Electron Irradiation Induced Crystallization of Amorphous Al2O3 Films on Silicon Substrates

1993 ◽  
Vol 311 ◽  
Author(s):  
J. Liu ◽  
C. J. Barbero ◽  
J. W. Corbett ◽  
K. Rajan ◽  
H. Leary
Keyword(s):  
Electron Beam ◽  
Electron Beam Irradiation ◽  
Silicon Substrates ◽  
Dose Rates ◽  
Transmission Electron ◽  
Beam Dose ◽  
Al2o3 Films ◽  
Induced Crystallization ◽  
Amorphous Al2o3

ABSTRACTAn in situ study of electron beam irradiation induced amorphous–to–crystalline transformation of Al2O3 films on silicon substrates has been carried out using transmission electron microscopy. Trigonal α–Al2O3 crystallites can be observed for electron beam dose rates larger than 10 mA/cm2. It is found that the nucleation and growth processes dominate near the Al2O3–Si interface. The possible effect of the silicon substrate on the growth of Al2O3 crystallites is considered.

Coalescence between Au nanoparticles as induced by nanocurvature effect and electron beam athermal activation effect

Nanoscale ◽  
2018 ◽  
Vol 10 (17) ◽  
pp. 7978-7983 ◽  
Author(s):  
Liang Cheng ◽  
Xianfang Zhu ◽  
Jiangbin Su
Keyword(s):  
Electron Beam ◽  
Electron Microscope ◽  
Transmission Electron Microscope ◽  
Room Temperature ◽  
Electron Beam Irradiation ◽  
Au Nanoparticles ◽  
Beam Irradiation ◽  
Activation Effect ◽  
Transmission Electron

The coalescence of two single-crystalline Au nanoparticles on surface of amorphous SiOxnanowire, as induced by electron beam irradiation, wasin situstudied at room temperature in a transmission electron microscope.

In situ Transmission Electron Microscopy Studies on Structural Dynamics of Transition Metal Nanoclusters

2005 ◽  
Vol 20 (7) ◽  
pp. 1785-1791 ◽  
Author(s):  
T. Vystavel ◽  
S.A. Koch ◽  
G. Palasantzas ◽  
J.Th.M. De Hosson
Keyword(s):  
Electron Microscopy ◽  
Transmission Electron Microscopy ◽  
Electron Beam ◽  
Transition Metal ◽  
Electron Beam Irradiation ◽  
Oxide Shell ◽  
Metal Nanoclusters ◽  
Beam Irradiation ◽  
Transmission Electron

The structural stability of transition metal nanoclusters has been scrutinized with in situ transmission electron microscopy as a function of temperature. In particular iron, cobalt, niobium, and molybdenum clusters with diameters around 5 nm have been investigated. During exposure to air, a thin oxide shell with a thickness of 2 nm is formed around the iron and cobalt clusters, which is thermally unstable under moderate high vacuum annealing above 200 °C. Interestingly, niobium clusters oxidize only internally at higher temperatures without the formation of an oxide shell. They are unaffected under electron beam irradiation, whereas iron and cobalt undergo severe structural changes. Further, no cluster coalescence of niobium takes place, even during annealing up to 800 °C, whereas iron and cobalt clusters coalesce after decomposition of the oxide, as long as the clusters are in close contact. In contrast to niobium, molybdenum clusters do not oxidize upon annealing; they are stable under electron beam irradiation and coalesce at temperatures higher than 800 °C. In all cases, the coalescence process indicates a strong influence of the local environment of the cluster.

scholarly journals In Situ Atomic-Scale Observation of Silver Oxidation Triggered by Electron Beam Irradiation

Nanomaterials ◽  
2021 ◽  
Vol 11 (4) ◽  
pp. 1021
Author(s):  
Hui Zhang ◽  
Tao Xu ◽  
Yatong Zhu ◽  
Wen Wang ◽  
Hao Zhang ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Beam Irradiation ◽  
Oxidation Process ◽  
Atomic Scale ◽  
Advanced Materials ◽  
Metal Oxidation ◽  
Beam Irradiation ◽  
Transmission Electron ◽  
Fundamental Understanding

