Ultra Thin Sacrificial Diffusion Barriers - Control of Diffusion Across the Cu-SiO2 Interface

1993 ◽  
Vol 318 ◽  
Author(s):  
Eric Kirchner ◽  
S.P. Murarka ◽  
E. Eisenbraun ◽  
A. Kaloyeros
Keyword(s):  
Electrical Resistivity ◽  
Corrosion Resistance ◽  
Diffusion Barrier ◽  
Diffusion Barriers ◽  
Thin Layers ◽  
Thermal Treatments ◽  
Adhesion Promoter ◽  
Electrical Bias

ABSTRACTIn a copper-SiO2 dielectric multilevel interconnection scheme a diffusion barrier is needed between the metal and the dielectric to prevent the diffusion of Cu into SiO2 when subjected to thermal treatments and high electric bias. Ultra thin layers (50–100Å) of Al and Ti are being investigated for use as the required diffusion barrier as well as an adhesion promoter between Cu and SiO2 The results of our investigations, using C-V, resistance, and XPS measurements, will be presented and discussed. It will be shown that both Al and Ti reduce the SiO2 surface leading to a metal, oxygen, and Si bonded layer which acts as diffusion barrier under applied electrical bias of 1.5 MV/cm at temperatures as high as 250–300°C. Upper layers of Al and Ti are consumed by reaction with Cu. Such reactions increase the electrical resistivity and corrosion resistance of Cu (especially with Al). The results and the applicability of such barriers in practical cases will be presented and discussed.

Interactions of Copper with Interlayer Dielectrics and Adhesion Promoters / Diffusion Barriers.

1990 ◽  
Vol 203 ◽  
Author(s):  
B. Arcot ◽  
Y.T. Shy ◽  
S.P. Murarka ◽  
C. Shepard ◽  
W.A. Lanford
Keyword(s):  
Melting Point ◽  
Specific Heat ◽  
Diffusion Barrier ◽  
Metal Film ◽  
Diffusion Barriers ◽  
Adhesion Promoter ◽  
Adhesion Promoters ◽  
Inorganic Oxides ◽  
Temperature Range ◽  
Dielectric Layers

ABSTRACTCopper with its high conductivity, specific heat and melting point (compared to Al), is being investigated as the interconnection metal for applications both on and off the chip. Such interconnection wirings will be seperated by the dielectric layers which could be either polymers or inorganic oxides like SiO2. In such applications an adhesion promoter, which may also work as a diffusion barrier, maybe used between the dielectric and the metal film. An investigation of the diffusion and interaction of Copper with such dielectrics and insulators has been carried out in the temperature range of 200 – 500 ºC. Specifically, interactions of Copper with SiO2'P—glass, Polyimidesiloxane and Magnesium are investigated. Results of these studies will be presented and discussed.

The Stability of TiH2 Used as Diffusion Barrier on SiO2 Substrates

1994 ◽  
Vol 337 ◽  
Author(s):  
Shyam P. Murarka ◽  
Sen-Hou Ko ◽  
Pei-Jun Ding ◽  
William A. Lanford
Keyword(s):  
Thin Film ◽  
Electrical Resistivity ◽  
Nuclear Reaction ◽  
Sheet Resistance ◽  
Diffusion Barrier ◽  
Water Concentration ◽  
X Ray Diffraction ◽  
Adhesion Promoter ◽  
X Ray ◽  
The Stability

ABSTRACTTiH2 has been considered as a diffusion barrier and adhesion promoter between oxide and Cu. This phase is formed by reaction of Ti with hydrogen during rapid thermal annealings. In this investigation the stability of TiH2 on PECVD and thermal oxides has been studied during Ar anneal at 400 and 500°C. X-ray diffraction, sheet resistance measurements, RBS, and nuclear reaction technique to profile hydrogen have been used in this study. The results indicate that the stability of TiH2 is dependent on the nature of the oxide, for example, the water concentration and the density of the oxide and on the temperature of the anneal. These results will be discussed in view of the applicability of TiH2 which has a low thin film electrical resistivity of about 100 μΩ-cm.

