Design and Synthesis of Metal-Organic Precursors to Aluminosilicates

1984 ◽  
Vol 32 ◽  
Author(s):  
Arlene G. Williams ◽  
Leonard V. Interrante
Keyword(s):  
Sol Gel ◽  
Single Crystal Silicon ◽  
Direct Conversion ◽  
Thermal Curing ◽  
Crystal Silicon ◽  
Design And Synthesis ◽  
Metal Organic ◽  
Ceramic Precursors ◽  
Organic Precursors ◽  
Viscous Solutions

ABSTRACTDiketonate aluminum alkoxides were prepared and allowed to react with acetoxyalkylsilanes. The conversion of the aluminosiloxanes thus obtained to aluminosilicates at 450°C was demonstrated. These aluminosiloxane ceramic precursors are glassy, oligomeric materials which readily dissolve in organic solvents to give viscous solutions ideal for casting films. Films of the metal-organic compounds prepared in this manner yield monolithic, crack-free aluminosilicate films directly on thermal curing, with a thickness limit of 3000Å for single crystal silicon wafer substrates. These aluminosilicate films have been found to be effective anticorrosion barriers for various metal substrates. The chemistry of this organoaluminosilane system and the nature of the aluminosilicate films obtained has been investigated using a variety of chemical and physical methods. The results of this investigation will be described and the possible advantages of this direct conversion process over the sol-gel method as a means of obtaining aluminosilicate films will be discussed.

Chemical vapour and sol-gel syntheses of nano-composites and -ceramics using metal-organic precursors

2001 ◽  
Vol 44 (8-9) ◽  
pp. 2157-2160 ◽  
Author(s):  
N Lecerf ◽  
S Mathur ◽  
H Shen ◽  
M Veith ◽  
S Hüfner
Keyword(s):  
Sol Gel ◽  
Chemical Vapour ◽  
Nano Composites ◽  
Metal Organic ◽  
Organic Precursors

Preparation and characterization of Nd3+ and Er3+-doped silica sol-gel coatings by Rutherford backscattering spectroscopy and spectroscopic ellipsometry

1997 ◽  
Vol 12 (10) ◽  
pp. 2779-2783 ◽  
Author(s):  
S. Bruynooghe ◽  
A. Chabli ◽  
F. Bertin ◽  
F. Pierre ◽  
G. Leflem
Keyword(s):  
Rare Earth ◽  
Spectroscopic Ellipsometry ◽  
Sol Gel ◽  
Single Crystal Silicon ◽  
Liquid Solution ◽  
Rutherford Backscattering ◽  
Rutherford Backscattering Spectroscopy ◽  
Rare Earth Doping ◽  
Crystal Silicon ◽  
Silica Films

Neodymium- or erbium-doped silica films are deposited on single crystal silicon substrates using a sol-gel process and a spin-coating technique. These glasses are doped with neodymium or erbium in various Nd/Si or Er/Si atomic ratios up to 8% using neodymium nitrate or erbium nitrate as precursor. A preparation method of such films is described. Film rare earth concentration measured by Rutherford Backscattering Spectroscopy (RBS) is the same as in the initial liquid solution. Film thickness and refractive index are obtained by variable angle spectroscopic ellipsometry. We have shown that both RBS analysis and spectroscopic ellipsometry are powerful tools to control rare earth doping level and optical properties of the silica films.

Ten Analyses Of Sol-Gel Derived And Sputtered PZT Thin Films

1990 ◽  
Vol 200 ◽  
Author(s):  
Cheng-Chen Hsueh ◽  
Martha L. MeCartney
Keyword(s):  
Thin Films ◽  
Ferroelectric Properties ◽  
Sol Gel ◽  
Rf Magnetron Sputtering ◽  
Pzt Thin Films ◽  
Ferroelectric Domains ◽  
Metal Organic ◽  
Organic Precursors ◽  
Acid Catalyzed ◽  
Sol Gel Films

ABSTRACTFerroelectric PZT thin films were prepared by sol-gel methods and RF magnetron sputtering. Sputtered PZT fast fired at 650° for 30 minutes showed microporosity. For the sol-gel route, solution precursors had a significant effect on the microstructure of the crystalline PZT films. PZT thin films derived from metal-organic precursors dissolved in n-propanol were observed to have large and microporous spherulitic grains on the order of 2 μm and phase separation in acetic acid-catalyzed films. In contrast, PZT precursors originated from alcohol exchanges with 2-methoxyethanols resulted in dense films with fine grains of ∼0.2 μm and clear evidence of ferroelectric domains. The dense sol-gel films possessed superior dielectric and ferroelectric properties.