Understanding the mechanism of metal oxidation processes is critical for maintaining the desired properties of metals and catalysts, as well as for designing advanced materials. In this work, we investigate the electron beam induced oxidation of silver using in situ transmission electron microscopy. The additions of Ag-O columns on {111} and {110} planes were captured with atomic resolution. Interestingly, oscillatory growth on {110} planes was observed, which resulted from the double effect of electron beam irradiation. It was found that not only thermodynamic factors but also kinetic factors played significant roles in morphology evolutions. These results can facilitate the fundamental understanding of the oxidation process of Ag and provide a promising approach for the fabrication of desired nanostructures.

scholarly journals Electron beam irradiation induced crystallization behavior of amorphous Ge2Sb2Te5 chalcogenide material

2019 ◽  
Vol 49 (1) ◽  
Author(s):  
Byeong-Seon An
Keyword(s):  
Electron Beam ◽  
Electron Beam Irradiation ◽  
Beam Irradiation ◽  
Transmission Electron ◽  
Chalcogenide Material ◽  
Long Time ◽  
Time Observation ◽  
Change Material ◽  
Nucleation And Growth Mechanism

AbstractThe crystallization of amorphous Ge2Sb2Te5 phase change material induced by electron beam irradiation was investigated by in-situ transmission electron microscopy (TEM). Amorphous matrix transformed into a partially crystalline state after being irradiated with a 200-keV electron beam for a long time. Real-time observation revealed that the crystallization of amorphous Ge2Sb2Te5 film occurs through a nucleation and growth mechanism under electron beam irradiation in TEM. While uncertainty from the 2D projection remains, the nuclei have been observed to grow preferentially along the < 100> direction.

Electron-beam irradiation induced conductivity in ZnS nanowires as revealed by in situ transmission electron microscope

2009 ◽  
Vol 106 (3) ◽  
pp. 034302 ◽  
Author(s):  
Baodan Liu ◽  
Yoshio Bando ◽  
Mingsheng Wang ◽  
Chunyi Zhi ◽  
Xiaosheng Fang ◽  
...  
Keyword(s):  
Electron Beam ◽  
Electron Microscope ◽  
Transmission Electron Microscope ◽  
Electron Beam Irradiation ◽  
Beam Irradiation ◽  
Transmission Electron

In Situ Real Time Observation of Chemical Vapor Deposition Using an Environmental Transmission Electron Microscope

1995 ◽  
Vol 404 ◽  
Author(s):  
Jeff Drucker ◽  
Renu Sharma ◽  
Karl Weiss ◽  
B. L. Ramakrishna ◽  
John Kouvetakis
Keyword(s):  
Growth Rate ◽  
Electron Beam ◽  
Electron Microscope ◽  
Vapor Deposition ◽  
Electron Beam Irradiation ◽  
Film Growth ◽  
Chemical Vapor ◽  
Beam Irradiation ◽  
Transmission Electron

AbstractMaterial synthesis by chemical vapor deposition (CVD) in a number of material systems has been investigated in real time using an environmental transmission electron microscope (ETEM) with 3.8 Å resolution. Here, we will focus on two metal / insulator systems. Al CVD onto SiO2 from trimethyl amine alane and Au CVD from ethyl (trimethylphosphine) gold (I), also onto SiO2. For Al deposition, dendritic growth was observed for all pressure / substrate temperature combinations investigated for growth on untreated SiO2. Subsequent to reaction of the substrate surface with TiC14, almost immediate continuous Al film growth was observed. Growth rates for the Al film could be measured in situ by monitoring the evolution of the growth front at the Al/vacuum interface. In this system, very little enhancement in the metal film growth rate was observed as a consequence of electron beam irradiation for continuous films grown after TiCl4 pretreatment.. This dramatically contrasts with the case of Au CVD investigated. In this instance, growth rate enhancements of up to 150 times were observed during electron beam irradiation as compared to purely pyrolytic decomposition of the precursor on the insulator surface. This growth rate enhancement decreased monotonically with substrate temperature. We surmise that this effect is related to the ratio of precursor surface residence time prior to ecomposition to the probability of collision from the impinging electron beam.

Sign in / Sign up

Export Citation Format

Share Document