Surface Stress Effects on Thin Film Growth

1993 ◽  
Vol 317 ◽  
Author(s):  
R.C. Cammarata

ABSTRACTA review of surface and interface stresses relevant to thin film growth is presented. It is shown that surface stress effects that are generally ignored in the analysis of epitaxy can have an influence on the critical thickness for epitaxy, especially at larger Misfits. A discussion of intrinsic stress generation from surface stress is also presented.

1997 ◽  
Vol 505 ◽  
Author(s):  
R. C. Cammarata ◽  
K. Sieradzki

ABSTRACTSurface stress represents the reversible work per unit area to elastically stretch a solid surface, and can be associated with interfaces between two solid phases as well as free solid surfaces. The effects of surface stresses on the critical thickness for epitaxy in thin film superlattices is given.


2000 ◽  
Vol 15 (11) ◽  
pp. 2468-2474 ◽  
Author(s):  
R. C. Cammarata ◽  
T. M. Trimble ◽  
D. J. Srolovitz

A simple model was presented for intrinsic stress generation in thin films resulting from surface stress effects. This mechanism can explain the origin of compressive stresses often observed during island growth prior to coalescence, as well as intrinsic compressive stresses reported for certain continuous, fully grown films. In some cases, surface stress effects may contribute to a sudden change in the intrinsic stress during island coalescence.


2019 ◽  
Vol 469 ◽  
pp. 537-552 ◽  
Author(s):  
Xuyang Zhou ◽  
Xiaoxiang Yu ◽  
David Jacobson ◽  
Gregory B. Thompson

2021 ◽  
Vol 118 (10) ◽  
pp. 102402
Author(s):  
Hiroaki Shishido ◽  
Akira Okumura ◽  
Tatsuya Saimyoji ◽  
Shota Nakamura ◽  
Shigeo Ohara ◽  
...  

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