder can be controlled by adjusting the reaction time as well as the concentration of the solution. The resultant sample is a pure phase of ZnWO4 without any impurities. The result showed that the optical property of ZnWO4 nanopowders depend on their grain size. The optical band gap becomes narrower as the reaction time or concentration of solution is increased. The improved PL properties of the ZnWO4 crystallites can be obtained with the optimal concentration of the solution.

Synthesis and Characterization of Plasma Synthesized Nanostructured Magnesia-Yttria Based Nanocomposites

2007 ◽  
Vol 1056 ◽  
Author(s):  
Jafar F. Al-Sharab ◽  
Rajendra Sadangi ◽  
Vijay Shukla ◽  
Bernard Kear
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Grain Size ◽  
Chemical Mapping ◽  
X Ray Diffraction ◽  
Fine Grained ◽  
Transmission Electron ◽  
Spray Method ◽  
Average Grain Size

ABSTRACTPolycrystalline Y2O3 is the material of choice for IR windows since it has excellent optical properties in the visible, and near infra-red band. However, current processing methods yield polycrystalline Y2O3 with large grain size (> 100 μm), which limits the hardness and erosion resistance attainable. One way to improve strength is to develop an ultra-fine grained material with acceptable optical transmission properties. To realize a fine-grained ceramic, one approach is to develop a composite structure, in which one phase inhibits the growth of the other phase during processing. In this study, Y2O3-MgO nanocomposite with various MgO content (20, 50 and 80 mol%) were synthesized using plasma spray method. Extensive characterization techniques including x-ray diffraction, scanning electron microscopy (SEM), Transmission electron microscopy (TEM) and Energy Dispersive spectrometry (EDS) were employed to study the synthesized powder as well as the consolidated sample. Transmission Electron Microscopy, as well as EDS chemical mapping, revealed that the consolidated sample have bi-continuous MgO-Y2O3 nanostructure with an average grain size of 200 nm.

Local Texture and Electromigration in Fine Line Microelectronic Aluminum Metallization

1994 ◽  
Vol 343 ◽  
Author(s):  
J. L. Hurd ◽  
K. P. Rodbell ◽  
D. B. Knorr ◽  
N. L. Koligman
Keyword(s):  
Electron Backscatter Diffraction ◽  
Fiber Texture ◽  
X Ray Diffraction ◽  
Aluminum Films ◽  
Pole Figures ◽  
Grain Orientations ◽  
Aluminum Metallization ◽  
Backscatter Diffraction ◽  
Relationship Of ◽  
The Relationship

ABSTRACTAluminum films 1 μm thick were deposited on oxidized silicon by sputtering and partially ionized beam evaporation to vary the crystallographic texture. These films were patterned into lines and subsequently annealed at 400 °C for 1 h. A strong correlation between the electromigration behavior and the blanket film texture (X-ray diffraction (XRD) / pole figures) has been reported previously for these films. In this work, an Electron Backscatter Diffraction (EBSD) a.k.a. Backscatter Kikuchi Diffraction (BKD) technique was employed using a scanning electron microscope (SEM) to interrogate individual grain orientations. BKD pole figures were acquired for lines ≥0.3 μm wide and for blanket (pad) regions. Identical, inverse pole figures were found for blanket films measured using both XRD and BKD (pads). Furthermore, the BKD (111) fiber texture shows a line width dependency, with narrow lines having a slightly improved texture over blanket (pad) regions. Local grain orientations were investigated near and within electromigration testing sites with characteristic void and hillock morphologies. The relationship of neighboring grain orientations to electromigration damage is shown.

Grain Size Dependent Magnetic Properties of Nanocrystalline Sm [BE]Co [BD][BJ]/Cu

2001 ◽  
Vol 703 ◽  
Author(s):  
L. Bessais ◽  
C. Djéga-Mariadassou ◽  
J. Zhang ◽  
V. Lalanne ◽  
A. Percheron-Guégan
Keyword(s):  
Grain Size ◽  
Magnetic Properties ◽  
Rietveld Method ◽  
X Ray Diffraction ◽  
X Ray ◽  
Size Dependent ◽  
Transmission Electron ◽  
Average Grain Size ◽  
Magnetic Metal ◽  
Chemical Distribution

ABSTRACTThe evolution of both micro structural and magnetic properties of the Sm[BE]Co[BD][BJ] Cu powder, is studied as a function of soft co-milling time. The average grain size in the range 20 - 50 nm was determined by transmission electron microscopy coupled with x-ray diffraction using the Rietveld method. The particle shape and chemical distribution were investigated by elemental mapping, using wavelength dispersive x-ray analysis with electron microprobe analysis. The coercivity evolution shows that an optimum value of 6 kOe is obtained after 5 h co-milling. The microstructure analysis indicates that both materials are well mixed in nanometer scale. This technique appears as a potential route to synthesize nanocrystalline Sm[BE]Co[BD][BJ] isolated by non-magnetic metal Cu.

Observation of grain superstructure in thin aluminum films by orientation imaging microscopy

1995 ◽  
Vol 53 ◽  
pp. 436-437
Author(s):  
Roger Alvis ◽  
David Dingley ◽  
David Field
Keyword(s):  
Aluminum Alloy ◽  
Orientation Imaging Microscopy ◽  
Test Structure ◽  
Al Alloy ◽  
X Ray Diffraction ◽  
Aluminum Films ◽  
Orientation Imaging ◽  
Reliability Parameters ◽  
Transmission Electron ◽  
Thin Aluminum

The correlation of aluminum alloy reliability data to microstructure has long been the goal of those scientists seeking to model electromigration behavior of interconnects. Traditionally, microstructural information has been acquired through x-ray diffraction , and transmission electron microscopy (TEM). However, each of these techniques is capable of delivering only part of the characterization whole. We describe the application of orientation imaging microscopy (OIM) to thin aluminum alloy films and demonstrate its versatility in providing the key microstructural reliability parameters: namely texture and grain size, as well as providing insight to the microstructure of grain boundaries.OIM was performed on an electromigration test structure (figure 1). The Al-alloy was deposited on titanium and capped with an anti-reflective titanium nitride. Subsequently, the test structure was patterned and capped with a multilayer blanket consisting of silicon nitride (SiN), and SiO2. The structure was annealed after the SOG deposition at 450° C for 90 minutes, seeing no electrical stressing. The die was removed from the package and deprocessed before the OIM was acquired.

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