A molecular dynamics study on stress generation during thin film growth

Applied Surface Science ◽

10.1016/j.apsusc.2018.09.253 ◽

2019 ◽

Vol 469 ◽

pp. 537-552 ◽

Cited By ~ 6

Author(s):

Xuyang Zhou ◽

Xiaoxiang Yu ◽

David Jacobson ◽

Gregory B. Thompson

Keyword(s):

Thin Film ◽

Molecular Dynamics ◽

Film Growth ◽

Thin Film Growth ◽

Stress Generation

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Molecular Dynamics Simulation of the Physics of Thin Film Growth on Silicon: Effects of the Properties of Interatomic Potential Models

Atomistic Simulation of Materials ◽

10.1007/978-1-4684-5703-2_14 ◽

1989 ◽

pp. 139-145

Author(s):

W. Lowell Morgan

Keyword(s):

Thin Film ◽

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Film Growth ◽

Interatomic Potential ◽

Thin Film Growth ◽

Dynamics Simulation ◽

Potential Models

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Accelerated Molecular-Dynamics Simulation of Thin Film Growth

Springer Proceedings in Physics - Computer Simulation Studies in Condensed-Matter Physics XIX ◽

10.1007/978-3-540-85625-2_2 ◽

2008 ◽

pp. 7-16 ◽

Cited By ~ 2

Author(s):

K. A. Fichthorn ◽

R. A. Miron

Keyword(s):

Thin Film ◽

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Film Growth ◽

Thin Film Growth ◽

Dynamics Simulation ◽

Accelerated Molecular Dynamics

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Quantitative investigation of the role of high-energy particles in Al2O3 thin film growth: A molecular-dynamics study

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2014.05.072 ◽

2014 ◽

Vol 254 ◽

pp. 131-137 ◽

Cited By ~ 11

Author(s):

Jiri Houska

Keyword(s):

Thin Film ◽

Molecular Dynamics ◽

Film Growth ◽

High Energy ◽

Thin Film Growth ◽

Quantitative Investigation ◽

High Energy Particles ◽

Al2o3 Thin Film

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Stress Generation and Relaxation Mechanisms for Thin Film Growth by Electrochemical Deposition

ECS Meeting Abstracts ◽

10.1149/ma2007-02/29/1429 ◽

2007 ◽

Keyword(s):

Thin Film ◽

Electrochemical Deposition ◽

Film Growth ◽

Thin Film Growth ◽

Stress Generation

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Molecular dynamics simulations of multilayer homoepitaxial thin film growth in the diffusion-limited regime

Surface Science ◽

10.1016/s0039-6028(97)00560-8 ◽

1997 ◽

Vol 393 (1-3) ◽

pp. 72-84 ◽

Cited By ~ 28

Author(s):

Cynthia L. Kelchner ◽

Andrew E. DePristo

Keyword(s):

Thin Film ◽

Molecular Dynamics ◽

Molecular Dynamics Simulations ◽

Film Growth ◽

Thin Film Growth ◽

Diffusion Limited ◽

Dynamics Simulations

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A two‐dimensional molecular dynamics simulation of thin film growth by oblique deposition

Journal of Applied Physics ◽

10.1063/1.363621 ◽

1996 ◽

Vol 80 (10) ◽

pp. 5682-5690 ◽

Cited By ~ 92

Author(s):

Liang Dong ◽

Richard W. Smith ◽

David J. Srolovitz

Keyword(s):

Thin Film ◽

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Film Growth ◽

Thin Film Growth ◽

Dynamics Simulation ◽

Two Dimensional ◽

Oblique Deposition

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Unraveling the deposition mechanism in a-C:H thin-film growth: A molecular-dynamics study for the reaction behavior of C3 and C3H radicals with a-C:H surfaces

Journal of Applied Physics ◽

10.1063/1.2150149 ◽

2006 ◽

Vol 99 (1) ◽

pp. 014902 ◽

Cited By ~ 23

Author(s):

E. Neyts ◽

A. Bogaerts ◽

M. C. M. van de Sanden

Keyword(s):

Thin Film ◽

Molecular Dynamics ◽

Film Growth ◽

Thin Film Growth ◽

Deposition Mechanism ◽

Reaction Behavior

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Molecular dynamics simulation about porous thin-film growth in secondary deposition

Applied Surface Science ◽

10.1016/j.apsusc.2007.03.049 ◽

2007 ◽

Vol 253 (18) ◽

pp. 7471-7477 ◽

Cited By ~ 6

Author(s):

Huawei Chen ◽

A. Kiet Tieu ◽

Qiang Liu ◽

Ichiro Hagiwara ◽

Cheng Lu

Keyword(s):

Thin Film ◽

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Film Growth ◽

Thin Film Growth ◽

Dynamics Simulation ◽

Porous Thin Film

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Effect of incident angle on thin film growth: A molecular dynamics simulation study

Thin Solid Films ◽

10.1016/j.tsf.2013.01.067 ◽

2013 ◽

Vol 544 ◽

pp. 496-499 ◽

Cited By ~ 12

Author(s):

Yongzhi Cao ◽

Junjie Zhang ◽

Chao Wu ◽

Fuli Yu

Keyword(s):

Thin Film ◽

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Simulation Study ◽

Film Growth ◽

Incident Angle ◽

Thin Film Growth ◽

Dynamics Simulation

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Molecular Dynamics simulation of Ni thin film growth on Cu (001) substrate

Advances in Engineering Materials and Applied Mechanics ◽

10.1201/b19268-99 ◽

2015 ◽

pp. 565-572

Keyword(s):

Thin Film ◽

Molecular Dynamics ◽

Molecular Dynamics Simulation ◽

Film Growth ◽

Thin Film Growth ◽

Dynamics Simulation

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