EVANOHM ALLOY S

Alloy Digest ◽  
1989 ◽  
Vol 38 (7) ◽  
Keyword(s):  
Electrical Resistivity ◽  
Corrosion Resistance ◽  
Physical Properties ◽  
Tensile Properties ◽  
Temperature Coefficient ◽  
Electromotive Force ◽  
Temperature Coefficient Of Resistance ◽  
Resistance Wire ◽  
High Electrical Resistivity ◽  
Optimum Stability

Abstract EVANOHM alloy S offers optimum stability and flexibility with regard to both size and required temperature coefficient of resistance. Its extremely low electromotive force vs copper together with its high electrical resistivity are highly desirable properties in a precision resistance wire. This datasheet provides information on composition, physical properties, and tensile properties. It also includes information on corrosion resistance as well as joining. Filing Code: Ni-373. Producer or source: Wilbur B. Driver Company.

A Novel Duplex Re-NiW Based Diffusion Barrier on a Nickel-Base Superalloy for TBC Systems

2008 ◽  
Vol 595-598 ◽  
pp. 127-134 ◽  
Author(s):  
Sebastien Mercier ◽  
Denis Boivin ◽  
Marie Pierre Bacos ◽  
Pierre Josso
Keyword(s):  
Diffusion Barrier ◽  
Bond Coat ◽  
Alloying Elements ◽  
Nickel Base Superalloy ◽  
Coating Process ◽  
Thermal Treatments ◽  
Eds Analysis ◽  
Nickel Base ◽  
Tbc Systems ◽  
Base Superalloy

A diffusion barrier between a 4th generation superalloy (MC-NG) and a β-(Ni, Pt)Al has been studied. The used coating process combines Re and NiW electrolytic deposits followed by thermal treatments. The diffusion barrier is composed of a continuous 3 &m thick ReWNi layer under a 10 &m thick β-(Ni, Pt)Al containing W rich precipitates. EDS analysis on as coated samples and on 50h-1100°C-Ar aged samples showed that the Re-NiW layer works as a diffusion barrier. The Al reservoir in the bond coat after aging is higher with the diffusion barrier than without. The concentrations of alloying elements are also lower in the bond coat with the diffusion barrier than without.

Chemical Deposition of Thin Layers on Reinforcing Steel

2015 ◽  
Vol 660 ◽  
pp. 213-218 ◽  
Author(s):  
Petru Lazăr ◽  
Costică Bejinariu ◽  
Andrei Victor Sandu ◽  
Alin Marian Cazac ◽  
Ioan Gabriel Sandu
Keyword(s):  
Corrosion Resistance ◽  
Reinforced Concrete ◽  
Experimental Research ◽  
Immersion Time ◽  
Chemical Deposition ◽  
Thin Layers ◽  
Phosphate Solution ◽  
Reinforcing Steel ◽  
Good Surface

This paper presents the results of experimental research on the influence of using microcrystalline phosphating process on the OB37 steel used in construction. For this purpose, the samples were immersed in phosphate solution and the structures were characterized using SEM microscope. The results show that the obtained structures, are influenced by pH and immersion time and show a good surface compactity and roughness, which means that the obtained layer on the OB37 reinforcement improves corrosion resistance and adhesion of these reinforcements in the reinforced concrete.

Preparation and properties of in-situ grown Cr2O3 diffusion barrier between Ni coating and 316L stainless steel in molten fluorides

CORROSION ◽  
10.5006/3759 ◽  
2021 ◽  
Author(s):  
Yanli Wang ◽  
Ping Wang ◽  
Changxuan Wang ◽  
Shenghua Zhang
Keyword(s):  
Heat Treatment ◽  
Stainless Steel ◽  
Corrosion Resistance ◽  
Diffusion Barrier ◽  
Transition Layer ◽  
316L Stainless Steel ◽  
Good Protection ◽  
Molten Fluorides

A Cr2O3 diffusion barrier was in-situ formed between Ni coating and 316L through electroplating a Ni(NiO) transition layer firstly and then annealing at 900 °C for 8 h in Ar. The obtained Cr2O3 is dense, continuously grown and well-bonded with 316L. The diffusion and corrosion resistance of Ni coating with and without Cr2O3 diffusion barrier were investigated. No visible outer diffusion of elements was found during the heat treatment at 750 °C for 150 h and the Ni coating with a Cr2O3 diffusion barrier can provide a good protection for 316L in molten (Li,Na,K)F.