Sol-gel processing of strontium-barium niobate ferroelectric thin film

1990 ◽  
Vol 5 (5) ◽  
pp. 916-918 ◽  
Author(s):  
Ren Xu ◽  
Yuhuan Xu ◽  
Ching Jih Chen ◽  
John D. Mackenzie
Keyword(s):  
Thin Film ◽  
Sol Gel ◽  
Single Crystal Silicon ◽  
Ferroelectric Thin Film ◽  
Processing Temperature ◽  
Strontium Barium Niobate ◽  
Strontium Barium ◽  
Crystal Silicon ◽  
Glass Slides ◽  
Gel Processing

Ferroelectric thin film of strontium-barium niobate was successfully fabricated by the sol-gel technique. The films were made on several types of substrate, including quartz, single crystal silicon wafer, and glass slides. The processing temperature was as low as 700 °C. The film obtained with thickness of 3000 Å was dense, transparent, and showed excellent ferroelectricity.

Study of Biological Properties of Thin-Film Materials on the Basis of the SIO2–P2O5–СaO System

2016 ◽  
Vol 683 ◽  
pp. 427-432 ◽  
Author(s):  
Lyudmila P. Borilo ◽  
Ekaterina S. Lyutova ◽  
Larisa N. Spivakova
Keyword(s):  
Thin Films ◽  
Sol Gel ◽  
Single Crystal Silicon ◽  
Film Coating ◽  
Biological Properties ◽  
Oxide System ◽  
Crystal Silicon ◽  
Practical Applications ◽  
Film Forming ◽  
The Moment

Thin films were obtained from film-forming solutions by the sol-gel method on the basis of the SiO2-P2O5-СаO system. Thin films were produced on the single-crystal silicon substrates (model substrate) by extraction at a velocity of 5 mm/s following by heat treatment at a temperature of 60°С for 20 minutes and at a temperature of 600°С for 1 hour. During the experiment it was established that film-forming solutions are usable only for 2 to 7 days from the moment of preparation. Using thermal and infra-red – spectroscopic analysis main stages of oxide system formation were retraced. According to data from x-ray phase analysis phases CaClH2PO4∙H2O, Ca(H2PO4)2∙H2O, CaHPO4∙2H2O, Ca2SiO4∙H2O, Ca5(PO4)3Cl. On the supporter’s surface a homogeneous film coating with quite equally spaced crystal-like formations with the diameter of 10-11 microns at the distance of 1-30 microns was formed. Phase composition, surface properties and biological activity of the synthesized materials were investigated. XRD results indicated that after being immersed into the SBF, hydroxylapatite, wollastonite, and chlorapatite were formed on the samples’ surfaces, which was important for practical applications

Рroperties of Bioactive Thin-Films Based on System SiO2-P2O5-CаO and SiO2-P2O5-СаO-Na2O Obtained by Sol-Gel Method

2016 ◽  
Vol 683 ◽  
pp. 306-311
Author(s):  
Lyudmila P. Borilo ◽  
Ekaterina S. Lyutova ◽  
Larisa N. Spivakova
Keyword(s):  
Thin Films ◽  
Calcium Ions ◽  
Calcium Phosphates ◽  
Sol Gel ◽  
Single Crystal Silicon ◽  
Oxide System ◽  
Crystal Silicon ◽  
Gel Method ◽  
Sol Gel Method ◽  
Film Forming

Thin films were synthesized from alcohol film-forming solutions based on tethraethoxysilane, phosphoric acid, calcium chloride and sodium chloride using sol-gel method. Thin films were produced on the single-crystal silicon substrates (model substrate) by extraction at a velocity of 5 mm/s following by heat treatment at a temperature of 60°С for 20 minutes and at a temperature of 600°С for 1 hour. During the experiment it was established that film-forming solutions are usable only for 2 to 7 days from the moment of preparation. Using thermal and infra-red – spectroscopic analysis main stages of oxide system formation were retraced. According to data from x-ray phase analysis phases CaClH2PO4∙H2O, Ca (H2PO4)2∙H2O, CaHPO4∙2H2O, Ca2SiO4∙H2O, Ca5(PO4)3Cl и CaSiO3,NaCl, CaCl2, H2PO4·H2O, Ca5(PO4)3Cl, SiO2 are being registered in the sample. Biological activity of the received material was evaluated in SBF environment. Presence of the sodium oxide in the system leads to the increase in the bioactivity of the material. Such material intensively exchanges with solution in calcium ions and phosphate-ions; silanol groups fix calcium ions, furthering the formation of the layer of amorphous calcium phosphates gradually crystallizing in hydroxyapatite, and other calcium phosphates.

Antireflective sol–gel TiO2 thin films for single crystal silicon and textured polycrystal silicon

2012 ◽  
Vol 62 (1) ◽  
pp. 24-30 ◽  
Author(s):  
N. H. Arabi ◽  
A. Iratni ◽  
H. El Hamzaoui ◽  
B. Capoen ◽  
M. Bouazaoui ◽  
...  
Keyword(s):  
Thin Films ◽  
Single Crystal ◽  
Sol Gel ◽  
Single Crystal Silicon ◽  
Tio2 Thin Films ◽  
Crystal Silicon
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