Characterization of thin Chemical/Native Oxides on Si (100) by Auger and Angle-Resolved XPS

1993 ◽  
Vol 318 ◽  
Author(s):  
Eddie D. Pylant ◽  
Carolyn F. Hoener ◽  
Mark F. Arendt ◽  
Bob Witowski
Keyword(s):  
Photoelectron Spectroscopy ◽  
Electron Spectroscopy ◽  
Depth Distribution ◽  
Oxidation States ◽  
State Distribution ◽  
X Ray ◽  
Depth Profiles ◽  
Native Oxides ◽  
Target Factor Analysis

ABSTRACTChemical/native oxides grown on Si(100) after several standard wet cleans are characterized by Angle-resolved X-ray Photoelectron Spectroscopy (ARXPS), and Auger Electron Spectroscopy using sputter depth profiles. Target Factor Analysis (TFA) was used to separate the Si LVV Auger peak into three components identified by their lineshapes and positions as Si, SiO2, and SiOx- Auger depth profiles were used to quantify the thickness of the oxides, the depth distribution, and amount of SiOx in the interface region. ARXPS was used to study the chemical state distribution in the native oxides as a function of depth. The depth distribution function from the Auger data was converted to an angle-resolved format for direct comparison to the angle-resolved XPS data. With this comparison, the SiOx lineshape is correlated to a 3:1 mixture of Si 3+ and Si 2+ oxidation states.

scholarly journals Montecarlo Simulation and HAXPES Analysis of Organosilane Segregation in Titania Xerogel Films; Towards a Generic Surface Chemofunctionalization Process

Surfaces ◽  
2020 ◽  
Vol 3 (3) ◽  
pp. 352-365
Author(s):  
Javier Mateo Moreno ◽  
Rodrigo Calvo Membibre ◽  
Sergio Pinilla Yanguas ◽  
Juan Rubio Zuazo ◽  
Miguel Manso Siván
Keyword(s):  
Photoelectron Spectroscopy ◽  
Surface Segregation ◽  
Titanium Isopropoxide ◽  
Condensation Process ◽  
X Ray ◽  
Depth Profiles ◽  
Partial Charges ◽  
Xerogel Films ◽  
Non Destructive

The formation of xerogels implies a sequence of hydrolysis and condensation reactions, which are intricate to analyze in heteromolecular sols. We analyze by probabilistic Montecarlo methods the development of hybrid organosilane–titania xerogels and illustrate how partial charges of the reacting molecules can help estimating relative probabilities for the condensation of the molecules. Since the condensation rate of Ti alkoxides is much higher than the corresponding rate of Si alkoxides (especially if bearing a non-hydrolizable group), by imposing a fast condensation process in agreement with low pH kinetics, the process leads to a surface segregation of the organosilane. The simulation results are compared with results of characterization of thin condensates of two different organosilanes within a titanium–isopropoxide matrix. Non-destructive in-depth profiles were obtained by hard x-ray photoelectron spectroscopy, which can resolve through estimation of Si and specific moieties of the organosilane molecules the progress of the condensation. These results are relevant for the generalization of chemo-functionalization processes by kinetic demixing of organosilanes, which have myriad applications in biomedicine and biotechnology.

Interdiffusion in Exchange Biased NiFe/IrMn/CoFe Electrode in Magnetic Tunnel Junctions

2001 ◽  
Vol 690 ◽  
Author(s):  
Jay H. Lee ◽  
Hee D. Jeong ◽  
Il C. Rho ◽  
Chong S. Yoon ◽  
Chang K. Kim
Keyword(s):  
Photoelectron Spectroscopy ◽  
Electron Spectroscopy ◽  
Tunnel Junctions ◽  
Magnetic Tunnel Junction ◽  
Magnetic Film ◽  
Tunnel Barrier ◽  
Plasma Oxidation ◽  
X Ray ◽  
Depth Profiles ◽  
Mn Diffusion

ABSTRACTExtent of Mn diffusion to the plasma-oxidized AlOx tunnel barrier of magnetic tunnel junction was examined using Auger Electron Spectroscopy (AES) and X-Ray Photoelectron Spectroscopy (XPS). A magnetic film stack consisting of Ta/AlOx/CoFe/IrMn/NiFe/Ta was deposited with the AlOx layer treated under different plasma oxidation durations. AES depth profiles showed that Mn diffusion to the AlOx/CoFe interface increased with increasing oxidation after annealing at 300°C. XPS analysis indicated that Mn found at the CoFe/AlOx interface in the over-oxidized electrode was in the form of MnO2. Our research suggests that Mn diffusion was accelerated by preferential oxidation of Mn at the CoFe/AlOx interface.

Characterization of europium implanted LiNbO3

1993 ◽  
Vol 8 (10) ◽  
pp. 2679-2685 ◽  
Author(s):  
P. Moretti ◽  
B. Canut ◽  
S.M.M. Ramos ◽  
R. Brenier ◽  
P. Thévenard ◽  
...  
Keyword(s):  
Single Crystals ◽  
Photoelectron Spectroscopy ◽  
Room Temperature ◽  
Rutherford Backscattering ◽  
Oxidation States ◽  
Xps Spectra ◽  
X Ray ◽  
Partial Recrystallization ◽  
Lower Charge

LiNbO3 single crystals were implanted at room temperature with Eu+ ions at 70 keV with fluence ranging from 0.5 to 5 × 1016 ions · cm−2. The damage in the implanted layer has been investigated by Channeling Rutherford Backscattering (RBS-C), and the oxidation states of the cations have been determined by x-ray photoelectron spectroscopy (XPS). Following implantation, a fully amorphized layer of 60 nm is generated, even for the lowest fluence employed. Subsequent annealing in air, in the range 800–1250 K, was applied to restore tentatively the crystallinity and promote the substitutional incorporation of Eu in the crystal. Only a partial recrystallization of the damaged layer was observed. For as-implanted samples, XPS spectra clearly reveal europium in Eu2+ and Eu3+ states, and the Nb5+ ions are driven to lower charge states.

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