scholarly journals Mechanical Response of Ni-Based CU5MCuC Alloy to Different Stabilization Thermal Treatments

2020 ◽  
Author(s):  
Andrea Gruttadauria ◽  
Silvia Barella ◽  
Claudia Fiocchi
Keyword(s):  
Mechanical Properties ◽  
Corrosion Resistance ◽  
Mechanical Strength ◽  
Intergranular Corrosion ◽  
Mechanical Response ◽  
Annealing Treatment ◽  
Mechanical Tests ◽  
Thermal Treatments ◽  
Stabilization Treatment ◽  
Cr System

Abstract The Ni–Fe–Cr system is the basis of a series of commercial alloys featuring chemical–physical characteristics that allow them to be used in a variety of fields where excellent resistance to aggressive environments is required. In this scenario, the CU5MCuC alloy, the foundry counterpart of Alloy 825, is proving successful in the petrochemical field thanks to its good corrosion resistance in acidic and highly oxidizing environments. Intergranular corrosion resistance, critical for this material, is ensured by the stabilization treatment that allows precipitation of Nb carbides. Strengthening of this alloy takes place only via a solid solution. Therefore, its mechanical properties depend on the solution annealing treatment: often this treatment alone does not make it possible to reach the UTS imposed by the ASTM-A494 standard. In this work, the possibility of using stabilization treatment to increase mechanical strength as well was considered. Treatments, with different combinations of time and temperature, were carried out in order to modify the material’s microstructure. After the thermal treatments, microstructural analyses, mechanical tests and (pitting and intergranular) corrosion and resistance tests were carried out to identify optimal treatment parameters in order to promote the evolution of microstructural constituents capable of improving mechanical strength without decreasing corrosion resistance. The treatment that achieves the best compromise between mechanical properties and corrosion resistance is stabilization at 970 °C for 4 h.

X-ray Residual Stress Analysis of Zn-Ni Alloy Electroplating Layers

1989 ◽  
Vol 33 ◽  
pp. 171-175
Author(s):  
Toshihiko Sasaki ◽  
Makoto Kuramoto ◽  
Yasuo Yoshioka
Keyword(s):  
Residual Stress ◽  
Corrosion Resistance ◽  
Stress Analysis ◽  
Stress Measurement ◽  
Thin Layers ◽  
High Corrosion Resistance ◽  
Ray Method ◽  
X Ray ◽  
Ni Alloy ◽  
Residual Stress Analysis

Zn-Ni-alloy electroplated steels are one of the surface-treated materials with a high corrosion resistance and are mostly used for automobiles. It is said that the corrosion resistance is more than four times as great as that of Zn-plated steels. Concerning x-ray stress measurement, Kyono et al reported the result of measurement on y (552) planes and showed that the sin2φ diagram was severely curved.X-ray stress analysis in surface-treated materials will become more important. Some problems, however, remain to be studied when we apply the x-ray method to thin layers. For example, the effective x-ray penetration depth may be different from that in ordinary materials. And complex gradients of stresses and compositions may exist.

Influence of Fe Doping Concentration on SnO2 Layers

2019 ◽  
Vol 397 ◽  
pp. 200-205
Author(s):  
Leila Segueni ◽  
Achour Rahal ◽  
Ben Haoua Boubaker ◽  
Allag Nassiba ◽  
Atmane Benhaoua ◽  
...  
Keyword(s):  
Electrical Resistivity ◽  
Doping Concentration ◽  
Visible Region ◽  
Optical Transmittance ◽  
Thin Layers ◽  
Fe Doping ◽  
Polycrystalline Structure ◽  
High Transparency ◽  
Optical Gap ◽  
Grain Sizes

In this study, we report structural, morphological and optical properties of Fe-doped SnO2 thin layers. Fe doping concentration has evaluated from 0 to 0.6 wt.%. XRD and SEM results revealed a polycrystalline structure for Fe-doped SnO2 thin layers. The optical transmittance of all thin layers displayed high transparency reach to 80% in the visible region. The optical gap of these layers decreases from 3.87 to 3.58 eV. The grain sizes decrease from 35 to 30 nm. The electrical resistivity of layers increases from 1.2×10-2 to 6.8×10-2 Ω.cm.

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