Characterization of the Degradation Processes in SiO2-Si Structure by Means of Electrolyte-Insulating-Semiconductor Systems
AbstractA non destructive method to characterize the properties of SiO2 films in SiO2-Si structures and analyze their variations under different external actions is presented and discussed. The method is based on the properties of the Electrolyte-SiO2 contact under polarization which allows us to study the SiO2 film in different injection conditions, in a hole injection zone, in a predominant electron injection zone, and finally, in a region of electron heating as a result of the electric field action before to reach the oxide breakdown. Moreover, using this method, higher electric field values than in the metal-SiO2-Si system can be applied.The characterization of hole traps, electron traps and defect precursors states in SiO2 films are carried out as well as their evolution and influence on the SiO2-Si structure degradation and electrical behaviour. Results measured on SiO2-Si structures obtained from different technological processes and submitted to different treatments are reported in order to discuss the possibilities of this method as a power tool to assess the stability and quality of insulating layer on semiconductors.