The Roles of Several E′ Variants in Thermal Gate Oxide Reliability

1994 ◽  
Vol 338 ◽  
Author(s):  
John F. Conley ◽  
P.M. Lenahan ◽  
H.L. Evans ◽  
R.K. Lowry ◽  
T.J. Morthorst
Keyword(s):  
Thin Film ◽  
Electron Spin Resonance ◽  
Electron Spin ◽  
Vacuum Ultraviolet ◽  
Charge Injection ◽  
Charge Trapping ◽  
Gate Oxide ◽  
Oxide Reliability ◽  
Spin Resonance ◽  
Thermally Grown

ABSTRACTWe combine electron spin resonance measurements with vacuum ultraviolet, ultraviolet, and corona bias charge injection schemes to examine the properties and charge trapping roles of three E′ variants in conventionally processed thermally grown thin film SiO2 on Si.

Electron Spin Resonance in GaN Thin Film Doped with Fe

2007 ◽  
Vol 46 (2) ◽  
pp. 581-585 ◽  
Author(s):  
Takanari Kashiwagi ◽  
Saki Sonoda ◽  
Haruhiko Yashiro ◽  
Yujiro Ishihara ◽  
Akira Usui ◽  
...  
Keyword(s):  
Thin Film ◽  
Electron Spin Resonance ◽  
Electron Spin ◽  
Spin Resonance

Investigation of defects in In–Ga–Zn oxide thin film using electron spin resonance signals

2014 ◽  
Vol 115 (16) ◽  
pp. 163707 ◽  
Author(s):  
Yusuke Nonaka ◽  
Yoichi Kurosawa ◽  
Yoshihiro Komatsu ◽  
Noritaka Ishihara ◽  
Masashi Oota ◽  
...  
Keyword(s):  
Thin Film ◽  
Electron Spin Resonance ◽  
Electron Spin ◽  
Oxide Thin Film ◽  
Spin Resonance

Electron spin resonance in thin film silicon after low temperature electron irradiation

2007 ◽  
Vol 515 (19) ◽  
pp. 7513-7516 ◽  
Author(s):  
O. Astakhov ◽  
F. Finger ◽  
R. Carius ◽  
A. Lambertz ◽  
Yu. Petrusenko ◽  
...  
Keyword(s):  
Thin Film ◽  
Electron Spin Resonance ◽  
Low Temperature ◽  
Electron Spin ◽  
Electron Irradiation ◽  
Thin Film Silicon ◽  
Spin Resonance ◽  
Temperature Electron
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